-
1
-
-
0036411996
-
-
S. Zhang, Y.Q. Fu, H.J. Du, X.T. Zeng and Y.C. Liu, Surf. Coat. Technol. 162 (2002) 42-48.
-
(2002)
Surf. Coat. Technol
, vol.162
, pp. 42-48
-
-
Zhang, S.1
Fu, Y.Q.2
Du, H.J.3
Zeng, X.T.4
Liu, Y.C.5
-
5
-
-
0343380795
-
-
L. Maya, W.R. Allen, A.L. Glover and J.C. Mabon, J. Vac. Sci. Technol. B13(2) (1995) 361-365.
-
(1995)
J. Vac. Sci. Technol
, vol.B13
, Issue.2
, pp. 361-365
-
-
Maya, L.1
Allen, W.R.2
Glover, A.L.3
Mabon, J.C.4
-
6
-
-
0030246371
-
-
T. Onishi, E. Iwamura, K. Takagi and K. Yashikawa, J. Vac. Sci. Technol. A14(5) (1995) 2728-2735.
-
(1995)
J. Vac. Sci. Technol
, vol.A14
, Issue.5
, pp. 2728-2735
-
-
Onishi, T.1
Iwamura, E.2
Takagi, K.3
Yashikawa, K.4
-
9
-
-
0035906754
-
-
B. Cantor, C.M. Allen, R. Dunin-Burkowski, M.H. Green, J.L. Hutchinson, K.A.Q.Q’. Reilly and A.K. Petford-Long, Scripta Mater. 44 (2001) 2055-2059.
-
(2001)
Scripta Mater
, vol.44
, pp. 2055-2059
-
-
Cantor, B.1
Allen, C.M.2
Dunin-Burkowski, R.3
Green, M.H.4
Hutchinson, J.L.5
Reilly, K.A.Q.Q.6
Petford-Long, A.K.7
-
16
-
-
0012837238
-
-
eds. A.R. Dinesen, M. Eldrup, D.J. Jensen, S. Linderoth, T.B. Pedersen, N.H. Pryds, A.S. Pedersen and J.A. Wert, (Roskilde, Denmark)
-
J. Schiotz, Proc. 22nd Riso Int. Symp. Mat. Sci., eds. A.R. Dinesen, M. Eldrup, D.J. Jensen, S. Linderoth, T.B. Pedersen, N.H. Pryds, A.S. Pedersen and J.A. Wert, (Roskilde, Denmark, 2001) 127-139.
-
(2001)
Proc. 22nd Riso Int. Symp. Mat. Sci
, pp. 127-139
-
-
Schiotz, J.1
-
17
-
-
16444381981
-
-
J. Schiotz, T. Vegge, F.D.Di. Tolla and K.W. Jacobsen, Phys. Rev. B60(17) (1999) 11971-11983.
-
(1999)
Phys. Rev
, vol.B60
, Issue.17
, pp. 11971-11983
-
-
Schiotz, J.1
Vegge, T.2
Tolla, F.D.D.3
Jacobsen, K.W.4
-
20
-
-
0002271949
-
-
eds. A. Kumar, Y.W. Chung, J.J. Moore and J.E. Smugeresky (The Minerals, Metals and Materials Society)
-
H. Holleck, in Surface Engineering: Science and Technology I, eds. A. Kumar, Y.W. Chung, J.J. Moore and J.E. Smugeresky (The Minerals, Metals and Materials Society, 1999) 207-218.
-
(1999)
Surface Engineering: Science and Technology I
, pp. 207-218
-
-
Holleck, H.1
-
21
-
-
2142806777
-
-
S. Veprek, P. Nesladek, A. Niederhofer, F. Glatz, M. Jilek and M. Sima, Surf. Coat. Technol. 108-109 (1998) 138-147.
-
(1998)
Surf. Coat. Technol
, vol.108-109
, pp. 138-147
-
-
Veprek, S.1
Nesladek, P.2
Niederhofer, A.3
Glatz, F.4
Jilek, M.5
Sima, M.6
-
23
-
-
0034310611
-
-
S. Veprek, A. Niederhofer, K. Moto, T. Bolom, H.-D. Mannling, P. Nesladek, G. Dollinger and A. Bergmaier, Surf. Coat. Technol. 133-134 (2000) 152-159.
-
(2000)
Surf. Coat. Technol
, vol.133-134
, pp. 152-159
-
-
Veprek, S.1
Niederhofer, A.2
Moto, K.3
Bolom, T.4
Mannling, H.-D.5
Nesladek, P.6
Dollinger, G.7
Bergmaier, A.8
-
26
-
-
0001717018
-
-
S. Veprek, M. Haussmann and S. Li, 13th Int. Conf. on CVD, Los Angeles, May 1996, The Electrochem. Soc. Proc. 96-5 (1996) 619.
-
(1996)
13th Int. Conf. on CVD, Los Angeles, May 1996, The Electrochem. Soc. Proc
, vol.96-5
, pp. 619
-
-
Veprek, S.1
Haussmann, M.2
Li, S.3
-
27
-
-
0037472643
-
-
P. Karvankova, M.G.J. Veprek-Heijman, O. Zindulka, A. Bergmaier and S. Veprek, Surf. Coat. Technol. 163-164 (2003) 149-156.
-
(2003)
Surf. Coat. Technol
, vol.163-164
, pp. 149-156
-
-
Karvankova, P.1
Veprek-Heijman, M.G.J.2
Zindulka, O.3
Bergmaier, A.4
Veprek, S.5
-
31
-
-
17544391790
-
-
H.-D. Mannling, D.S. Patil, K. Moto, M. Jilek and S. Veprek, Surf. Coat. Technol. 146-147 (2001) 263-267.
-
(2001)
Surf. Coat. Technol
, vol.146-147
, pp. 263-267
-
-
Mannling, H.-D.1
Patil, D.S.2
Moto, K.3
Jilek, M.4
Veprek, S.5
-
32
-
-
4243505561
-
-
C. Mitterer, P.H. Mayrhofer, M. Bechliesser, P. Losbichler, P. Warbichler, F. Hofer, P.N. Gibson, W. Gissler, H. Hruby, J. Musil and J. Vicek, Surf. Coat. Technol. 120-121 (1999) 405-411.
-
(1999)
Surf. Coat. Technol
, vol.120-121
, pp. 405-411
-
-
Mitterer, C.1
Mayrhofer, P.H.2
Bechliesser, M.3
Losbichler, P.4
Warbichler, P.5
Hofer, F.6
Gibson, P.N.7
Gissler, W.8
Hruby, H.9
Musil, J.10
Vicek, J.11
-
34
-
-
0033831695
-
-
O. Raddatz, G.A. Schneider, W. Mackens, H. Vob and N. Claussen, J. Eur. Ceram. Soc. 20 (2000) 2261-2273.
-
(2000)
J. Eur. Ceram. Soc
, vol.20
, pp. 2261-2273
-
-
Raddatz, O.1
Schneider, G.A.2
Mackens, W.3
Vob, H.4
Claussen, N.5
-
35
-
-
0024912772
-
-
P.A. Mataga, Acta Metal. 37(12) (1989) 3349-3359.
-
(1989)
Acta Metal
, vol.37
, Issue.12
, pp. 3349-3359
-
-
Mataga, P.A.1
-
36
-
-
84967452438
-
-
eds. A.R. Dinesen, M. Eldrup, D.J. Jensen, S. Linderoth, T.B. Pedersen, N.H. Pryds, A.S. Pedersen and J.A. Wert (Roskilde, Denmark)
-
D.G. Morris, Proc. 22nd Riso Int. Symp. Mat. Sci., eds. A.R. Dinesen, M. Eldrup, D.J. Jensen, S. Linderoth, T.B. Pedersen, N.H. Pryds, A.S. Pedersen and J.A. Wert (Roskilde, Denmark, 2001) 89-104.
-
(2001)
Proc. 22nd Riso Int. Symp. Mat. Sci
, pp. 89-104
-
-
Morris, D.G.1
-
49
-
-
76349107467
-
Introduction to Chemical Vapor Deposition (CVD)
-
eds. J.-H. Park and T.S. Sudarshan (ASM International, Materials Park)
-
J.R. Creighton and P. Ho, Introduction to Chemical Vapor Deposition (CVD) Chemical Vapor Deposition, eds. J.-H. Park and T.S. Sudarshan (ASM International, Materials Park, 2001) 1-22.
-
(2001)
Chemical Vapor Deposition
, pp. 1-22
-
-
Creighton, J.R.1
Ho, P.2
-
58
-
-
84876968686
-
-
Materials Evaluation and Engineering, Inc. Plymouth, Mn55441-5447
-
Handbook of AnalyTiCal Methods for Materials. Materials Evaluation and Engineering, Inc. Plymouth, Mn55441-5447, http://www.meeinc. com/hamm72d.pdf.
-
Handbook of AnalyTiCal Methods for Materials
-
-
-
62
-
-
33744538097
-
-
D.A. Shirley, Phys. Rev. B5(12) (1972) 4709-4714.
-
(1972)
Phys. Rev
, vol.B5
, Issue.12
, pp. 4709-4714
-
-
Shirley, D.A.1
-
70
-
-
0031493594
-
-
F. Esaka, K. Furuya, H. Shimada, M. Imamura, N. Matsubayashi, H. Sato, A. Nishijima, A. Kawana, H. Ichimura and T. Kikuchi, J. Vac. Sci. Technol. A15(5) (1997) 2521-2528.
-
(1997)
J. Vac. Sci. Technol
, vol.A15
, Issue.5
, pp. 2521-2528
-
-
Esaka, F.1
Furuya, K.2
Shimada, H.3
Imamura, M.4
Matsubayashi, N.5
Sato, H.6
Nishijima, A.7
Kawana, A.8
Ichimura, H.9
Kikuchi, T.10
-
71
-
-
29144530427
-
-
ed. J. Chastian (Physical Electronics, Eden Prairie, Minnesota)
-
J.F. Moulder, W.F. STiCkle, P.E. Sobol and K.D. Bomben, in Handbook of X-ray Photoelectron Spectroscopy: A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data, ed. J. Chastian (Physical Electronics, Eden Prairie, Minnesota, 1995) 238-238.
-
(1995)
Handbook of X-ray Photoelectron Spectroscopy: A Reference Book of Standard Spectra for Identification and Interpretation of XPS Data
, pp. 238
-
-
Moulder, J.F.1
STiCkle, W.F.2
Sobol, P.E.3
Bomben, K.D.4
-
73
-
-
84957225275
-
-
C. Ernsberger, J. Nickerson, A.E. Miller and J. Moulder, J. Vac. Sci. Technol. A3(6) (1985) 2415-2418.
-
(1985)
J. Vac. Sci. Technol
, vol.A3
, Issue.6
, pp. 2415-2418
-
-
Ernsberger, C.1
Nickerson, J.2
Miller, A.E.3
Moulder, J.4
-
77
-
-
0001636853
-
-
H.-N. Yang, Y.-P. Zhao, A. Chan, T.-M. Lu and G.-C. Wang, Phys. Rev. B56(7) (1997) 4224-4232.
-
(1997)
Phys. Rev
, vol.B56
, Issue.7
, pp. 4224-4232
-
-
Yang, H.-N.1
Zhao, Y.-P.2
Chan, A.3
Lu, T.-M.4
Wang, G.-C.5
-
78
-
-
4244076431
-
-
H.-N. Yang, Y.-P. Zhang, G.-C.Wang and T.-M. Lu, Phys. Rev. Lett. 76(20) (1996) 3774-3777.
-
(1996)
Phys. Rev. Lett
, vol.76
, Issue.20
, pp. 3774-3777
-
-
Yang, H.-N.1
Zhang, Y.-P.2
Wang, G.-C.3
Lu, T.-M.4
-
86
-
-
0033873295
-
-
N. Kikuchi, M. Kitagawa, A. Sato, E. Kusano, H. Nanto and A. Kinbara, Surf. Coat. Technol. 126 (2000) 131-135.
-
(2000)
Surf. Coat. Technol
, vol.126
, pp. 131-135
-
-
Kikuchi, N.1
Kitagawa, M.2
Sato, A.3
Kusano, E.4
Nanto, H.5
Kinbara, A.6
-
98
-
-
0001037499
-
-
eds. M. Nastasi, M. Parkin Don and H. Gleiter (Klumer Academic Press, Netherlands)
-
G.M. Pharr, D.S. Harding and W.C. Oliver, in Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructure, eds. M. Nastasi, M. Parkin Don and H. Gleiter (Klumer Academic Press, Netherlands, 1993) 449-461.
-
(1993)
Mechanical Properties and Deformation Behavior of Materials Having Ultra-Fine Microstructure
, pp. 449-461
-
-
Pharr, G.M.1
Harding, D.S.2
Oliver, W.C.3
-
110
-
-
0035874097
-
-
T. Sonoda, A. Watazu, J. Zhu, A. Kamiya, T. Nonami, T. Kameyama, K. Naganuma and M. Kato, Thin Solid Films 386 (2001) 227-232.
-
(2001)
Thin Solid Films
, vol.386
, pp. 227-232
-
-
Sonoda, T.1
Watazu, A.2
Zhu, J.3
Kamiya, A.4
Nonami, T.5
Kameyama, T.6
Naganuma, K.7
Kato, M.8
-
111
-
-
0032656082
-
-
H. Takikawa, T. Matsui, T. Sakakibara, A. Bendavid and P.J. Martin, Thin Solid Films 348 (1999) 145-151.
-
(1999)
Thin Solid Films
, vol.348
, pp. 145-151
-
-
Takikawa, H.1
Matsui, T.2
Sakakibara, T.3
Bendavid, A.4
Martin, P.J.5
-
112
-
-
0034310550
-
-
O. Zywitzki, H. Sahm, M. Krug, H. Morgner and M. Neumann, Surf. Coat. Technol. 133-134 (2000) 555-560.
-
(2000)
Surf. Coat. Technol
, vol.133-134
, pp. 555-560
-
-
Zywitzki, O.1
Sahm, H.2
Krug, M.3
Morgner, H.4
Neumann, M.5
-
116
-
-
0001514185
-
-
W.M. Tong, R.S.Williams, A. Yanase, Y. Segawa and M.S. Anderson, Phys. Rev. Lett. 72 (1994) 3374-3377.
-
(1994)
Phys. Rev. Lett
, vol.72
, pp. 3374-3377
-
-
Tong, W.M.1
Williams, R.S.2
Yanase, A.3
Segawa, Y.4
Anderson, M.S.5
-
118
-
-
0242440095
-
-
T. Karabacak, J.P. Singh, Y.-P. Zhao, G.-C. Wang and T.-M. Lu, Phys. Rev. B68(12) (2003) 125-408.
-
(2003)
Phys. Rev
, vol.B68
, Issue.12
, pp. 125-408
-
-
Karabacak, T.1
Singh, J.P.2
Zhao, Y.-P.3
Wang, G.-C.4
Lu, T.-M.5
-
120
-
-
0035465603
-
-
F. Vaz, L. Rebouta, Ph. Goudeau, T. Girardeau, J. Pacaud, J.P. Riviere and A. Traverse, Surf. Coat. Technol. 146-147 (2001) 274-279.
-
(2001)
Surf. Coat. Technol
, vol.146-147
, pp. 274-279
-
-
Vaz, F.1
Rebouta, L.2
Goudeau, P.3
Girardeau, T.4
Pacaud, J.5
Riviere, J.P.6
Traverse, A.7
-
126
-
-
0031147325
-
-
J.H. Je, D.Y. Noh, H.K. Kim and K.S. Liang, J. Appl. Phys. 81(9) (1997) 6126-6133.
-
(1997)
J. Appl. Phys
, vol.81
, Issue.9
, pp. 6126-6133
-
-
Je, J.H.1
Noh, D.Y.2
Kim, H.K.3
Liang, K.S.4
-
128
-
-
0033504658
-
-
F. Vaz, L. Rebouta, B. Almeida, P. Goudeau, J. Pacaud, J.P. Riviere and J.B. Sousa, Surf. Coat. Technol. 120-121 (1999) 166-172.
-
(1999)
Surf. Coat. Technol
, vol.120-121
, pp. 166-172
-
-
Vaz, F.1
Rebouta, L.2
Almeida, B.3
Goudeau, P.4
Pacaud, J.5
Riviere, J.P.6
Sousa, J.B.7
-
134
-
-
84967453224
-
-
http://ssd-rd.web.cern.ch/ssd-rd/Data/Si-General.html
-
-
-
-
136
-
-
84967678202
-
-
http://www.brycoat.com/physprop.html
-
-
-
-
143
-
-
0031546254
-
-
M. Irie, H. Ohara, A. Nakayama, N. Kitagawa and T. Nomura, Nucl. Instrum. Methods Phys. Res B121 (1997) 133-136.
-
(1997)
Nucl. Instrum. Methods Phys. Res
, vol.B121
, pp. 133-136
-
-
Irie, M.1
Ohara, H.2
Nakayama, A.3
Kitagawa, N.4
Nomura, T.5
-
144
-
-
0021519827
-
-
M.F. Zhu, I. Suni, M.-A. Nicolet and T. Sands, J. Appl. Phys. 56(10) (1984) 2740-2745.
-
(1984)
J. Appl. Phys
, vol.56
, Issue.10
, pp. 2740-2745
-
-
Zhu, M.F.1
Suni, I.2
Nicolet, M.-A.3
Sands, T.4
-
146
-
-
0024107360
-
-
E.M. Trent, Wear 128 (1988) 65-81.
-
(1988)
Wear
, vol.128
, pp. 65-81
-
-
Trent, E.M.1
-
147
-
-
0041326479
-
-
Z.G. Li, J.L. He, T. Matsumoto, T. Mori, S. Miyake and Y. Muramatsu, Surf. Coat. Technol. 174-175 (2003) 1140-1144.
-
(2003)
Surf. Coat. Technol
, vol.174-175
, pp. 1140-1144
-
-
Li, Z.G.1
He, J.L.2
Matsumoto, T.3
Mori, T.4
Miyake, S.5
Muramatsu, Y.6
-
151
-
-
0023997851
-
-
L.S. Sigl, P.A. Mataga, B.J. Dalgleish, R.M. McMeeking and A.G. Evans, Acta. Metall. 36(4) (1988) 945-953.
-
(1988)
Acta. Metall
, vol.36
, Issue.4
, pp. 945-953
-
-
Sigl, L.S.1
Mataga, P.A.2
Dalgleish, B.J.3
McMeeking, R.M.4
Evans, A.G.5
-
160
-
-
0036647077
-
-
F. Deschaux-Beaume, T. Cutard, N. Frety and C. Levaillant, J. Am. Ceram. Soc. 85(7) (2002) 1860-1866.
-
(2002)
J. Am. Ceram. Soc
, vol.85
, Issue.7
, pp. 1860-1866
-
-
Deschaux-Beaume, F.1
Cutard, T.2
Frety, N.3
Levaillant, C.4
-
163
-
-
0001517674
-
-
F. Vaz, L. Rebouta, M. Andritschky, M.F. Da Silva and J.C. Soares, J. Eur. Ceram. Soc. 17 (1997) 1971-1977.
-
(1997)
J. Eur. Ceram. Soc
, vol.17
, pp. 1971-1977
-
-
Vaz, F.1
Rebouta, L.2
Andritschky, M.3
Da Silva, M.F.4
Soares, J.C.5
|