Enhanced sheath heating in capacitively coupled discharges due to non-sinusoidal voltage waveforms

Applied Physics Letters

Volumn 100, Issue 19, 2012, Pages

  Lafleur, T ^a   Boswell, R W ^b   Booth, J P ^c  

^a Australian National University ^*

^b AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

^c ECOLE POLYTECHNIQUE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVELY COUPLED DISCHARGES; ELECTRON DISTRIBUTION FUNCTION; ELECTRON HEATING; GAS PRESSURES; GAUSSIAN PULSE; ION FLUXES; NON-SINUSOIDAL VOLTAGE; OPERATING CONDITION; PARTICLE-IN-CELL SIMULATIONS; POWER ABSORPTION; POWER DEPOSITION; REPETITION FREQUENCY; SINUSOIDAL WAVEFORMS; VOLTAGE PULSE;

ELECTRIC POTENTIAL; PLASMA DENSITY;

ARGON;

EID: 84862095724     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.4712128     Document Type: Article

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