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Physical Review Letters

Volumn 107, Issue 27, 2011, Pages

Ionization by drift and ambipolar electric fields in electronegative capacitive radio frequency plasmas

(6) Schulze, J a Derzsi, A b Dittmann, K c Hemke, T a Meichsner, J c Donko Z b

a RUHR UNIVERSITY BOCHUM (Germany)

b INSTITUTE OF EXPERIMENTAL MEDICINE (Hungary)

c UNIVERSITY OF GREIFSWALD (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AMBIPOLAR ELECTRIC FIELDS; ANALYTICAL MODEL; BULK CONDUCTIVITIES; ELECTRONEGATIVE DISCHARGE; LOCAL MAXIMUM; MODE OPERATION; MODE TRANSITIONS; PARTICLE SIMULATIONS; PLASMA BULK; PRESSURE VARIATIONS; RADIO FREQUENCY PLASMA; SHEATH EDGE;

COMPUTER SIMULATION; ELECTRIC FIELDS; EMISSION SPECTROSCOPY; IONIZATION; MATHEMATICAL MODELS; OPTICAL EMISSION SPECTROSCOPY;

ELECTRIC DISCHARGES;

EID: 84855281879 PISSN: 00319007 EISSN: 10797114 Source Type: Journal
DOI: 10.1103/PhysRevLett.107.275001 Document Type: Article

Times cited : (207)

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