Coating of superplastic Ti-alloy substrates with Ti and Ti-O films by magnetron DC sputtering

Thin Solid Films

Volumn 386, Issue 2, 2001, Pages 227-232

  Sonoda, T ^a   Watazu, A ^a   Zhu, J ^a   Kamiya, A ^a   Nonami, T ^a   Kameyama, T ^a   Naganuma, K ^a   Kato, M ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Biomaterials; Plasma processing and deposition; Sputtering; Titanium oxide

Indexed keywords

ARGON; AUGER ELECTRON SPECTROSCOPY; BIOCOMPATIBILITY; MAGNETRON SPUTTERING; MIXTURES; OXYGEN; SPUTTER DEPOSITION; SUBSTRATES; SUPERPLASTICITY; TITANIUM ALLOYS; VICKERS HARDNESS TESTING; X RAY DIFFRACTION ANALYSIS;

MAGNETRON DIRECT CURRENT SPUTTERING;

PROTECTIVE COATINGS;

EID: 0035874097     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)01655-2     Document Type: Article

References (25)