Optimal scheduling of dual-armed cluster tools without swap restriction

4th IEEE Conference on Automation Science and Engineering, CASE 2008

Volumn , Issue , 2008, Pages 103-108

  Paek, Jin Heum ^a   Lee, Tae Eog ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

Cluster tools; Dual arms; No Swap restriction; Petri net; Scheduling

Indexed keywords

ATOMIC LAYER DEPOSITION; GRAPH THEORY; INTEGER PROGRAMMING; PETRI NETS; PULSED LASER DEPOSITION; ROBOTIC ARMS; ROBOTICS; ROBOTS; SCHEDULING; SEMICONDUCTOR DEVICE MANUFACTURE;

ATOMIC LAYERS; BRANCH-AND-BOUND; BRANCHING RULES; CLUSTER TOOLS; CONCURRENT PROCESSING; DEADLOCK PREVENTIONS; DUAL ARMS; MIXED INTEGER PROGRAMMING MODELS; MODELING METHODS; NO SWAP RESTRICTION; OPTIMAL SCHEDULING; PETRI NET; ROBOT ARMS; ROBOT TASKS; SOLUTION SPACES; SWAP OPERATIONS; TOOL CYCLE TIMES; WAFER DELAYS;

ROBOT PROGRAMMING;

EID: 54949132214     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/COASE.2008.4626564     Document Type: Conference Paper

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