Non-cyclic scheduling of a wet station

IEEE Transactions on Automation Science and Engineering

Volumn 11, Issue 4, 2014, Pages 1262-1274

  Kim, Hyun Jung ^a   Lee, Jun Ho ^a   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Branch and bound algorithm; Cluster tool; Deadlock; No wait; Petri nets; Wet station

Indexed keywords

EID: 84908672464     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2013.2255037     Document Type: Article

References (45)

1. J.-K. Lu, F.-H. Ko, T.-C. Chu, Y.-C. Sun, M.-Y. Wang, and T.-K. Wang, "Evaluation of cleaning efficiency with a radioactive tracer and development of a microwave digestion method for semiconductor pro cesses," Analytica Chimica Acta, vol. 407, no. 1-2, pp. 291-300, 2000.
2. T.-E. Lee, H.-Y. Lee, and S.-J. Lee, "Scheduling a wet station for wafer cleaning with multiple job flows and multiple wafer-handling robots," Int. J. Prod. Res., vol. 45, no. 3, pp. 487-507, 2007.
3. C. Sriskandarajah, I. Drobouchevitch, S. P. Sethi, and R. Chan-drasekaran, "Scheduling multiple parts in a robotic cell served by a dual gripper robot," Oper. Res., vol. 52, no. 1, pp. 65-82, 2004.
4. M. Dawande, H. N. Geismar, S. P. Sethi, and C. Sriskandarajah, "Sequencing and scheduling in robotic cells: recent developments," J. Scheduling, vol. 8, no. 5, pp. 387-426, 2005.
5. V. Kats, E. Levner, and L. Meyzin, "Multiple-part cyclic hoist scheduling using a sieve method," IEEE Trans. Robot. Autom., vol. 15, no. 4, pp. 704-713, Aug. 1999.
6. N. Brauner, G. Finke, and W. Kubiak, "Complexity of one-cycle robotic flow-shops," J. Scheduling, vol. 6, no. 4, pp. 355-372, 2003.
7. A. Che, C. Chu, and F. Chu, "Multicyclic hoist scheduling with constant processing times," IEEE Trans. Robot. Autom., vol. 18, no. 1, pp. 69-80, Feb. 2002.
8. A. Che and C. Chu, "Cyclic hoist scheduling in large real-life electroplating lines," OR Spectrum, vol. 29, no. 3, pp. 445-470, 2007.
9. A. Che, P. Yan, N. Yang, and C. Chu, "Optimal cyclic scheduling of a hoist and multi-type parts with fixed processing times," Int. J. Prod. Res., vol. 48, no. 5, pp. 1225-1243, 2010.
10. G. W. Shapiro and H. L. W. Nuttle, "Hoist scheduling for a PCB electroplating facility," IIE Trans., vol. 20, no. 2, pp. 157-167, 1988.
11. W. K. V. Chan, J. Yi, and S. Ding, "Optimal scheduling of multicluster tools with constant robot moving times, Part I: Two-cluster analysis," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 5-16, Jan. 2011.
12. W. K. V. Chan, S. Ding, J. Yi, and D. Song, "Optimal scheduling of multicluster tools with constant robot moving times, Part II: Tree-like topology configurations," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 17-28, Jan. 2011.
13. N. Wu, F. Chu, C. Chu, and M. Zhou, "Petri net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes," IEEE Trans. Autom. Sci. Eng., vol. 8, no. 1, pp. 42-55, Jan. 2011.
14. Y. Qiao, N. Wu, and M. Zhou, "A Petri net-based novel scheduling approach and its cycle time analysis for dual-arm cluster tools with wafer revisiting," IEEE Trans. Semiconductor Manuf., vol. 26, no. 1, pp. 100-110, Feb. 2013.
15. N. Wu, F. Chu, C. Chu, and M. Zhou, "Petri net modeling and cycle-time analysis of dual-arm cluster tools with wafer revisiting," IEEE Trans. Syst., Man, Cybern.: Syst., vol. 43, no. 1, pp. 196-207, Jan. 2013.
16. H. N. Geismar, C. Sriskandarajah, and N. Ramanan, "Increasing throughput for robotic cells with parallel machines and multiple robots," IEEE Trans. Autom. Sci. Eng., vol. 1, no. 1, pp. 84-89, Jan. 2004.
17. J. M. Y. Leung, G. Zhang, X. Yang, R. Mak, and K. Lam, "Optimal cyclic multi-hoist scheduling: A mixed integer programming approach," Oper. Res., vol. 52, no. 6, pp. 965-976, 2004.
18. K. Kogan and E. Levner, "A polynomial algorithm for scheduling small-scale manufacturing cells served by multiple robots," Comput. Oper. Res., vol. 25, no. 1, pp. 53-62, 1998.
19. S. Ding, J. Yi, and M. T. Zhang, "Multicluster tools scheduling: An integrated event graph and network model approach," IEEE Trans. Semiconductor Manuf., vol. 19, no. 3, pp. 339-351, Aug. 2006.
20. V. Kats, L. Lei, and E. Levner, "Minimizing the cycle time of multiple-product processing networks with a fixed operation sequence, setups, and time-window constraints," Eur. J. Oper. Res., vol. 187, no. 3, pp. 1196-1211, 2008.
21. A. Agnetis, "Scheduling no-wait robotic cells with two and three machines," Eur. J. Oper. Res., vol. 123, no. 2, pp. 303-314, 2000.
22. N. Wu, C. Chu, F. Chu, and M. C. Zhou, "A Petri net method for schedulability and scheduling problems in single-arm cluster tools with wafer residency time constraints," IEEE Trans. Semicond. Manuf., vol. 21, no. 2, pp. 224-237, May, 2008.
23. T.-E. Lee and S.-H. Park, "An extended event graph with negative places and tokens for time window constraints," IEEE Trans. Autom. Sci. Eng., vol. 2, no. 4, pp. 319-332, 2005.
24. N. Wu and M. Zhou, "A closed-form solution for schedulability and optimal scheduling of dual-arm cluster tools with wafer residency time constraint based on steady schedule analysis," IEEE Trans. Autom. Sci. Eng., vol. 7, no. 2, pp. 303-315, Apr. 2010.
25. N. Wu and M. Zhou, "Modeling, analysis and control of dual-arm cluster tools with residency time constraint and activity time variation based on Petri nets," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 2, pp. 446-454, Apr. 2012.
26. Y. Qiao, N. Wu, and M. Zhou, "Petri net modeling and wafer sojourn time analysis of single-arm cluster tools with residency time constraints and activity time variation," IEEE Trans. Semicond. Manuf., vol. 25, no. 3, pp. 432-446, Aug. 2012.
27. N. Wu and M. Zhou, "Schedulability analysis and optimal scheduling of dual-arm cluster tools with residency time constraint and activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 1, pp. 203-209, Jan. 2012.
28. Y. Qiao, N. Wu, and M. Zhou, "Real-time scheduling of single-arm cluster tools subject to residency time constraints and bounded activity time variation," IEEE Trans. Autom. Sci. Eng., vol. 9, no. 3, pp. 564-577, Jul. 2012.
29. J.-H. Kim, T.-E. Lee, H.-Y. Lee, and D.-B. Park, "Scheduling analysis of time-constrained dual-armed cluster tools," IEEE Trans. Semicond. Manuf., vol. 16, no. 3, pp. 521-534, Aug. 2003.
30. N. Tian, A. Che, and J. Feng, "Real-time hoist scheduling for multistage material handling process under uncertainties," AIChE Journal, vol. 59, no. 2, pp. 1046-1048, 2013.
31. C. Zhou, J. Fu, and Q. Xu, "Real-time dynamic hoist scheduling for multistage material handling process under uncertainties," AIChE Journal, vol. 59, no. 2, pp. 465-482, 2013.
32. J. P. Stinson, E. W. Davis, and B. M. Khumawala, "Multiple resource-constrained scheduling using branch and bound," AIIE Trans., vol. 10, no. 3, pp. 252-259, 1978.
33. A. Eryilmaz and R. Srikant, "Fair resource allocation in wireless networking using queue-length-based scheduling and congestion control," in Proc. Annu. Joint Conf. IEEE Comput. Commun. Soc., Miami, FL, USA, 2005, pp. 1794-1803.
34. H.-J. Kim, J.-H. Lee, C. Jung, and T.-E. Lee, "Scheduling cluster tools with ready time constraints for consecutive small lots," IEEE Trans. Autom. Sci. Eng., vol. 10, no. 1, pp. 145-159, Jan. 2013.
35. W. Zuberek, "Timed Petri nets in modeling and analysis of cluster tools," IEEE Trans. Robot. Autom., vol. 17, no. 5, pp. 562-575, Oct. 2001.
36. T.-K. Kim, C. Jung, and T.-E. Lee, "Scheduling start-up and closedown periods of dual-armed cluster tools with wafer delay regulation," Int. J. Prod. Res., vol. 50, no. 10, pp. 2785-2795, 2012.
37. T. Murata, "Petri nets: Properties, analysis and application," Proc. IEEE, vol. 77, no. 4, pp. 541-580, 1989.
38. R. Divid and H. Alla, "Petri nets for modeling of dynamic systems-A survey," Automatica, vol. 30, no. 2, pp. 175-202, 1994.
39. H.-Y. Lee and T.-E. Lee, "Scheduling single-armed cluster tools with reentrant wafer flow," IEEE Trans. Semicond. Manuf., vol. 19, no. 2, pp. 226-240, 2006.
40. C. Jung, "Cyclic scheduling of timed petri nets: behavior, optimization, and application to cluster tools," Ph.D. dissertation, Dept. Industrial and Systems Engineering, Korea Advanced Institute of Science and Technology, Daejeon, Republic of Korea, 2010.
41. M. Zhou, H.-S. Chiu, and H. Xiong, "Petri net scheduling of FMS using branch and bound method," in Proc. IEEE Int. Conf. Ind. Electron., Control, Instrumentation, Orlando, 1995, pp. 211-216.
42. D. Y. Lee and F. DiCesare, "Scheduling flexible manufacturing systems using Petri nets and heuristic search," IEEE Trans. Robot. Autom., vol. 10, no. 2, pp. 123-132, 1994.
43. M. Florian, P. Trepant, and G. McMahon, "An implicit enumeration algorithm for the machine sequencing problem," Manage. Sci., vol. 17, no. 12, pp. 782-792, 1971.
44. J. Carlier, "The one-machine sequencing problem," Eur. J. Oper. Res., vol. 11, no. 1, pp. 42-47, 1982.
45. C. Kim and T.-E. Lee, "Modeling and simulation of Petri nets for complex scheduling rules of automated manufacturing systems," in Proc. Eur. Modeling Simulation Symposium, Roma, 2011, pp. 319-324.