Schedulability analysis of time-constrained cluster tools with bounded time variation by an extended petri net

IEEE Transactions on Automation Science and Engineering

Volumn 5, Issue 3, 2008, Pages 490-503

  Kim, Ja Hee ^a   Lee, Tae Eog ^b  

^a Seoul National University of Science and Technology   (South Korea)

^b Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cluster tool; Petri net; Scheduling; Time constraint; Time variation; Wafer delay

Indexed keywords

FISH; GRAPH THEORY; LOW PRESSURE CHEMICAL VAPOR DEPOSITION; METALLIZING; OPTICAL DESIGN; PETRI NETS; THEOREM PROVING; TOOLS;

(+ MOD 2N) OPERATION; (I ,J) CONDITIONS; BOUNDED TIME; CLUSTER TOOLS; DELAY CONSTRAINTS; DISCRETE-EVENT SYSTEM (DES); EXTENDED PETRI NETS; FEASIBLE SCHEDULE; FINITE INTERVALS; GRAPH-BASED; LOW PRESSURE CHEMICAL VAPOR DEPOSITION (LP-CVD); RANDOM VARIATIONS; RESIDUAL GASES; SCHEDULABILITY; SCHEDULABILITY ANALYSIS; SUFFICIENT CONDITIONS; SYSTEMATIC METHODS; TASK DELAY; TIME CONSTRAINED; TIME LIMIT; TIME VARIATIONS; WAFER ALIGNMENT; WAFER FABRICATIONS;

VAPOR DEPOSITION;

EID: 46849094532     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2007.912716     Document Type: Article

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