SCOPUS 정보 검색 플랫폼

Applied Physics Letters

Volumn 100, Issue 13, 2012, Pages

Microcrystalline silicon solar cells deposited using a plasma process excited by tailored voltage waveforms

(3) Johnson, E V a Delattre, P A a,b Booth, J P b

a LABORATOIRE DE PHYSIQUE DES INTERFACES ET DES COUCHES MINCES (France)

b ECOLE POLYTECHNIQUE (France)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORBING LAYERS; GROWTH SURFACES; HYDROGENATED MICROCRYSTALLINE SILICON; I-LAYER; INJECTED POWER; LOW PRESSURES; P-I-N STRUCTURE; PHOTOVOLTAIC DEVICES; PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION; PLASMA PROCESS; PROCESS PRESSURE; THIN FILM SOLAR CELLS; VOLTAGE WAVEFORMS;

PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;

MICROCRYSTALLINE SILICON;

EID: 84859539342 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.3699222 Document Type: Article

Times cited : (49)

References (14)

1
- 70349638090
- 10.1063/1.3223310
- J. Schulze, E. Schüngel, U. Czarnetzki, and Z. Donk, J. Appl. Phys. 106, 063307 (2009). 10.1063/1.3223310
- (2009) J. Appl. Phys. , vol.106 , pp. 063307
- Schulze, J.¹ Schüngel, E.² Czarnetzki, U.³ Donk, Z.⁴

2
- 65449156918
- 10.1088/0022-3727/42/9/092005
- J. Schulze, E. Schüngel, and U. Czarnetzki, J. Phys. D: Appl. Phys. 42, 092005 (2009). 10.1088/0022-3727/42/9/092005
- (2009) J. Phys. D: Appl. Phys. , vol.42 , pp. 092005
- Schulze, J.¹ Schüngel, E.² Czarnetzki, U.³

3
- 78249267865
- 10.1088/0022-3727/43/41/412001
- E. V Johnson, T. Verbeke, J. C. Vanel, and J. P. Booth, J. Phys. D: Appl. Phys. 43, 412001 (2010). 10.1088/0022-3727/43/41/412001
- (2010) J. Phys. D: Appl. Phys. , vol.43 , pp. 412001
- Johnson, E.V.¹ Verbeke, T.² Vanel, J.C.³ Booth, J.P.⁴

4
- 84859553673
- San Francisco (Mater. Res. Soc. Sym Proc.)
- E. V. Johnson, S. Pouliquen, P. A. Delattre, and J. P. Booth, Plasma Assisted Materials Processing and Synthesis., San Francisco (Mater. Res. Soc. Symp. Proc., 2011).
- (2011) Plasma Assisted Materials Processing and Synthesis
- Johnson, E.V.¹ Pouliquen, S.² Delattre, P.A.³ Booth, J.P.⁴

5
- 84865789780
- J. Non-Cryst. Solids (in press). 10.1016/j.jnoncrysol.2012.01.014
- E. V. Johnson, S. Pouliquen, P. A. Delattre, and J. P. Booth, Hydrogenated microcrystalline silicon thin films deposited by RF-PECVD under low ion bombardment energy using voltage waveform tailoring., J. Non-Cryst. Solids (in press). 10.1016/j.jnoncrysol.2012.01.014
- Hydrogenated Microcrystalline Silicon Thin Films Deposited by RF-PECVD under Low Ion Bombardment Energy Using Voltage Waveform Tailoring
- Johnson, E.V.¹ Pouliquen, S.² Delattre, P.A.³ Booth, J.P.⁴

6
- 78650294744
- 10.1063/1.3505794
- M. A. Wank, R. A. C. M. M. van Swaaij, P. Kudlacek, M. C. M. van de Sanden, and M. Zeman, J. Appl. Phys. 108, 103304 (2010). 10.1063/1.3505794
- (2010) J. Appl. Phys. , vol.108 , pp. 103304
- Wank, M.A.¹ Van Swaaij, R.A.C.M.M.² Kudlacek, P.³ Van De Sanden, M.C.M.⁴ Zeman, M.⁵

7
- 84860015485
- Prog. Photovoltaics (to be published). 10.1002/pi1157
- M. A. Wank, R. van Swaaij, R. van de Sanden, and M. Zeman, Hydrogenated amorphous silicon p-i-n solar cells deposited under well controlled ion bombardment using pulse-shaped substrate biasing., Prog. Photovoltaics (to be published). 10.1002/pip.1157
- Hydrogenated Amorphous Silicon P-i-n Solar Cells Deposited under Well Controlled Ion Bombardment Using Pulse-shaped Substrate Biasing
- Wank, M.A.¹ Van Swaaij, R.² Van De Sanden, R.³ Zeman, M.⁴

8
- 67649844004
- 10.1088/0963-0252/18/2/025009
- F. L. Buzzi, Y. H. Ting, and A. E. Wendt, Plasma Sources Sci. Technol. 18, 025009 (2009). 10.1088/0963-0252/18/2/025009
- (2009) Plasma Sources Sci. Technol. , vol.18 , pp. 025009
- Buzzi, F.L.¹ Ting, Y.H.² Wendt, A.E.³

9
- 34247487447
- Arbitrary substrate voltage wave forms for manipulating energy distribution of bombarding ions during plasma processing
- DOI 10.1088/0963-0252/16/2/007, PII S0963025207365936, 007
- M. M. Patterson, H. Y. Chu, and A. E. Wendt, Plasma Sources Sci. Technol. 16, 257 (2007). 10.1088/0963-0252/16/2/007 (Pubitemid 46646745)
- (2007) Plasma Sources Science and Technology , vol.16 , Issue.2 , pp. 257-264
- Patterson, M.M.¹ Chu, H.-Y.² Wendt, A.E.³

10
- 84953677733
- 10.1116/1.577318
- P. Roca i Cabarrocas, J. B. Chévrier, J. Huc, A. Lloret, J. Y. Parey, and J. P. M. Schmitt, J. Vac. Sci. Technol. A 9, 2331 (1991). 10.1116/1.577318
- (1991) J. Vac. Sci. Technol. A , vol.9 , pp. 2331
- Roca Cabarrocas, I.P.¹ Chévrier, J.B.² Huc, J.³ Lloret, A.⁴ Parey, J.Y.⁵ Schmitt, J.P.M.⁶

11
- 0036538979
- Ion bombardment effects on the microcrystalline silicon growth mechanisms and structure
- DOI 10.1016/S0022-3093(01)00995-4, PII S0022309301009954, Suppl. 1
- B. Kalache, A. I. Kosarev, R. Vanderhaghen, and P. Roca i Cabarrocas, J. Non-Cryst. Solids 299-302, 63 (2002). 10.1016/S0022-3093(01)00995-4 (Pubitemid 34466784)
- (2002) Journal of Non-Crystalline Solids , vol.299-302 , Issue.PART 1 , pp. 63-67
- Kalache, B.¹ Kosarev, A.I.² Vanderhaghen, R.³ Roca I Cabarrocas, P.⁴

12
- 33745622914
- Material structure and metastability of hydrogenated nanocrystalline silicon solar cells
- DOI 10.1063/1.2216022
- G. Yue, B. Yan, G. Ganguly, J. Yang, S. Guha, and C. W. Teplin, Appl. Phys. Lett. 88, 263507 (2006). 10.1063/1.2216022 (Pubitemid 43992989)
- (2006) Applied Physics Letters , vol.88 , Issue.26 , pp. 263507
- Yue, G.¹ Yan, B.² Ganguly, G.³ Yang, J.⁴ Guha, S.⁵ Teplin, C.W.⁶

13
- 49749144481
- 10.1063/1.2961334
- A. H. M. Smets, T. Matsui, and M. Kondo, J. Appl. Phys. 104, 034508 (2008). 10.1063/1.2961334
- (2008) J. Appl. Phys. , vol.104 , pp. 034508
- Smets, A.H.M.¹ Matsui, T.² Kondo, M.³

14
- 24144432255
- Open circuit voltage improvement of high-deposition-rate microcrystalline silicon solar cells by hot wire interface layers
- DOI 10.1063/1.2011771, 073503
- Y. Mai, S. Klein, R. Carius, H. Stiebig, X. Geng, and F. Finger, Appl. Phys. Lett. 87, 073503 (2005). 10.1063/1.2011771 (Pubitemid 41235387)
- (2005) Applied Physics Letters , vol.87 , Issue.7 , pp. 1-3
- Mai, Y.¹ Klein, S.² Carius, R.³ Stiebig, H.⁴ Geng, X.⁵ Finger, F.⁶

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.