Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

Plasma Sources Science and Technology

Volumn 22, Issue 6, 2013, Pages

  Derzsi, A ^a   Korolov, I ^a   Schungel E ^b   Donko Z ^a   Schulze, J ^b  

^a INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE DISCHARGES; CAPACITIVELY COUPLED; HIGH SECONDARY ELECTRON EMISSION COEFFICIENTS; IONIZATION DYNAMICS; PARTICLE-IN-CELL SIMULATIONS; RADIO FREQUENCY PLASMA; SECONDARY ELECTRON EMISSION COEFFICIENTS; SPECIFIC HARMONICS;

DYNAMICS; ELECTRODES; ELECTRON EMISSION; HARMONIC ANALYSIS; IONIZATION; IONS; PLASMA HEATING;

ELECTRIC DISCHARGES;

EID: 84892705700     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/22/6/065009     Document Type: Article

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