The effect of dust on electron heating and dc self-bias in hydrogen diluted silane discharges

Journal of Physics D: Applied Physics

Volumn 46, Issue 17, 2013, Pages

  Schungel E ^a   Mohr, S ^a   Iwashita, S ^a   Schulze, J ^a   Czarnetzki, U ^a  

^a RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DUST DISTRIBUTION; ELECTRODE TEMPERATURE; ELECTRON CONDUCTION; ELECTRON DYNAMICS; HYDROGEN DILUTED SILANE; LASER LIGHT SCATTERING; THERMOPHORETIC FORCE; THIN FILM SOLAR CELLS;

DUST; DYNAMICS; EMISSION SPECTROSCOPY; HYDROGEN; PHASE SHIFT; PHASE SHIFTERS; PLASMA DENSITY; PLASMA HEATING; SILANES;

ELECTRIC DISCHARGES;

EID: 84876477762     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/46/17/175205     Document Type: Article

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