XPS analyses of TiN films on Cu substrates after annealing in the controlled atmosphere

Thin Solid Films

Volumn 355, Issue , 1999, Pages 374-379

  Lu, Fu Hsing ^a   Chen, Hong Ying ^a  

^a NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS FILMS; ANNEALING; COPPER; DEPOSITION; FILM PREPARATION; GAS ADSORPTION; NITROGEN; OXIDATION; PROTECTIVE COATINGS; SUBSTRATES; TITANIUM NITRIDE; X RAY PHOTOELECTRON SPECTROSCOPY;

CATHODIC ARC PLASMA DEPOSITION METHODS;

THIN FILMS;

EID: 0033364586     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)00454-X     Document Type: Article

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