Design and control of critical properties of low-k dielectrics for nanoscale interconnects

International Conference on Solid-State and Integrated Circuits Technology Proceedings, ICSICT

Volumn 1, Issue , 2004, Pages 497-502

  Zhou, H ^a   Shi, F G ^a   Zhao, B ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b SKYWORKS SOLUTIONS INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRITICAL PROPERTIES; CYCLIC COMPOUNDS; NANOSCALE INTERCONNECTS; STRUCTURAL PROPERTIES;

ELECTRIC PROPERTIES; GLASS TRANSITION; INTEGRATED CIRCUITS; MECHANICAL PROPERTIES; MICROMETERS; NANOSTRUCTURED MATERIALS; OPTICAL INTERCONNECTS; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; THERMODYNAMIC PROPERTIES; THIN FILMS;

DIELECTRIC DEVICES;

EID: 21644444661     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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