Effect of bulk electric field reversal on the bounce resonance heating in dual-frequency capacitively coupled electronegative plasmas

Applied Physics Letters

Volumn 101, Issue 11, 2012, Pages

  Liu, Yong Xin ^a   Zhang, Quan Zhi ^a   Liu, Jia ^a   Song, Yuan Hong ^a   Bogaerts, Annemie ^b   Wang, You Nian ^a  

^a DALIAN UNIVERSITY OF TECHNOLOGY   (China)

^b UNIVERSITY OF ANTWERP   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ARGON DISCHARGES; CAPACITIVELY COUPLED; CAPACITIVELY COUPLED PLASMAS; DISCHARGE MODE; DUAL FREQUENCY; ELECTRIC FIELD REVERSAL; ELECTRODE GAP; ELECTRONEGATIVE DISCHARGE; ELECTRONEGATIVE PLASMAS; EXPERIMENTAL METHODS; HIGH-FREQUENCY POWER; OUT OF PHASE; PARTICLE SIMULATIONS;

ELECTRIC FIELDS;

PLASMAS;

EID: 84866314721     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4751984     Document Type: Article

References (24)

1. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 2005).
2. M. A. Lieberman and V. A. Godyak, IEEE Trans. Plasma Sci. 26, 955 (1998). 10.1109/27.700878
3. M. M. Turner, J. Phys. D: Appl. Phys. 42, 194008 (2009). 10.1088/0022-3727/42/19/194008
4. M. Surendra, D. B. Graves, and I. J. Morey, Appl. Phys. Lett. 56, 1022 (1990). 10.1063/1.102604
5. M. Surendra and D. Vender, Appl. Phys. Lett. 65, 153 (1994). 10.1063/1.112656
6. Y. Okuno, Y. Ohtsu, and H. Fujita, Appl. Phys. Lett. 64, 1623 (1994). 10.1063/1.111858
7. B. P. Wood, Ph.D. dissertation, University of California, Berkeley, 1991.
8. Y. M. Aliev, I. D. Kaganovich, and H. Schlüter, Phys. Plasmas 4, 2413 (1997). 10.1063/1.872222
9. I. D. Kaganovich, V. I. Kolobov, and L. D. Tsendin, Appl. Phys. Lett. 69, 3818 (1996). 10.1063/1.117115
10. G. Y. Park, S. J. You, F. Iza, and J. K. Lee, Phys. Rev. Lett. 98, 085003 (2007). 10.1103/PhysRevLett.98.085003
11. S. J. You, C. W. Chung, and H. Y. Chang, Appl. Phys. Lett. 87, 041501 (2005). 10.1063/1.1928320
12. Y. X. Liu, Q. Z. Zhang, W. Jiang, L. J. Hou, X. Z. Jiang, W. Q. Lu, and Y. N. Wang, Phys. Rev. Lett. 107, 055002 (2011). 10.1103/PhysRevLett.107.055002
13. N. Nakano, N. Shimura, Z.-L. Petrović, and T. Makabe, Phys. Rev. E 49, 4455 (1994). 10.1103/PhysRevE.49.4455
14. V. A. Lisovskiy and V. D. Yegorenkov, Vacuum 80, 458 (2006). 10.1016/j.vacuum.2005.07.038
15. M. Shibata, N. Nakano, and T. Makabe, J. Appl. Phys. 77, 6181 (1995). 10.1063/1.359144
16. M. Yan, A. Bogaerts, W. J. Goedheer, and R. Gijbels, Plasma Sources Sci. Technol. 9, 583 (2000). 10.1088/0963-0252/9/4/314
17. M. Yan, A. Bogaerts, and R. Gijbels, J. Appl. Phys. 87, 3628 (2000). 10.1063/1.372392
18. J. Schulze, A. Derzsi, K. Dittmann, T. Hemke, J. Meichsner, and Z. Donkó, Phys. Rev. Lett. 107, 275001 (2011). 10.1103/PhysRevLett.107. 275001
19. O. V. Proshina, T. V. Rakhimova, A. T. Rakhimov, and D. G. Voloshin, Plasma Sources Sci. Technol. 19, 065013 (2010). 10.1088/0963-0252/19/6/065013
20. K. Denpoh and K. Nanbu, Jpn. J. Appl. Phys., Part 1 39, 2804 (2000). 10.1143/JJAP.39.2804
21. Y. X. Liu, Q. Z. Zhang, W. Jiang, W. Q. Lu, and Y. N. Wang, Plasma Sources Sci. Technol. 21, 035010 (2012). 10.1088/0963-0252/21/3/035010
22. R. B. Piejak, V. A. Godyak, R. Garner, B. M. Alexandrovich, and N. Sternberg, J. Appl. Phys. 95, 3785 (2004). 10.1063/1.1652247
23. V. Vahedi and M. Surendra, Comput. Phys. Commun. 87, 179 (1995). 10.1016/0010-4655(94)00171-W
24. Y. X. Liu, Q. Z. Zhang, A. Bogaerts, and Y. N. Wang, The bounce resonance heating in a dual-frequency capacitively coupled electronegative oxygen discharge (unpublished).