Layer-controlled, wafer-scale, and conformal synthesis of tungsten disulfide nanosheets using atomic layer deposition

ACS Nano

Volumn 7, Issue 12, 2013, Pages 11333-11340

  Song, Jeong Gyu ^a   Park, Jusang ^a   Lee, Wonseon ^a   Choi, Taejin ^a   Jung, Hanearl ^a   Lee, Chang Wan ^a   Hwang, Sung Hwan ^a   Myoung, Jae Min ^a   Jung, Jae Hoon ^b   Kim, Soo Hyun ^b   Lansalot Matras, Clement ^c   Kim, Hyungjun ^a  

^a Yonsei University   (South Korea)

^b Yeungnam University   (South Korea)

^c AIR LIQUIDE   (France)

Author keywords

atomic layer deposition; transition metal dichalcogenides; two dimensional materials; WS2; WS2 nanotube

Indexed keywords

DICHALCOGENIDES; HIGH-K DIELECTRIC; NUMBER OF LAYERS; PHOTOLUMINESCENCE MEASUREMENTS; SUBTHRESHOLD SWING; TUNGSTEN DISULFIDE; TWO-DIMENSIONAL MATERIALS; WS2;

DEPOSITION; FIELD EFFECT TRANSISTORS; NANOSHEETS; NANOTUBES; PHOTOELECTRON SPECTROSCOPY; TRANSITION METALS;

ATOMIC LAYER DEPOSITION;

EID: 84891359914     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn405194e     Document Type: Article

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