Structural analysis of Ti1-xSixNy nanocomposite films prepared by reactive magnetron sputtering

Surface and Coatings Technology

Volumn 120-121, Issue , 1999, Pages 166-172

  Vaz, F ^a   Rebouta, L ^a   Almeida, B ^a   Goudeau, P ^b   Pacaud, J ^b   Riviere J P ^b   Bessa E Sousa, J ^c  

^a UNIVERSITY OF MINHO   (Portugal)

^b UNIVERSITÉ DE POITIERS   (France)

^c UNIVERSITY OF PORTO   (Portugal)

Author keywords

Grain size; Hard coatings; Texture; Titanium and silicon nitride

Indexed keywords

COATING; SILICON NITRIDE; SPUTTERING; STRUCTURAL ANALYSIS; TITANIUM NITRIDE;

EID: 0033504658     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(99)00450-8     Document Type: Article

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