Relationship between the mechanical properties and the microstructure of nanocomposite TiN/SiN1.3 coatings prepared by low temperature plasma enhanced chemical vapor deposition

Thin Solid Films

Volumn 426, Issue 1-2, 2003, Pages 150-159

  Jedrzejowski, P ^a   Klemberg Sapieha, J E ^a   Martinu, L ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

Author keywords

Mechanical properties; Nanocomposites; PECVD

Indexed keywords

ELASTIC MODULI; MICROSTRUCTURE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; TITANIUM NITRIDE; TOUGHNESS; X RAY DIFFRACTION ANALYSIS; X RAY PHOTOELECTRON SPECTROSCOPY;

NANOCOMPOSITE FILMS;

NANOSTRUCTURED MATERIALS;

EID: 0037463210     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00028-2     Document Type: Article

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