Comparison of surface oxidation of titanium nitride and chromium nitride films studied by x-ray absorption and photoelectron spectroscopy

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 15, Issue 5, 1997, Pages 2521-2528

  Esaka, F ^a   Furuya, K ^a   Shimada, H ^b   Imamura, M ^b   Matsubayashi, N ^b   Sato, H ^b   Nishijima, A ^b   Kawana, A ^c   Ichimura, H ^c   Kikuchi, T ^d  

^a TOKYO UNIVERSITY OF SCIENCE   (Japan)

^b NATL INST OF MAT AND CHEM RES   (Japan)

^c SUMITOMO METAL MINING CO LTD   (Japan)

^d TOKYO UNIVERSITY OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0031493594     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580764     Document Type: Review

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