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Volumn 5, Issue 92, 2015, Pages 75500-75518

Growth and synthesis of mono and few-layers transition metal dichalcogenides by vapour techniques: A review

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; CMOS INTEGRATED CIRCUITS; DEPOSITION; METALLORGANIC CHEMICAL VAPOR DEPOSITION; METALS; ORGANIC CHEMICALS; ORGANOMETALLICS; SEMICONDUCTING SELENIUM; SEMICONDUCTING SELENIUM COMPOUNDS; VAPOR DEPOSITION;

EID: 84941312771     PISSN: None     EISSN: 20462069     Source Type: Journal    
DOI: 10.1039/c5ra09356b     Document Type: Article
Times cited : (119)

References (132)
  • 1
    • 84941297101 scopus 로고    scopus 로고
    • International Technology Roadmap for Semiconductors
    • International Technology Roadmap for Semiconductors, http://www.itrs.net/
  • 2
    • 5444275992 scopus 로고    scopus 로고
    • Si/SiGe heterostructures: From material and physics to devices and circuits
    • D. J. Paul Si/SiGe heterostructures: from material and physics to devices and circuits Semicond. Sci. Technol. 2004 19 10 R75 R108
    • (2004) Semicond. Sci. Technol. , vol.19 , Issue.10 , pp. R75-R108
    • Paul, D.J.1
  • 4
    • 0037418379 scopus 로고    scopus 로고
    • One-Dimensional Nanostructures: Synthesis, Characterization, and Applications
    • Y. Xia P. Yang Y. Sun Y. Wu B. Mayers B. Gates Y. Yin F. Kim H. Yan One-Dimensional Nanostructures: Synthesis, Characterization, and Applications Adv. Mater. 2003 15 5 353 389
    • (2003) Adv. Mater. , vol.15 , Issue.5 , pp. 353-389
    • Xia, Y.1    Yang, P.2    Sun, Y.3    Wu, Y.4    Mayers, B.5    Gates, B.6    Yin, Y.7    Kim, F.8    Yan, H.9
  • 5
    • 67649225738 scopus 로고    scopus 로고
    • Graphene: Status and prospects
    • A. K. Geim Graphene: status and prospects Science 2009 324 5934 1530 1534
    • (2009) Science , vol.324 , Issue.5934 , pp. 1530-1534
    • Geim, A.K.1
  • 7
    • 84863229334 scopus 로고    scopus 로고
    • Biological and chemical sensors based on graphene materials
    • Y. Liu X. Dong P. Chen Biological and chemical sensors based on graphene materials. Chem. Soc. Rev. 2012 41 6 2283 2307
    • (2012) Chem. Soc. Rev. , vol.41 , Issue.6 , pp. 2283-2307
    • Liu, Y.1    Dong, X.2    Chen, P.3
  • 8
    • 84923815016 scopus 로고    scopus 로고
    • Graphene, related two-dimensional crystals, and hybrid systems for energy conversion and storage
    • F. Bonaccorso L. Colombo G. Yu M. Stoller V. Tozzini A. C. Ferrari R. S. Ruoff V. Pellegrini Graphene, related two-dimensional crystals, and hybrid systems for energy conversion and storage Science 2015 347 6217 1246501 1246501
    • (2015) Science , vol.347 , Issue.6217 , pp. 1246501-1246501
    • Bonaccorso, F.1    Colombo, L.2    Yu, G.3    Stoller, M.4    Tozzini, V.5    Ferrari, A.C.6    Ruoff, R.S.7    Pellegrini, V.8
  • 11
    • 84863912783 scopus 로고    scopus 로고
    • Low-dimensional boron nitride nanomaterials
    • A. Pakdel C. Zhi Y. Bando D. Golberg Low-dimensional boron nitride nanomaterials Mater. Today 2012 15 6 256 265
    • (2012) Mater. Today , vol.15 , Issue.6 , pp. 256-265
    • Pakdel, A.1    Zhi, C.2    Bando, Y.3    Golberg, D.4
  • 12
    • 84941297103 scopus 로고    scopus 로고
    • Intercalated Layered Materials, F. A. Lévy, 9789027709677, Online, Available, Accessed: 03-Jul-2015
    • Intercalated Layered Materials, F. A. Lévy, 9789027709677, Online, Available, http://www.bookdepository.com/Intercalated-Layered-Materials/9789027709677, Accessed: 03-Jul-2015
  • 14
    • 0343167221 scopus 로고
    • Preparation and optical properties of group IV-VI2 chalcogenides having the CdI2 structure
    • D. L. Greenaway R. Nitsche Preparation and optical properties of group IV-VI2 chalcogenides having the CdI2 structure J. Phys. Chem. Solids 1965 26 9 1445 1458
    • (1965) J. Phys. Chem. Solids , vol.26 , Issue.9 , pp. 1445-1458
    • Greenaway, D.L.1    Nitsche, R.2
  • 15
    • 0011198690 scopus 로고
    • Crystal growth of quaternary 122464 chalcogenides by iodine vapor transport
    • R. Nitsche D. F. Sargent P. Wild Crystal growth of quaternary 122464 chalcogenides by iodine vapor transport J. Cryst. Growth 1967 1 1 52 53
    • (1967) J. Cryst. Growth , vol.1 , Issue.1 , pp. 52-53
    • Nitsche, R.1    Sargent, D.F.2    Wild, P.3
  • 16
    • 36849096704 scopus 로고
    • Single Crystals of MoS2 Several Molecular Layers Thick
    • R. F. Frindt Single Crystals of MoS2 Several Molecular Layers Thick J. Appl. Phys. 1966 37 1928
    • (1966) J. Appl. Phys. , vol.37 , pp. 1928
    • Frindt, R.F.1
  • 19
    • 84875413255 scopus 로고    scopus 로고
    • The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets
    • M. Chhowalla H. S. Shin G. Eda L.-J. Li K. P. Loh H. Zhang The chemistry of two-dimensional layered transition metal dichalcogenide nanosheets Nat. Chem. 2013 5 4 263 275
    • (2013) Nat. Chem. , vol.5 , Issue.4 , pp. 263-275
    • Chhowalla, M.1    Shin, H.S.2    Eda, G.3    Li, L.-J.4    Loh, K.P.5    Zhang, H.6
  • 21
    • 85027925515 scopus 로고    scopus 로고
    • MoS2 and semiconductors in the flatland
    • O. V. Yazyev A. Kis MoS2 and semiconductors in the flatland Mater. Today 2014 18 1
    • (2014) Mater. Today , vol.18 , Issue.1
    • Yazyev, O.V.1    Kis, A.2
  • 22
    • 84860752361 scopus 로고    scopus 로고
    • Coupled Spin and Valley Physics in Monolayers of MoS-{2} and Other Group-VI Dichalcogenides
    • D. Xiao G.-B. Liu W. Feng X. Xu W. Yao Coupled Spin and Valley Physics in Monolayers of MoS-{2} and Other Group-VI Dichalcogenides Phys. Rev. Lett. 2012 108 19 196802
    • (2012) Phys. Rev. Lett. , vol.108 , Issue.19 , pp. 196802
    • Xiao, D.1    Liu, G.-B.2    Feng, W.3    Xu, X.4    Yao, W.5
  • 23
    • 84864881664 scopus 로고    scopus 로고
    • Valley polarization in MoS2 monolayers by optical pumping
    • H. Zeng J. Dai W. Yao D. Xiao X. Cui Valley polarization in MoS2 monolayers by optical pumping. Nat. Nanotechnol. 2012 7 8 490 493
    • (2012) Nat. Nanotechnol. , vol.7 , Issue.8 , pp. 490-493
    • Zeng, H.1    Dai, J.2    Yao, W.3    Xiao, D.4    Cui, X.5
  • 24
    • 84894635747 scopus 로고    scopus 로고
    • Emerging Device Applications for Semiconducting Two-Dimensional Transition Metal Dichalcogenides
    • D. Jariwala V. K. Sangwan L. J. Lauhon T. J. Marks M. C. Hersam Emerging Device Applications for Semiconducting Two-Dimensional Transition Metal Dichalcogenides ACS Nano 2014 8 2 1102 1120
    • (2014) ACS Nano , vol.8 , Issue.2 , pp. 1102-1120
    • Jariwala, D.1    Sangwan, V.K.2    Lauhon, L.J.3    Marks, T.J.4    Hersam, M.C.5
  • 30
    • 84907013700 scopus 로고    scopus 로고
    • Layered transition-metal dichalcogenides (MoS2 and WS2) for sensing and biosensing
    • M. Pumera A. H. Loo Layered transition-metal dichalcogenides (MoS2 and WS2) for sensing and biosensing TrAC, Trends Anal. Chem. 2014 61 49 53
    • (2014) TrAC, Trends Anal. Chem. , vol.61 , pp. 49-53
    • Pumera, M.1    Loo, A.H.2
  • 31
    • 84924911204 scopus 로고    scopus 로고
    • A high-performance complementary inverter based on transition metal dichalcogenide field-effect transistors
    • A.-J. Cho K. C. Park J.-Y. Kwon A high-performance complementary inverter based on transition metal dichalcogenide field-effect transistors Nanoscale Res. Lett. 2015 10 115
    • (2015) Nanoscale Res. Lett. , vol.10 , pp. 115
    • Cho, A.-J.1    Park, K.C.2    Kwon, J.-Y.3
  • 33
    • 84867093360 scopus 로고    scopus 로고
    • Fabrication of flexible MoS2 thin-film transistor arrays for practical gas-sensing applications
    • Q. He Z. Zeng Z. Yin H. Li S. Wu X. Huang H. Zhang Fabrication of flexible MoS2 thin-film transistor arrays for practical gas-sensing applications. Small 2012 8 19 2994 2999
    • (2012) Small , vol.8 , Issue.19 , pp. 2994-2999
    • He, Q.1    Zeng, Z.2    Yin, Z.3    Li, H.4    Wu, S.5    Huang, X.6    Zhang, H.7
  • 34
    • 84871087159 scopus 로고    scopus 로고
    • Effects of confinement and environment on the electronic structure and exciton binding energy of MoS2 from first principles
    • H.-P. Komsa A. V. Krasheninnikov Effects of confinement and environment on the electronic structure and exciton binding energy of MoS2 from first principles Phys. Rev. B: Condens. Matter Mater. Phys. 2012 86 24 241201
    • (2012) Phys. Rev. B: Condens. Matter Mater. Phys. , vol.86 , Issue.24 , pp. 241201
    • Komsa, H.-P.1    Krasheninnikov, A.V.2
  • 37
    • 84899054976 scopus 로고    scopus 로고
    • Synthesis, Properties, and Applications of 2-D Materials: A Comprehensive Review
    • S. Das M. Kim J. Lee W. Choi Synthesis, Properties, and Applications of 2-D Materials: A Comprehensive Review Crit. Rev. Solid State Mater. Sci. 2014 39 231 252
    • (2014) Crit. Rev. Solid State Mater. Sci. , vol.39 , pp. 231-252
    • Das, S.1    Kim, M.2    Lee, J.3    Choi, W.4
  • 38
    • 84869074729 scopus 로고    scopus 로고
    • Electronics and optoelectronics of two-dimensional transition metal dichalcogenides
    • Q. H. Wang K. Kalantar-Zadeh A. Kis J. N. Coleman M. S. Strano Electronics and optoelectronics of two-dimensional transition metal dichalcogenides. Nat. Nanotechnol. 2012 7 11 699 712
    • (2012) Nat. Nanotechnol. , vol.7 , Issue.11 , pp. 699-712
    • Wang, Q.H.1    Kalantar-Zadeh, K.2    Kis, A.3    Coleman, J.N.4    Strano, M.S.5
  • 40
    • 84930633543 scopus 로고    scopus 로고
    • Recent advances in controlled synthesis of two-dimensional transition metal dichalcogenides via vapour deposition techniques
    • Y. Shi H. Li L.-J. Li Recent advances in controlled synthesis of two-dimensional transition metal dichalcogenides via vapour deposition techniques Chem. Soc. Rev. 2014
    • (2014) Chem. Soc. Rev.
    • Shi, Y.1    Li, H.2    Li, L.-J.3
  • 41
    • 84941297105 scopus 로고    scopus 로고
    • Chemical vapour deposition of group-VIB metal dichalcogenide monolayers: Engineered substrates from amorphous to single crystalline.
    • Q. Ji Y. Zhang Y. Zhang Z. Liu Chemical vapour deposition of group-VIB metal dichalcogenide monolayers: engineered substrates from amorphous to single crystalline. Chem. Soc. Rev. 2014
    • (2014) Chem. Soc. Rev.
    • Ji, Q.1    Zhang, Y.2    Zhang, Y.3    Liu, Z.4
  • 42
    • 84941297106 scopus 로고    scopus 로고
    • Transition Metal Dichalcogenides and Beyond: Synthesis, Properties, and Applications of Single- and Few-Layer Nanosheets
    • R. Lv J. a. Robinson R. E. Schaak D. Sun Y. Sun T. E. Mallouk M. Terrones Transition Metal Dichalcogenides and Beyond: Synthesis, Properties, and Applications of Single- and Few-Layer Nanosheets Acc. Chem. Res. 2014
    • (2014) Acc. Chem. Res.
    • Lv, R.1    Robinson, J.A.2    Schaak, R.E.3    Sun, D.4    Sun, Y.5    Mallouk, T.E.6    Terrones, M.7
  • 43
    • 84941285391 scopus 로고    scopus 로고
    • Two-dimensional MoS2: Properties, preparation, and applications
    • X. Li H. Zhu Two-dimensional MoS2: Properties, preparation, and applications Journal of Materiomics 2015 1 1 33 44
    • (2015) Journal of Materiomics , vol.1 , Issue.1 , pp. 33-44
    • Li, X.1    Zhu, H.2
  • 52
    • 81255169387 scopus 로고    scopus 로고
    • Single-layer semiconducting nanosheets: High-yield preparation and device fabrication
    • Z. Zeng Z. Yin X. Huang H. Li Q. He G. Lu F. Boey H. Zhang Single-layer semiconducting nanosheets: high-yield preparation and device fabrication Angew. Chem., Int. Ed. 2011 50 47 11093 11097
    • (2011) Angew. Chem., Int. Ed. , vol.50 , Issue.47 , pp. 11093-11097
    • Zeng, Z.1    Yin, Z.2    Huang, X.3    Li, H.4    He, Q.5    Lu, G.6    Boey, F.7    Zhang, H.8
  • 53
    • 84863855836 scopus 로고    scopus 로고
    • High-performance single layered WSea2 p-FETs with chemically doped contacts
    • H. Fang S. Chuang T. C. Chang K. Takei T. Takahashi A. Javey High-performance single layered WSea2 p-FETs with chemically doped contacts Nano Lett. 2012 12 7 3788 3792
    • (2012) Nano Lett. , vol.12 , Issue.7 , pp. 3788-3792
    • Fang, H.1    Chuang, S.2    Chang, T.C.3    Takei, K.4    Takahashi, T.5    Javey, A.6
  • 57
    • 84884895905 scopus 로고    scopus 로고
    • Ultrathin nanosheets of vanadium diselenide: A metallic two-dimensional material with ferromagnetic charge-density-wave behavior
    • K. Xu P. Chen X. Li C. Wu Y. Guo J. Zhao X. Wu Y. Xie Ultrathin nanosheets of vanadium diselenide: a metallic two-dimensional material with ferromagnetic charge-density-wave behavior. Angew. Chem., Int. Ed. 2013 52 40 10477 10481
    • (2013) Angew. Chem., Int. Ed. , vol.52 , Issue.40 , pp. 10477-10481
    • Xu, K.1    Chen, P.2    Li, X.3    Wu, C.4    Guo, Y.5    Zhao, J.6    Wu, X.7    Xie, Y.8
  • 58
    • 0036165131 scopus 로고    scopus 로고
    • Intercalation chemistry of molybdenum disulfide
    • E. Benavente Intercalation chemistry of molybdenum disulfide Coord. Chem. Rev. 2002 224 1-2 87 109
    • (2002) Coord. Chem. Rev. , vol.224 , Issue.1-2 , pp. 87-109
    • Benavente, E.1
  • 59
    • 33744786189 scopus 로고    scopus 로고
    • Single-layer dispersions of transition metal dichalcogenides in the synthesis of intercalation compounds
    • A. S. Golub' Y. V. Zubavichus Y. L. Slovokhotov Y. N. Novikov Single-layer dispersions of transition metal dichalcogenides in the synthesis of intercalation compounds Russ. Chem. Rev. 2003 72 2 123 141
    • (2003) Russ. Chem. Rev. , vol.72 , Issue.2 , pp. 123-141
    • Golub, A.S.1    Zubavichus, Y.V.2    Slovokhotov, Y.L.3    Novikov, Y.N.4
  • 61
    • 31944442603 scopus 로고
    • Atomic layer epitaxy
    • T. Suntola Atomic layer epitaxy Mater. Sci. Rep. 1989 4 5 261 312
    • (1989) Mater. Sci. Rep. , vol.4 , Issue.5 , pp. 261-312
    • Suntola, T.1
  • 62
    • 84908868640 scopus 로고    scopus 로고
    • Novel chemical route for atomic layer deposition of MoS thin film on SiO/Si substrate
    • Z. Jin S. Shin D. H. Kwon S.-J. Han Y.-S. Min Novel chemical route for atomic layer deposition of MoS thin film on SiO/Si substrate Nanoscale 2014 6 23 14453 14458
    • (2014) Nanoscale , vol.6 , Issue.23 , pp. 14453-14458
    • Jin, Z.1    Shin, S.2    Kwon, D.H.3    Han, S.-J.4    Min, Y.-S.5
  • 63
    • 6244276933 scopus 로고
    • Elemental sulfur
    • B. Meyer Elemental sulfur Chem. Rev. 1976 76 3 367 387
    • (1976) Chem. Rev. , vol.76 , Issue.3 , pp. 367-387
    • Meyer, B.1
  • 64
    • 77952340531 scopus 로고    scopus 로고
    • Design of an atomic layer deposition reactor for hydrogen sulfide compatibility
    • N. P. Dasgupta J. F. Mack M. C. Langston A. Bousetta F. B. Prinz Design of an atomic layer deposition reactor for hydrogen sulfide compatibility. Rev. Sci. Instrum. 2010 81 4 044102
    • (2010) Rev. Sci. Instrum. , vol.81 , Issue.4 , pp. 044102
    • Dasgupta, N.P.1    Mack, J.F.2    Langston, M.C.3    Bousetta, A.4    Prinz, F.B.5
  • 65
    • 84943568447 scopus 로고    scopus 로고
    • Chemical Vapor Deposition of Two-Dimensional Crystals
    • in, Ed. T. Kuech, Elsevier B.V., 2nd edn
    • E. D. C. Z. R. Robinson, S. W. Schmucker, K. M. McCreary, Chemical Vapor Deposition of Two-Dimensional Crystals, in Handbook of Crystal Growth, Ed., T. Kuech, Elsevier B.V., 2015, 2nd edn, pp. 785-833
    • (2015) Handbook of Crystal Growth , pp. 785-833
    • Robinson, E.D.C.Z.R.1    Schmucker, S.W.2    McCreary, K.M.3
  • 67
    • 84891359914 scopus 로고    scopus 로고
    • Layer-controlled, wafer-scale, and conformal synthesis of tungsten disulfide nanosheets using atomic layer deposition
    • 10.1021/nn405194e
    • J. Song J. Park W. Lee T. Choi H. Jung C. W. Lee S. Hwang J. M. Myoung J. Jung S. Kim C. Lansalot Matras H. Kim Layer-controlled, wafer-scale, and conformal synthesis of tungsten disulfide nanosheets using atomic layer deposition ACS Nano 2013 7 12 11333 11340 10.1021/nn405194e
    • (2013) ACS Nano , vol.7 , Issue.12 , pp. 11333-11340
    • Song, J.1    Park, J.2    Lee, W.3    Choi, T.4    Jung, H.5    Lee, C.W.6    Hwang, S.7    Myoung, J.M.8    Jung, J.9    Kim, S.10    Lansalot Matras, C.11    Kim, H.12
  • 68
    • 0037906105 scopus 로고    scopus 로고
    • Atmospheric pressure chemical vapour deposition of WS2 thin films on glass
    • C. J. Carmalt I. P. Parkin E. S. Peters Atmospheric pressure chemical vapour deposition of WS2 thin films on glass Polyhedron 2003 22 11 1499 1505
    • (2003) Polyhedron , vol.22 , Issue.11 , pp. 1499-1505
    • Carmalt, C.J.1    Parkin, I.P.2    Peters, E.S.3
  • 69
    • 0001261363 scopus 로고
    • The Vapor Pressures of Tellurium and Selenium
    • L. S. Brooks The Vapor Pressures of Tellurium and Selenium J. Am. Chem. Soc. 1952 74 1 227 229
    • (1952) J. Am. Chem. Soc. , vol.74 , Issue.1 , pp. 227-229
    • Brooks, L.S.1
  • 71
    • 85027945699 scopus 로고    scopus 로고
    • Preparation of highly (001)-oriented photoactive tungsten diselenide (WSe 2) films by an amorphous solid-liquid-crystalline solid (aSLcS) rapid-crystallization process
    • F. Bozheyev D. Friedrich M. Nie M. Rengachari K. Ellmer Preparation of highly (001)-oriented photoactive tungsten diselenide (WSe 2) films by an amorphous solid-liquid-crystalline solid (aSLcS) rapid-crystallization process Phys. Status Solidi 2014 211 9 2013 2019
    • (2014) Phys. Status Solidi , vol.211 , Issue.9 , pp. 2013-2019
    • Bozheyev, F.1    Friedrich, D.2    Nie, M.3    Rengachari, M.4    Ellmer, K.5
  • 73
    • 0028468004 scopus 로고
    • Physicochemical properties of dimethyl selenide and dimethyl diselenide
    • U. Karlson W. T. Frankenberger W. F. Spencer Physicochemical properties of dimethyl selenide and dimethyl diselenide J. Chem. Eng. Data 1994 39 3 608 610
    • (1994) J. Chem. Eng. Data , vol.39 , Issue.3 , pp. 608-610
    • Karlson, U.1    Frankenberger, W.T.2    Spencer, W.F.3
  • 74
    • 33644653404 scopus 로고    scopus 로고
    • Atmospheric pressure chemical vapor deposition of WSe 2 thin films on glass - Highly hydrophobic sticky surfaces
    • N. D. Boscher C. J. Carmalt I. P. Parkin Atmospheric pressure chemical vapor deposition of WSe 2 thin films on glass - highly hydrophobic sticky surfaces J. Mater. Chem. 2006 16 1 122 127
    • (2006) J. Mater. Chem. , vol.16 , Issue.1 , pp. 122-127
    • Boscher, N.D.1    Carmalt, C.J.2    Parkin, I.P.3
  • 75
    • 84941276975 scopus 로고    scopus 로고
    • Vapour Pressures of Diethyl Selenide, Tetramethyl Tin and Tetramethyl Lead
    • Y. N. Yoshio Tanaka Vapour Pressures of Diethyl Selenide, Tetramethyl Tin and Tetramethyl Lead Proc. Imp. Acad. 2008 78
    • (2008) Proc. Imp. Acad. , pp. 78
    • Yoshio Tanaka, Y.N.1
  • 76
    • 34247108621 scopus 로고    scopus 로고
    • Atmospheric pressure chemical vapour deposition of vanadium diselenide thin films
    • N. D. Boscher C. S. Blackman C. J. Carmalt I. P. Parkin A. G. Prieto Atmospheric pressure chemical vapour deposition of vanadium diselenide thin films Appl. Surf. Sci. 2007 253 14 6041 6046
    • (2007) Appl. Surf. Sci. , vol.253 , Issue.14 , pp. 6041-6046
    • Boscher, N.D.1    Blackman, C.S.2    Carmalt, C.J.3    Parkin, I.P.4    Prieto, A.G.5
  • 77
    • 84962312544 scopus 로고    scopus 로고
    • Yellow Molybdenum(VI) Oxide Dihydrate
    • in, John Wiley & Sons, Inc
    • J. B. B. Heyns, J. J. Cruywagen and K. A. Scott, Yellow Molybdenum(VI) Oxide Dihydrate, in Inorganic Syntheses, vol. 24, John Wiley & Sons, Inc, 2007
    • (2007) Inorganic Syntheses , vol.24
    • Heyns, J.B.B.1    Cruywagen, J.J.2    Scott, K.A.3
  • 78
    • 6244265892 scopus 로고
    • Vapor Pressure of Pure Substances. Organic and Inorganic Compounds
    • D. R. Stull Vapor Pressure of Pure Substances. Organic and Inorganic Compounds Ind. Eng. Chem. 1947 39 4 517 540
    • (1947) Ind. Eng. Chem. , vol.39 , Issue.4 , pp. 517-540
    • Stull, D.R.1
  • 80
    • 78650443592 scopus 로고    scopus 로고
    • Growth of thin films of molybdenum oxide by atomic layer deposition
    • M. Diskus O. Nilsen H. Fjellvåg Growth of thin films of molybdenum oxide by atomic layer deposition J. Mater. Chem. 2011 21 3 705
    • (2011) J. Mater. Chem. , vol.21 , Issue.3 , pp. 705
    • Diskus, M.1    Nilsen, O.2    Fjellvåg, H.3
  • 81
    • 0033703164 scopus 로고    scopus 로고
    • Chemical vapour deposition of molybdenum carbides: Aspects of phase stability
    • J. Lu H. Hugosson O. Eriksson L. Nordström U. Jansson Chemical vapour deposition of molybdenum carbides: aspects of phase stability Thin Solid Films 2000 370 1-2 203 212
    • (2000) Thin Solid Films , vol.370 , Issue.1-2 , pp. 203-212
    • Lu, J.1    Hugosson, H.2    Eriksson, O.3    Nordström, L.4    Jansson, U.5
  • 85
    • 79953724066 scopus 로고    scopus 로고
    • Molybdenum Atomic Layer Deposition Using MoF6 and Si2H6 as the Reactants
    • D. Seghete G. B. Rayner A. S. Cavanagh V. R. Anderson S. M. George Molybdenum Atomic Layer Deposition Using MoF6 and Si2H6 as the Reactants Chem. Mater. 2011 23 7 1668 1678
    • (2011) Chem. Mater. , vol.23 , Issue.7 , pp. 1668-1678
    • Seghete, D.1    Rayner, G.B.2    Cavanagh, A.S.3    Anderson, V.R.4    George, S.M.5
  • 86
    • 0029192346 scopus 로고    scopus 로고
    • Crystal orientation and near-interface structure of chemically vapor deposited MoS2 films
    • W. Y. Lee K. L. More Crystal orientation and near-interface structure of chemically vapor deposited MoS2 films J. Mater. Res. 2011 10 01 49 53
    • (2011) J. Mater. Res. , vol.10 , Issue.1 , pp. 49-53
    • Lee, W.Y.1    More, K.L.2
  • 87
    • 0030127396 scopus 로고    scopus 로고
    • Synthesis and Friction Behavior of Chemically Vapor Deposited Composite Coatings Containing Discrete TiN and MoS2 Phases
    • Y. W. Bae W. Y. Lee C. S. Yust P. J. Blau T. M. Besmann Synthesis and Friction Behavior of Chemically Vapor Deposited Composite Coatings Containing Discrete TiN and MoS2 Phases J. Am. Ceram. Soc. 1996 79 4 819 824
    • (1996) J. Am. Ceram. Soc. , vol.79 , Issue.4 , pp. 819-824
    • Bae, Y.W.1    Lee, W.Y.2    Yust, C.S.3    Blau, P.J.4    Besmann, T.M.5
  • 88
    • 54949096575 scopus 로고    scopus 로고
    • Bis(tert-butylimido)-bis(dialkylamido) Complexes of Molybdenum as Atomic Layer Deposition (ALD) Precursors for Molybdenum Nitride: The Effect of the Alkyl Group
    • V. Miikkulainen M. Suvanto T. A. Pakkanen Bis(tert-butylimido)-bis(dialkylamido) Complexes of Molybdenum as Atomic Layer Deposition (ALD) Precursors for Molybdenum Nitride: the Effect of the Alkyl Group Chem. Vap. Deposition 2008 14 3-4 71 77
    • (2008) Chem. Vap. Deposition , vol.14 , Issue.3-4 , pp. 71-77
    • Miikkulainen, V.1    Suvanto, M.2    Pakkanen, T.A.3
  • 89
    • 0009713281 scopus 로고
    • Transition Metal Thiometalates: Properties and Significance in Complex and Bioinorganic Chemistry
    • A. Müller E. Diemann R. Jostes H. Bögge Transition Metal Thiometalates: Properties and Significance in Complex and Bioinorganic Chemistry Angew. Chem, Int. Ed. 1981 20 11 934 955
    • (1981) Angew. Chem, Int. Ed. , vol.20 , Issue.11 , pp. 934-955
    • Müller, A.1    Diemann, E.2    Jostes, R.3    Bögge, H.4
  • 92
    • 84904011694 scopus 로고    scopus 로고
    • Lowerature Synthesis of n -Type WS 2 Thin Films via H 2 S Plasma Sulfurization of WO 3
    • R. Morrish T. Haak C. A. Wolden Lowerature Synthesis of n -Type WS 2 Thin Films via H 2 S Plasma Sulfurization of WO 3 Chem. Mater. 2014 26 13 3986 3992
    • (2014) Chem. Mater. , vol.26 , Issue.13 , pp. 3986-3992
    • Morrish, R.1    Haak, T.2    Wolden, C.A.3
  • 93
    • 33748972674 scopus 로고    scopus 로고
    • Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS
    • T. W. Scharf S. V. Prasad M. T. Dugger P. G. Kotula R. S. Goeke R. K. Grubbs Growth, structure, and tribological behavior of atomic layer-deposited tungsten disulphide solid lubricant coatings with applications to MEMS Acta Mater. 2006 54 4731 4743
    • (2006) Acta Mater. , vol.54 , pp. 4731-4743
    • Scharf, T.W.1    Prasad, S.V.2    Dugger, M.T.3    Kotula, P.G.4    Goeke, R.S.5    Grubbs, R.K.6
  • 95
    • 33746510196 scopus 로고    scopus 로고
    • Imaging of atomic layer deposited (ALD) tungsten monolayers on alpha-TiO2(110) by X-ray standing wave Fourier inversion
    • C.-Y. Kim J. W. Elam M. J. Pellin D. K. Goswami S. T. Christensen M. C. Hersam P. C. Stair M. J. Bedzyk Imaging of atomic layer deposited (ALD) tungsten monolayers on alpha-TiO2(110) by X-ray standing wave Fourier inversion. J. Phys. Chem. B 2006 110 25 12616 12620
    • (2006) J. Phys. Chem. B , vol.110 , Issue.25 , pp. 12616-12620
    • Kim, C.-Y.1    Elam, J.W.2    Pellin, M.J.3    Goswami, D.K.4    Christensen, S.T.5    Hersam, M.C.6    Stair, P.C.7    Bedzyk, M.J.8
  • 96
    • 84865966192 scopus 로고    scopus 로고
    • Atomic Layer Deposition of WO3 Thin Films using W(CO)6 and O3 Precursors
    • J. Malm T. Sajavaara M. Karppinen Atomic Layer Deposition of WO3 Thin Films using W(CO)6 and O3 Precursors Chem. Vap. Deposition 2012 18 7-9 245 248
    • (2012) Chem. Vap. Deposition , vol.18 , Issue.7-9 , pp. 245-248
    • Malm, J.1    Sajavaara, T.2    Karppinen, M.3
  • 97
    • 84941297109 scopus 로고    scopus 로고
    • http://luxel.com/wp-content/uploads/2013/04/Luxel-Vapor-Pressure-Chart.pdf."
  • 98
    • 84931065980 scopus 로고    scopus 로고
    • Layer-modulated synthesis of uniform tungsten disulfide nanosheet using gas-phase precursors
    • J. Park W. Lee T. Choi S.-H. Hwang J. M. Myoung J.-H. Jung S.-H. Kim H. Kim Layer-modulated synthesis of uniform tungsten disulfide nanosheet using gas-phase precursors Nanoscale 2015 7 1308 1313
    • (2015) Nanoscale , vol.7 , pp. 1308-1313
    • Park, J.1    Lee, W.2    Choi, T.3    Hwang, S.-H.4    Myoung, J.M.5    Jung, J.-H.6    Kim, S.-H.7    Kim, H.8
  • 99
    • 34547699710 scopus 로고    scopus 로고
    • Novel cyclopentadienyl based precursors for CVD of W containing films
    • A. C. Anacleto N. Blasco A. Pinchart Y. Marot C. Lachaud Novel cyclopentadienyl based precursors for CVD of W containing films Surf. Coat. Technol. 2007 201 22-23 9120 9124
    • (2007) Surf. Coat. Technol. , vol.201 , Issue.22-23 , pp. 9120-9124
    • Anacleto, A.C.1    Blasco, N.2    Pinchart, A.3    Marot, Y.4    Lachaud, C.5
  • 102
    • 84890173911 scopus 로고    scopus 로고
    • Vapor-phase growth and characterization of Mo(1-x)W(x)S2 (0 ≤ x ≤ 1) atomic layers on 2-inch sapphire substrates
    • H. Liu K. K. A. Antwi S. Chua D. Chi Vapor-phase growth and characterization of Mo(1-x)W(x)S2 (0 ≤ x ≤ 1) atomic layers on 2-inch sapphire substrates Nanoscale 2014 6 1 624 629
    • (2014) Nanoscale , vol.6 , Issue.1 , pp. 624-629
    • Liu, H.1    Antwi, K.K.A.2    Chua, S.3    Chi, D.4
  • 108
  • 110
    • 84878702372 scopus 로고    scopus 로고
    • Controlled scalable synthesis of uniform, high-quality monolayer and few-layer MoS2 films
    • Y. Yu C. Li Y. Liu L. Su Y. Zhang L. Cao Controlled scalable synthesis of uniform, high-quality monolayer and few-layer MoS2 films. Sci. Rep. 2013 3 1866
    • (2013) Sci. Rep. , vol.3 , pp. 1866
    • Yu, Y.1    Li, C.2    Liu, Y.3    Su, L.4    Zhang, Y.5    Cao, L.6
  • 112
    • 0033083732 scopus 로고    scopus 로고
    • On reaction kinetics for the thermal decomposition of hydrogen sulfide
    • K. Karan A. K. Mehrotra L. A. Behie On reaction kinetics for the thermal decomposition of hydrogen sulfide AIChE J. 1999 45 2 383 389
    • (1999) AIChE J. , vol.45 , Issue.2 , pp. 383-389
    • Karan, K.1    Mehrotra, A.K.2    Behie, L.A.3
  • 114
    • 84862073890 scopus 로고    scopus 로고
    • Monolayer Formation of Molybdenum Carbonyl on Cu(111) Revealed by Scanning Tunneling Microscopy and Density Functional Theory
    • P. Krüger M. Petukhov B. Domenichini A. Berkó S. Bourgeois Monolayer Formation of Molybdenum Carbonyl on Cu(111) Revealed by Scanning Tunneling Microscopy and Density Functional Theory J. Phys. Chem. C 2012 116 19 10617 10622
    • (2012) J. Phys. Chem. C , vol.116 , Issue.19 , pp. 10617-10622
    • Krüger, P.1    Petukhov, M.2    Domenichini, B.3    Berkó, A.4    Bourgeois, S.5
  • 116
    • 22344447130 scopus 로고
    • LEED and AES study of the interaction of H2S and Mo (100)
    • J. M. Wilson LEED and AES study of the interaction of H2S and Mo (100) Surf. Sci. 1975 53 1 330 340
    • (1975) Surf. Sci. , vol.53 , Issue.1 , pp. 330-340
    • Wilson, J.M.1
  • 117
    • 0011704434 scopus 로고
    • A leed-aes study of the structure of sulfur monolayers on the Mo(100) crystal face
    • M. Salmeron G. A. Somorjai R. R. Chianelli A leed-aes study of the structure of sulfur monolayers on the Mo(100) crystal face Surf. Sci. 1983 127 3 526 540
    • (1983) Surf. Sci. , vol.127 , Issue.3 , pp. 526-540
    • Salmeron, M.1    Somorjai, G.A.2    Chianelli, R.R.3
  • 118
    • 84893689561 scopus 로고    scopus 로고
    • Adsorption and dissociation of H2S on Mo(100) surface by first-principles study
    • H. Luo J. Cai X. Tao M. Tan Adsorption and dissociation of H2S on Mo(100) surface by first-principles study Appl. Surf. Sci. 2014 292 328 335
    • (2014) Appl. Surf. Sci. , vol.292 , pp. 328-335
    • Luo, H.1    Cai, J.2    Tao, X.3    Tan, M.4
  • 120
    • 84859577778 scopus 로고    scopus 로고
    • Large-area vapor-phase growth and characterization of MoS(2) atomic layers on a SiO(2) substrate
    • Y. Zhan Z. Liu S. Najmaei P. M. Ajayan J. Lou Large-area vapor-phase growth and characterization of MoS(2) atomic layers on a SiO(2) substrate. Small 2012 8 7 966 971
    • (2012) Small , vol.8 , Issue.7 , pp. 966-971
    • Zhan, Y.1    Liu, Z.2    Najmaei, S.3    Ajayan, P.M.4    Lou, J.5
  • 121
    • 84911444974 scopus 로고    scopus 로고
    • Epitaxial Growth of Large Area Single-Crystalline Few-Layer MoS2 with Room Temperature Mobility of 192 cm2 V-1 s-1
    • 10.1063/1.4893143
    • L. Ma D. N. Nath E. W. Lee C. H. Lee A. Arehart S. Rajan Y. Wu Epitaxial Growth of Large Area Single-Crystalline Few-Layer MoS2 with Room Temperature Mobility of 192 cm2 V-1 s-1 Appl. Phys. Lett. 2014 105 072105 10.1063/1.4893143
    • (2014) Appl. Phys. Lett. , vol.105 , pp. 072105
    • Ma, L.1    Nath, D.N.2    Lee, E.W.3    Lee, C.H.4    Arehart, A.5    Rajan, S.6    Wu, Y.7
  • 122
    • 84874965738 scopus 로고    scopus 로고
    • Synthesis of MoS2 and MoSe2 Films with Vertically Aligned Layers
    • D. Kong H. Wang J. J. Cha M. Pasta K. J. Koski J. Yao Y. Cui Synthesis of MoS2 and MoSe2 Films with Vertically Aligned Layers Nano Lett. 2013 13 3 1341 1347
    • (2013) Nano Lett. , vol.13 , Issue.3 , pp. 1341-1347
    • Kong, D.1    Wang, H.2    Cha, J.J.3    Pasta, M.4    Koski, K.J.5    Yao, J.6    Cui, Y.7
  • 123
    • 84907363537 scopus 로고    scopus 로고
    • Scalable synthesis of layer-controlled WS2 and MoS2 sheets by sulfurization of thin metal films
    • C. M. Orofeo S. Suzuki Y. Sekine H. Hibino Scalable synthesis of layer-controlled WS2 and MoS2 sheets by sulfurization of thin metal films Appl. Phys. Lett. 2014 105 8 083112
    • (2014) Appl. Phys. Lett. , vol.105 , Issue.8 , pp. 083112
    • Orofeo, C.M.1    Suzuki, S.2    Sekine, Y.3    Hibino, H.4
  • 125
    • 0000649147 scopus 로고
    • Thermal and reductive decomposition of ammonium thiomolybdates
    • J. L. Brito M. Ilija P. Hernández Thermal and reductive decomposition of ammonium thiomolybdates Thermochim. Acta 1995 256 2 325 338
    • (1995) Thermochim. Acta , vol.256 , Issue.2 , pp. 325-338
    • Brito, J.L.1    Ilija, M.2    Hernández, P.3
  • 129
    • 84893842016 scopus 로고    scopus 로고
    • Synthesis and Optical Properties of Large-Area Single-Crystalline 2D Semiconductor WS 2 Monolayer from Chemical Vapor Deposition
    • C. Cong J. Shang X. Wu B. Cao N. Peimyoo C. Qiu L. Sun T. Yu Synthesis and Optical Properties of Large-Area Single-Crystalline 2D Semiconductor WS 2 Monolayer from Chemical Vapor Deposition Adv. Opt. Mater. 2014 2 2 131 136
    • (2014) Adv. Opt. Mater. , vol.2 , Issue.2 , pp. 131-136
    • Cong, C.1    Shang, J.2    Wu, X.3    Cao, B.4    Peimyoo, N.5    Qiu, C.6    Sun, L.7    Yu, T.8
  • 130
    • 84907757415 scopus 로고    scopus 로고
    • Growth Mechanism for Single- and Multi-Layer MoS2 Nanocrystals
    • L. P. Hansen E. Johnson M. Brorson S. Helveg Growth Mechanism for Single- and Multi-Layer MoS2 Nanocrystals J. Phys. Chem. C 2014 118 39 22768 22773
    • (2014) J. Phys. Chem. C , vol.118 , Issue.39 , pp. 22768-22773
    • Hansen, L.P.1    Johnson, E.2    Brorson, M.3    Helveg, S.4
  • 131
    • 0001762738 scopus 로고
    • Van der Waals epitaxial growth and characterization of MoSe2 thin films on SnS2
    • F. S. Ohuchi B. a. Parkinson K. Ueno A. Koma Van der Waals epitaxial growth and characterization of MoSe2 thin films on SnS2 J. Appl. Phys. 1990 68 2168 2175
    • (1990) J. Appl. Phys. , vol.68 , pp. 2168-2175
    • Ohuchi, F.S.1    Parkinson, B.A.2    Ueno, K.3    Koma, A.4


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