Adhesion and interfacial structure of magnetron sputtered TiNi films on Si/SiO2 substrate

Thin Solid Films

Volumn 444, Issue 1-2, 2003, Pages 85-90

  Fu, Yongqing ^a,b   Du, Hejun ^a,b   Zhang, Sam ^a  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE MIT ALLIANCE   (Singapore)

Author keywords

Adhesion; Shape memory; Sputtering; TiNi; X Ray photoelectron spectroscopy

Indexed keywords

ADHESION; MAGNETRON SPUTTERING; SILICON; TITANIUM NITRIDE;

INTERFACIAL STRUCTURE;

MULTILAYERS;

EID: 0142086872     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)01029-0     Document Type: Article

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