SCOPUS 정보 검색 플랫폼

Volumn 133, Issue 134, 2000, Pages 555-560

Comparison of structure and properties of SiOx coatings deposited by reactive pulsed magnetron sputtering (PMS) and by hollow cathode activated EB evaporation (HAD)

(5) Zywitzki, Olaf a Sahm, Hagen a Krug, Mario a Morgner, Henry a Neumann, Manfred a

a Fraunhofer Institute for Electron Beam and Plasma Technology (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; ELASTIC MODULI; ELECTRON BEAMS; EVAPORATION; FRACTURE TOUGHNESS; HARDNESS; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POROSITY; SILICA; STOICHIOMETRY; WEAR RESISTANCE;

ELECTRON BEAM EVAPORATION;

ANTIREFLECTION COATINGS;

ABRASION; COATING; SILICATE; SPUTTERING; WEAR RESISTANCE;

EID: 0034310550 PISSN: 02578972 EISSN: None Source Type: Journal
DOI: 10.1016/S0257-8972(00)00975-0 Document Type: Article

Times cited : (19)

References (15)

1
- 0030715448
- J.E. Landheer, J.E. Hulse, T. Quance, Thin Solid Films 293 (1997) 52.
- (1997) Thin Solid Films , vol.293 , pp. 52
- Landheer, J.E.¹ Hulse, J.E.² Quance, T.³

2
- 0343803191
- S. Hee Lee, D. Chool Lee, Thin Solid Films 325 (1998) 83.
- (1998) Thin Solid Films , vol.325 , pp. 83
- Hee Lee, S.¹ Chool Lee, D.²

3
- 0033076166
- G. Bräuer, Surf. Coat. Technol. 112 (1999) 358.
- (1999) Surf. Coat. Technol. , vol.112 , pp. 358
- Bräuer, G.¹

4
- 0033170239
- K. Suzuki, Thin Solid Films 351 (1999) 8.
- (1999) Thin Solid Films , vol.351 , pp. 8
- Suzuki, K.¹

5
- 0031369345
- New Orleans, 12-17 April
- R.J. Dykhouse, J.R. Dykhouse, P.J. O'Coor, 40th Annual Technical Conference Proceeding of Society of Vacuum Coaters, New Orleans, 12-17 April 1997, p. 40.
- (1997) 40th Annual Technical Conference Proceeding of Society of Vacuum Coaters , pp. 40
- Dykhouse, R.J.¹ Dykhouse, J.R.² O'Coor, P.J.³

6
- 0033335422
- D. Hegemann, U. Vohrer, C. Oehr, R. Riedel, Surf. Coat. Technol. 116/119 (1999) 1033.
- (1999) Surf. Coat. Technol. , vol.116 , Issue.119 , pp. 1033
- Hegemann, D.¹ Vohrer, U.² Oehr, C.³ Riedel, R.⁴

7
- 0001846096
- A.M. Wrobel, M. Kryszewski, Progr. Colloid. Polym. Sci. 85 (1991) 91.
- (1991) Progr. Colloid. Polym. Sci. , vol.85 , pp. 91
- Wrobel, A.M.¹ Kryszewski, M.²

8
- 0031344807
- M.T. Kim, Thin Solid Films 311 (1997) 157.
- (1997) Thin Solid Films , vol.311 , pp. 157
- Kim, M.T.¹

9
- 0031776868
- J. Schwarz, M. Schmidt, A. Ohl, Surf. Coat. Technol. 98 (1998) 859.
- (1998) Surf. Coat. Technol. , vol.98 , pp. 859
- Schwarz, J.¹ Schmidt, M.² Ohl, A.³

10
- 0032756028
- K.-H. Haas, S. Amberg-Schwab, K. Rose, G. Schottner, Surf. Coat. Technol. 111 (1999) 72.
- (1999) Surf. Coat. Technol. , vol.111 , pp. 72
- Haas, K.-H.¹ Amberg-Schwab, S.² Rose, K.³ Schottner, G.⁴

11
- 0032184541
- H. Morgner, M. Neumann, S. Straach, M. Krug, Surf. Coat. Technol. 108/109 (1998) 513.
- (1998) Surf. Coat. Technol. , vol.108 , Issue.109 , pp. 513
- Morgner, H.¹ Neumann, M.² Straach, S.³ Krug, M.⁴

12
- 0033512263
- H. Bartzsch, P. Frach, K. Goedicke, C. Gottfried, Surf. Coat. Technol. 120/121 (1999) 723.
- (1999) Surf. Coat. Technol. , vol.120 , Issue.121 , pp. 723
- Bartzsch, H.¹ Frach, P.² Goedicke, K.³ Gottfried, C.⁴

13
- 0026875935
- W.C. Oliver, G.M. Pharr, J. Mater. Res. 7 (1992) 1564.
- (1992) J. Mater. Res. , vol.7 , pp. 1564
- Oliver, W.C.¹ Pharr, G.M.²

14
- 0003491454
- Carl Hanser Verlag, München Wien
- K.H. Habig, Verschleiß und Härte von Werkstoffen, Carl Hanser Verlag, München Wien, 1980, p. 180.
- (1980) Verschleiß und Härte Von Werkstoffen , pp. 180
- Habig, K.H.¹

15
- 0343367564
- DGM Informationsgesellschaft Verlag, Oberursel
- K.H. Zum Gahr, Reibung und Verschleiß bei metallischen und nichtmetallischen Werkstoffen, DGM Informationsgesellschaft Verlag, Oberursel, 1986, p. 39.
- (1986) Reibung und Verschleiß Bei Metallischen und Nichtmetallischen Werkstoffen , pp. 39
- Zum Gahr, K.H.¹

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.