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Review of Scientific Instruments

Volumn 81, Issue 4, 2010, Pages

Design of an atomic layer deposition reactor for hydrogen sulfide compatibility

(5) Dasgupta, Neil P a MacK, James F a Langston, Michael C a Bousetta, Al b Prinz, Fritz B a

a Stanford University (United States)

b Swagelok Company (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS LEAKAGES; LEAD SULFIDE; METAL SULFIDES; POWER OUTAGE; SAFETY INTERLOCK SYSTEMS; SAFETY ISSUES; SHUT DOWN;

ATMOSPHERIC PRESSURE; COLD STORAGE; COMPRESSED AIR; HYDROGEN SULFIDE; LEAD; LEAKAGE (FLUID); SULFUR DETERMINATION; TOXIC MATERIALS; ZINC;

ZINC SULFIDE;

EID: 77952340531 PISSN: 00346748 EISSN: None Source Type: Journal
DOI: 10.1063/1.3384349 Document Type: Article

Times cited : (57)

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