On-chip interconnection beyond semiconductor roadmap: Silicon microphotonics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4870, Issue , 2002, Pages 437-443

  Wada, K ^a   Luan, H C ^a   Lim, D R C ^a   Kimerling, L C ^a  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Cu low k technology; Ge photodetectors; High index contrast optics; On chip optical interconnection; Right angle bends; Ring resonators; Si waveguides

Indexed keywords

CRYSTALS; LIGHT SOURCES; LSI CIRCUITS; OPTICAL INTERCONNECTS; PHOTODETECTORS; SILICON; SILICON WAFERS; WAVELENGTH DIVISION MULTIPLEXING;

SILICON MICROPHOTONICS;

PHOTONS;

EID: 0036423455     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.475558     Document Type: Conference Paper

References (6)

1. E.A.J. Marcatili, Bell Sys. Tech. J. 48, 2103, 1969.
2. E.R. Thoen, L.A. Molter, and J.P. Donnelly, IEEE Journal of Quantum Electronics, 33, 1299, 1997.
3. K.K. Lee, D.R. Lim, H.-S. Luan, A. Agawal, J. Foresi, and L.C. Kimerling, Appl. Phys. Lett. 77, 1617, 2000.
4. D.R.C. Lim, Ph.D. Thesis, Massachusetts Institute of Technology, 2000.
5. C. Manolatou, S.G. Johnson, S. Fan, P.R. Villeneuve, H.A. Haus, J.D. Joannopoulos, J. Lightwave Technol., 17, 1682, 1999.
6. H.S. Luan, Ph.D. Thesis, Massachusetts Institute of Technology, 2000.