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Volumn 46, Issue 12, 2002, Pages 2269-2272
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Skin effect of on-chip copper interconnects on electromigration
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Author keywords
Copper interconnect; Electromigration; Mean time to failure; Reduced vacancy concentration; Skin effect
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Indexed keywords
COPPER;
ELECTRIC CONNECTORS;
ELECTRIC CURRENT DISTRIBUTION;
ELECTROMIGRATION;
MATHEMATICAL MODELS;
VLSI CIRCUITS;
COPPER INTERCONNECTS;
SKIN EFFECT;
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EID: 0036891198
PISSN: 00381101
EISSN: None
Source Type: Journal
DOI: 10.1016/S0038-1101(02)00232-0 Document Type: Article |
Times cited : (5)
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References (7)
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