Atomic layer deposition of metal sulfide materials

Accounts of Chemical Research

Volumn 48, Issue 2, 2015, Pages 341-348

  Dasgupta, Neil P ^a   Meng, Xiangbo ^b   Elam, Jeffrey W ^b   Martinson, Alex B F ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84923100757     PISSN: 00014842     EISSN: 15204898     Source Type: Journal    
DOI: 10.1021/ar500360d     Document Type: Review

References (60)

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