Interconnects for nanoscale MOSFET technology: A review

Journal of Semiconductors

Volumn 34, Issue 6, 2013, Pages

  Chaudhry, Amit ^a  

^a PANJAB UNIVERSITY   (India)

Author keywords

3D integration; CNTs; comparisons; Cu low k; electromigration; graphene interconnects

Indexed keywords

3-D INTEGRATION; CNTS; COMPARISONS; CU/LOW-K; CU/LOW-K INTERCONNECTS; GRAPHENE NANORIBBON (GNR); INTERCONNECT TECHNOLOGY; NANOMETER-SCALE TECHNOLOGIES;

ELECTROMIGRATION; NANORIBBONS; NANOTECHNOLOGY; TECHNOLOGY;

MOSFET DEVICES;

EID: 84879924669     PISSN: 16744926     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-4926/34/6/066001     Document Type: Article

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