Mechanical and fracture toughness studies of amorphous SiC-N hard coatings using nanoindentation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 3, 1997, Pages 963-967

  Scharf, Thomas W ^a   Deng, Hong ^a   Barnard, John A ^a  

^a University of Alabama   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038177762     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580788     Document Type: Article

References (17)

1. S. V. Hainsworth, H. W. Chandler, and T. F. Page, J. Mater. Res. 11, 1987 (1996).
2. W. T. Zheng, H. Sjostrom, I. Ivanov, K. Z. Xing, E. Broitman, W. R. Salaneck, J. E, Greene, and J.-E. Sundgren, J. Vac. Sci. Technol. A 14, 2696 (1996).
3. G. M. Pharr, D. S. Harding, and W. C. Oliver, in Proc. NATO Advanced Study Institute on Mechanical Properties and Deformation Behavior of Materials Having Ultrafine Microstructures, edited by M. Nastasi, 1992 (unpublished), p. 1.
4. D. S. Harding, W. C. Oliver, and G. M. Pharr, Mater. Res. Soc. Symp. Proc. 356, 663 (1995).
5. W. C. Oliver and G. M. Pharr, J. Mater. Res. 7, 1564 (1992).
6. N. Laidani, R. Capelletti, M. Elena, L. Guzman, G. Mariotto, A. Miotello, and P. M. Ossi, Thin Solid Films 223, 114 (1993).
7. M. Yoshikawa, G. Katagiri, H. Ishida, and A. Ishitani, Solid State Commun. 66, 1177 (1988).
8. A. Morimoto, T. Kataoka, M. Kumada, and T. Shimidzu, Philos. Mag. B 50, 517 (1984).
9. J. E. Smith, Jr., H. H. Broadsky, B. L. Crowder, and M. I. Nathan, Phys. Rev. Lett. 26, 642 (1971).
10. A. L. Yee, H. C. Ong, F. Xiong, and R. P. H. Chang, J. Mater. Res. 11, 1979 (1996).
11. T. W. Scharf, H. Deng, and J. A. Barnard (unpublished).
12. B. R. Lawn, A. G. Evans, and D. B. Marshall, J. Am. Ceram. Soc. 63, 574 (1980).
13. A. Ghosh, M. G. Jenkins, K. W. White, A. S. Kobayashi, and R. C. Bradt, J. Am. Ceram. Soc. 72, 242 (1989).
14. A. J. Whitehead and T. F. Page, Thin Solid Films 220, 277 (1992).
15. M. Sakai and R. C. Bradt, Int. Mater. Rev. 38, 53 (1993).
16. A. Ghosh, Z. Li, C. H. Henager, Jr., A. S. Kobayashi, and R. C. Bradt, Proceedings of Fracture Mechanics of Ceramics, 1996 (unpublished), Vol. 12.
17. T. W. Scharf and J. A. Barnard (unpublished).