Optimal scheduling of multicluster tools with constant robot moving times, part II: Tree-like topology configurations

IEEE Transactions on Automation Science and Engineering

Volumn 8, Issue 1, 2011, Pages 17-28

  Chan, Wai Kin Victor ^a   Ding, Shengwei ^b   Yi, Jingang ^c   Song, Dezhen ^d  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

^b NESTLÉ RESEARCH CENTER   (Switzerland)

^c RUTGERS UNIVERSITY   (United States)

^d TEXAS A AND M UNIVERSITY   (United States)

Author keywords

Cluster tools; multiple machines; performance productivity; scheduling; semiconductor manufacturing

Indexed keywords

ANALYTICAL RESULTS; CLOSED FORM; CLUSTER TOOL; CYCLE TIME; INTERACTION RELATIONSHIP; MONTE CARLO SIMULATION; MULTI-UNIT; MULTIPLE MACHINE; OPTIMAL SCHEDULING; OPTIMALITY CONDITIONS; PERFORMANCE/ PRODUCTIVITY; SEMICONDUCTOR MANUFACTURING; TOPOLOGY CONFIGURATIONS;

COMPUTER SIMULATION; MANUFACTURE; MONTE CARLO METHODS; OPTIMIZATION; PRODUCTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; TOOLS;

ROBOTS;

EID: 78651094962     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2010.2046893     Document Type: Article

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