Quaternary hard nanocomposite TiCxNy/SiCN coatings prepared by plasma enhanced chemical vapor deposition

Thin Solid Films

Volumn 466, Issue 1-2, 2004, Pages 189-196

  Jedrzejowski, P ^a   Klemberg Sapieha, J E ^a   Martinu, L ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Mechanical and tribological properties; Microstructure; Nanocomposites; PECVD

Indexed keywords

COMPRESSIVE STRESS; ELASTIC MODULI; FRICTION; HARDNESS; INDENTATION; MICROSTRUCTURE; NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THIN FILMS; TOUGHNESS; TRIBOLOGY; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC RECOIL; MECHANICAL AND TRIBOLOGICAL PROPERTIES; MECHANICAL RESISTANCE; NANOCOMPOSITES;

TITANIUM COMPOUNDS;

EID: 4644335449     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2004.03.043     Document Type: Article

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