Magnetron sputtering of films with controlled texture and grain size

Materials Chemistry and Physics

Volumn 54, Issue 1-3, 1998, Pages 116-122

  Musil, J ^a   Vlcek J ^b  

^a INSTITUTE OF PHYSICS   (Czech Republic)

^b UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Controlled grain size; Controlled texture; Magnetron sputtering; Nanocomposite film; Nanocrystalline film

Indexed keywords

FILM GROWTH; GRAIN SIZE AND SHAPE; ION BOMBARDMENT; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; TEXTURES; THIN FILMS;

CONTROLLED GRAIN SIZE; CONTROLLED GROWTH; NANOCOMPOSITE FILM; NANOCRYSTALLINE FILM;

MAGNETRON SPUTTERING;

EID: 0032117350     PISSN: 02540584     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0254-0584(98)00020-0     Document Type: Article

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