Chemical vapour deposition of molybdenum carbides: aspects of phase stability

Thin Solid Films

Volumn 370, Issue 1, 2000, Pages 203-212

  Lu, J ^a   Hugosson, H ^b   Eriksson, O ^b   Nordstrom L ^b   Jansson, U ^a  

^a UPPSALA UNIVERSITY   (Sweden)

^b UPPSALA UNIVERSITY   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

CARBURIZING; CHEMICAL VAPOR DEPOSITION; COMPOSITION EFFECTS; CRYSTAL LATTICES; CRYSTAL MICROSTRUCTURE; DECOMPOSITION; NANOSTRUCTURED MATERIALS; PHASE COMPOSITION; PHASE EQUILIBRIA; REACTION KINETICS; SYNTHESIS (CHEMICAL); THIN FILMS;

GAS MIXTURE; MOLYBDENUM CARBIDES; PHASE STABILITY;

MOLYBDENUM COMPOUNDS;

EID: 0033703164     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00750-1     Document Type: Article

References (22)

1. Rudy E., Windisch St., Stosick A.J., Hoffman J.R. Trans. Metall. Soc. AIME. 239:1967;1247.
2. Velikanova T.Y., Kulii V.Z., Khaenko B.V. Sov. Powder Metall. 27:1988;891.
3. Kuo K., Hägg G. Nature. 170:1952;245.
4. Chrysanthou A., Grieveson P. J. Mater. Sci. Lett. 10:1991;145.
5. Wood J., Chen J.E., Kadin A.M., Burkhardt R.W., Ovshinsky S.R. IEEE Trans. Magn. 21:1985;842.
6. Haase E.L., Low J. Temp. Phys. 69:1987;245.
7. Okuyama F., Fujimoto Y., Kato S., Kondo H. Appl. Phys. A. 38:1985;275.
8. Watanabe A., Imai Y., Osato K., et al. Denki Kagaku. 57:1989;1067.
9. Ferguson I.F., Ainscough J.B. Nature. 202:1964;1328.
10. Yasuda K., Murota J. Jpn. J. Appl. Phys. 22:1983;615.
11. Norin L., Jansson U., Carsson J.-O. Thin Solid Films. 293:1997;133.
12. Lu J., Jansson U. Allendorf M., Bernard C. Chemical Vapour Deposition, Paris, France, September 4-9, 1997, The Electrochemical Society and EUROCVD-11 Proceeding 97-25. 1997;The Electrochemical Society.
13. Skriver H. Solid State Sciences. 1984;Springer, Berlin.
14. Hugosson H., Eriksson O., Nordström L., Jansson U., Fast L., Delin A., Johansson B., Wills J.M. J. Appl. Phys. 86:1999;3758.
15. Yvon K., Jeitschko W., Parthe E. J. Appl. Crystallogr. 10:1977;73.
16. Cullity B.D. Elements of X-ray Diffraction. 2nd ed. 1978;102 Addison-Wiley, London.
17. Powder Diffraction File, Card 060546. 1967;ASTM, Philadelphia, PA.
18. Powder Diffraction File, Card 350787. 1984;ASTM, Philadelphia, PA.
19. Powder Diffraction File, Card 451015. 1988;ASTM, Philadelphia, PA.
20. Högberg H., Tägtström P., Lu J., Jansson U. Thin Solid Films. 272:1996;116.
21. Veprek S., Reiprich S. Thin Solid Films. 268:1995;64.
22. Voevodin A.A., Prasad S.V., Zabinski J.S. J. Appl. Phys. 82:1997;855.