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Volumn 163-164, Issue , 2003, Pages 149-156

Superhard nc-TiN/a-BN and nc-TiN/a-TiBx/a-BN coatings prepared by plasma CVD and PVD: A comparative study of their properties

(5) Karvankova, P a Veprek Heijman, M G J a Zindulka, O b Bergmaier, A a Veprek, S a

a TECHNICAL UNIVERSITY OF MUNICH (Germany)

b SHM Ltd (Czech Republic)

Author keywords

Nanocomposite; Plasma CVD; Superhard; TiN BN TiBx; Vacuum arc evaporation

Indexed keywords

NANOSTRUCTURED MATERIALS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SCANNING ELECTRON MICROSCOPY; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELASTIC RECOIL DETECTION;

PROTECTIVE COATINGS;

BORON NITRIDE; COMPOSITE; HARDNESS; INORGANIC COATING; TITANIUM BORIDE; TITANIUM NITRIDE;

EID: 0037472643 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(02)00492-9 Document Type: Article

Times cited : (116)

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