Structure and microhardness of magnetron sputtered ZrCu and ZrCu-N films

Vacuum

Volumn 52, Issue 3, 1999, Pages 269-275

  Musil, J ^a   Zeman, P ^a  

^a UNIVERSITY OF WEST BOHEMIA   (Czech Republic)

Author keywords

Magnetron sputtering; Nanocomposite film ZrCu N; Nanocrystalline film; ZrCu

Indexed keywords

CRYSTAL STRUCTURE; CRYSTALLIZATION; MAGNETIC FILMS; MAGNETRON SPUTTERING; MICROHARDNESS; NANOSTRUCTURED MATERIALS; NITRIDES; NITROGEN; POLYCRYSTALLINE MATERIALS; PRESSURE EFFECTS; SPUTTER DEPOSITION; ZIRCONIUM ALLOYS;

ZIRCONIUM COPPER NITRIDES;

BRASS;

EID: 0033096975     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00297-8     Document Type: Article

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