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Volumn 10, Issue 1, 1995, Pages 49-53
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Crystal orientation and near-interface structure of chemically vapor deposited Mos2 films
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL VAPOR DEPOSITION;
CRYSTAL ORIENTATION;
CRYSTAL STRUCTURE;
GRAPHITE;
HYDROGEN SULFIDE;
INTERFACES (MATERIALS);
SEMICONDUCTING SILICON;
SOLID LUBRICANTS;
THERMAL EFFECTS;
TRANSMISSION ELECTRON MICROSCOPY;
DEPOSITION TEMPERATURE;
GRAPHITE SUBSTRATES;
MOLYBDENUM HEXAFLUORIDE;
MOLYBDENUM SULFIDE;
NEAR INTERFACE STRUCTURE;
THIN FILMS;
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EID: 0029192346
PISSN: 08842914
EISSN: 20445326
Source Type: Journal
DOI: 10.1557/JMR.1995.0049 Document Type: Article |
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Times cited : (23)
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References (8)
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