Productivity improvement from using machine buffers in dual-gripper cluster tools

IEEE Transactions on Automation Science and Engineering

Volumn 8, Issue 1, 2011, Pages 29-41

  Geismar, Neil ^a   Dawande, Milind ^b   Sriskandarajah, Chelliah ^b  

^a TEXAS A AND M UNIVERSITY   (United States)

^b The University of Texas at Dallas   (United States)

Author keywords

Cluster tools; cyclic solutions; dual gripper robots; manufacturing

Indexed keywords

ASYMPTOTICALLY OPTIMAL; CLUSTER TOOL; CYCLIC SEQUENCES; CYCLIC SOLUTIONS; DUAL-GRIPPER ROBOTS; INPUT AND OUTPUTS; INPUT BUFFERS; MANUFACTURING; OPTIMAL THROUGHPUTS; OUTPUT BUFFER; PRODUCTIVITY IMPROVEMENTS; ROBOTIC CELL; SCHEDULING OPERATIONS; SEMICONDUCTOR EQUIPMENT; SEMICONDUCTOR WAFER FABRICATION; UPPER BOUND;

GRIPPERS; MANUFACTURE; OPTIMIZATION; PRODUCTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

TOOLS;

EID: 78651080378     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2009.2039567     Document Type: Article

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