TSEM: A review of scanning electron microscopy in transmission mode and its applications

Advances in Imaging and Electron Physics

Volumn 171, Issue , 2012, Pages 297-356

  Klein, Tobias ^a   Buhr, Egbert ^a   Georg Frase, Carl ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

LVSTEM; Nanoparticle; Scanning Electron Microscopy; STEM in SEM; TSEM

Indexed keywords

ELECTRON SCATTERING; ELECTRONS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; MONTE CARLO METHODS; NANOPARTICLES; TRANSMISSION ELECTRON MICROSCOPY;

DIMENSIONAL MEASUREMENTS; HIGH VOLTAGE TRANSMISSION ELECTRON MICROSCOPY; LOW ENERGY ELECTRONS; LVSTEM; MICROSCOPY TECHNIQUE; TRANSMISSION DETECTORS; TRANSMISSION ELECTRON; TSEM;

SCANNING ELECTRON MICROSCOPY;

EID: 84860818661     PISSN: 10765670     EISSN: None     Source Type: Book Series    
DOI: 10.1016/B978-0-12-394297-5.00006-4     Document Type: Chapter

References (159)

1. Acevedo-Reyes D., Perez M., Verdu C., Bogner A., and Epicier T. Characterization of precipitates size distribution: Validation of low-voltage STEM Journal of Microscopy 232 2008 112 122
2. Ayache J., Beaunier L., Boumendil J., Ehret G., and Laub D. Sample Preparation Handbook for Transmission Electron Microscopy: Techniques 2010 Springer Heidelberg
3. Barkay Z. Dynamic study of nanodroplet nucleation and growth on self-supported nanothick liquid films Langmuir 26 2010 957 985
4. Barkay Z., Rivkin I., and Margalit R. Three-dimensional characterization of drug-encapsulating particles using STEM detector in FEG-SEM Micron 40 2009 480 485
5. Berger M., and Seltzer S. Tables of energy losses and ranges of electrons and positrons In Studies in penetration of charged particles in matter (No. 39 in Nuclear Science Series) 1964 National Academy of Sciences Washingtion, DC
6. Bethe H. Zur Theorie des Durchgangs schneller Korpuskularstrahlen durch Materie Annalen der Physik 5 1930 325 400
7. Bogner A., Jouneau P.H., Thollet G., Basset D., and Gauthier C. A history of scanning electron microscopy developments: Towards wet-STEM imaging Micron 38 2007 390 401 (Pubitemid 46149334)
8. Bogner A., Thollet G., Basset D., Jouneau P.H., and Gauthier C. Wet STEM: A new development in environmental SEM for imaging nano-objects included in a liquid phase Ultramicroscopy 104 2005 290 301 (Pubitemid 40982472)
9. Broers A.N. Observation of Fresnel fringes in the conventional scanning electron microscope Applied Physics Letters 21 1972 499 501
10. Brown G., and Westwood A. Characterization of polymers and catalysts using scanning transmission electron microscopy (STEM) in a field emission SEM Microscopy and Microanalysis 9 2003 1020 1021 (Pubitemid 37030069)
11. Browning R., Li T.Z., Chui B., Ye J., Pease R.F.W., and Joy D.C. Empirical forms for the electron/atom elastic scattering cross sections from 0.1 to 30 keV Journal of Applied Physics 76 1994 2016 2022
12. Buhr E., Michaelis W., Diener A., and Mirande W. Multi-wavelength VIS/UV optical diffractometer for high-accuracy calibration of nano-scale pitch standards Measurement Science and Technology 18 2007 667 674 (Pubitemid 46603728)
13. Buhr E., Senftleben N., Klein T., Bergmann D., Gnieser D., Frase C.G., and Bosse H. Characterization of nanoparticles by scanning electron microscopy in transmission mode Measurement Science and Technology 20 2009 084025
14. Busch H. Berechnung der Bahn von Kathodenstrahlen im axialsymmetrischen elektromagnetischen Felde Annalen der Physik 386 1926 974 993
15. Busch H. Uber die Wirkungsweise der Konzentrierungsspule bei der Braunschen Rohre Electrical Engineering (Archiv fur Elektrotechnik 18 1927 583 594
16. Cerrina F. Recent advances in X-ray lithography Japanese Journal of Applied Physics 31 1992 4178 4184 (Pubitemid 23633342)
17. Chernoff D.A., Buhr E., Burkhead D.L., and Diener A. Picometer-scale accuracy in pitch metrology by optical diffraction and atomic force microscopy Proceedings of SPIE 6922 2008 69223J
18. Cowley J.M. Image contrast in a transmission scanning electron microscope Applied Physics Letters 15 1969 58 59
19. Coyne E. A working method for adapting the (SEM) scanning electron microscope to produce (STEM) scanning transmission electron microscope images ISTFA 2002: 28th international symposium for testing and failure analysis 2002 Phoenix Arizona 93 99
20. Coyne E., Magee J.P., Mannion P., O'Connor G.M., and Glynn T.J. STEM (scanning transmission electron microscopy) analysis of femtosecond laser pulse induced damage to bulk silicon Applied Physics A: Materials Science and Processing 81 2005 371 378 (Pubitemid 40683710)
21. Crawford B.J., and Liley C.R.W. A simple transmission stage using the standard collection system in the scanning electron microscope Journal of Physics E: Scientific Instruments 3 1970 461 462
22. Crewe A.V., and Wall J. A scanning microscope with 5 Å resolution Journal of Molecular Biology 48 1970 375 393
23. Crewe A.V., Wall J., and Langmore J. Visibility of single atoms Science 168 1970 1338 1340
24. Crewe A.V., Wall J., and Welter L.M. A high-resolution scanning transmission electron microscope Journal of Applied Physics 39 1968 5861 5868
25. Cudby P. Characterization of vulcanized blends by microscopy A.J. Tinkler, K.P. Jones, Blends of natural rubber: Novel techniques for blending with speciality polymers 1998 Chapman & Hall London 21 39
26. Czyzewski Z., MacCallum D., Romig A., and Joy D.C. Calculations of Mott scattering cross section Journal of Applied Physics 68 1990 3066 3072
27. Daniel M.C., and Astruc D. Gold nanoparticles: Assembly, supramolecular chemistry, quantum-size-related properties, and applications toward biology, catalysis, and nanotechnology Chemical Reviews 104 2004 293 346
28. Demers H., Poirier-Demers N., Couture A.R., Joly D., Guilmain M., De Jonge N., and Drouin D. Three-dimensional electron microscopy simulation with the CASINO Monte Carlo software Scanning 33 2011 135 146
29. Farrow R.C., Postek M.T., Keery W.J., Jones S.N., Lowney J.R., and Blakey M. Hopkins L.C. Application of transmission electron detection to SCALPEL mask metrology Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15 1997 2167 2172 (Pubitemid 127585508)
30. Faucheu J., Chazeau L., Gauthier C., Cavaille J.Y., Goikoetxea M., Minari R., and Asua J.M. Latex imaging by environmental STEM: Application to the study of the surfactant outcome in hybrid alkyd/acrylate systems Langmuir 25 2009 10251 10258
31. Frase C.G., Buhr E., and Dirscherl K. CD characterization of nanostructures in SEM metrology Measurement Science and Technology 18 2007 510 520
32. Frase C.G., Gnieser D., and Bosse H. Model-based SEM for dimensional metrology tasks in semiconductor and mask industry Journal of Physics D: Applied Physics 42 2009 183001
33. Fujita H. History of electron microscopes. In Commemoration of the 11th international congress on electron microscopy 1986 Kyoto Japan
34. Fujita J., Ikeda Y., Okada S., Higashi K., Nakasawa S., Ishida M., and Matsui S. In situ visualization of local electric field in an ultrasharp tungsten emitter under a low voltage scanning transmission electron microscope Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 25 2007 2624 2627 (Pubitemid 350255945)
35. Fujita J., Ikeda Y., Okada S., Higashi K., Nakazawa S., Ishida M., and Matsui S. In-situ visualization of local field enhancement in an ultra sharp tungsten emitter under a low voltage scanning transmission electron microscope Japanese Journal of Applied Physics 46 2007 L498 L501
36. Fujita J., Ikeda Y., and Suzuki I. Multilevel visualization of local electric field at probe apex using scanning electron microscopy Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 26 2008 2069 2072
37. Furusho H., Mishima Y., Kameta N., Yamane M., Masuda M., and Asakawa M. Shimizu T. Lipid nanotube encapsulating method in low-energy scanning transmission electron microscopy analyses Japanese Journal of Applied Physics 48 2009 097001
38. Gentsch P., Gilde H., and Reimer L. Measurement of the top bottom effect in scanning transmission electron microscopy of thick amorphous specimens Journal of Microscopy 100 1974 81 92
39. Giannuzzi L.A., and Stevie F.A. A review of focused ion beam milling techniques for TEM specimen preparation Micron 30 1999 197 204 (Pubitemid 29303254)
40. Gignac L.M., and Wells O.C. Characterization of semiconductor nanostructures by scanning electron microscopy R. Haight, F.M. Ross, J.B. Hannon, Handbook of instrumentation and techniques for semiconductor nanostructure characterization 2011 World Scientific Publishing Singapore
41. Gleber G., Cibik L., Haas S., Hoell A., Muller P., and Krumrey M. Traceable size determination of PMMA nanoparticles based on small angle X-ray scattering (SAXS) Journal of Physics: Conference Series 247 2010 012027
42. Gnauck P. Failure analysis and defect review using extended accuracy of the CrossBeam technology Vakuum in Forschung und Praxis 17 S1 2005 5 8
43. Gnieser D., Frase C.G., Bosse H., and Tutsch R. MCSEM - a modular Monte Carlo simulation program for various applications in SEM metrology and SEM photogrammetry M. Luysberg, K. Tillmann, K. Weirich, EMC 2008: 14th European microscopy congress, Aachen, Germany 2008 Springer Heidelberg 549 550
44. Goldstein J., Newbury D.E., Joy D.C., Echlin P., Lyman C.E., and Lifshin E. Scanning Electron Microscopy and X-Ray Microanalysis 2003 Springer New York
45. Golla U., Schindler B., and Reimer L. Contrast in the transmission mode of a low-voltage scanning electron microscope Journal of Microscopy 173 1994 219 225 (Pubitemid 24173200)
46. Golla-Schindler U. Quantitative in situ thickness determination of FIB TEM lamella by using STEM in a SEM M. Luysberg, K. Tillmann, K. Weirich, EMC 2008: 14th European microscopy congress, Aachen, Germany 2008 Springer Heidelberg 667 668
47. Goodhew P.J., Humphreys F.J., and Beanland R. Electron Microscopy and Analysis 2001 Taylor & Francis London
48. Grillon F. Low voltage contrast with an SEM transmission electron detector Microchimica Acta 155 2006 157 161
49. Guise O., Strom C., and Preschilla N. STEM-in-SEM method for morphology analysis of polymer systems Polymer 52 2011 1278 1285
50. Habicht W., Behrens S., Boukis N., and Dinjus E. Scanning transmission type imaging and analysis (EDX) of protein supported metallic nanoparticles G.I.T. Imaging and Microscopy 1/2001 2001 42 44
51. Habicht W., Behrens S., Wu J., Unger E., and Dinjus E. Characterization of metal decorated protein templates by scanning electron/scanning force microscopy and microanalysis Surface and Interface Analysis 36 2004 720 723
52. Habicht W., Behrens S., Unger E., and Dinjus E. Cylindrical and ring-shaped tubulin assemblies as metallization templates explored by FE-SEM/EDX and SFM Surface and Interface Analysis 38 2006 194 197
53. Harriott L. Scattering with angular limitation projection electron beam lithography for suboptical lithography Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 15 1997 2130 2135 (Pubitemid 127585502)
54. Hondow N., Harrington J., Brydson R., Doak S., Singh N., Manshian B., and Brown A. STEM mode in the SEM: A practical tool for nanotoxicology Nanotoxicology 5 2011 215 227
55. Humphreys C.J. Fundamental concepts of STEM imaging Ultramicroscopy 7 1981 7 12
56. Iannello M.A., and Tsung L. STEM role in failure analysis Microelectronics and Reliability 45 2005 1526 1531 (Pubitemid 41231823)
57. Implementing Metrology in the European Research Area. (2008). T3.J1.1: Traceable characterisation of nanoparticles. Funded by the European Commission.
58. Joint Committee for Guides in Metrology. (2008a). Evaluation of measurement data - guide to the expression of uncertainty in measurement (GUM).
59. Joint Committee for Guides in Metrology. (2008b). International vocabulary of metrology - basic and general concepts and associated terms (VIM).
60. Johnsen K.P., Frase C.G., Bosse H., and Gnieser D. SEM image modeling using the modular Monte Carlo model MCSEM Proceedings of SPIE 7638 2010 76381O
61. Jornsanoh P., Thollet G., Ferreira J., Masenelli-Varlot K., Gauthier C., and Bogner A. Electron tomography combining ESEM and STEM: A new 3D imaging technique Ultramicroscopy 111 2011 1247 1254
62. Joy D.C. A model for calculating secondary and backscattered electron yields Journal of Microscopy 147 1987 51 64
63. Joy D.C. An introduction to Monte Carlo simulations Scanning Microscopy 5 1991 329 337
64. Joy D.C., and Luo S. An empirical stopping power relationship for low-energy electrons Scanning 11 1989 176 180
65. Joy D.C., and Maher D.M. Is STEM possible in a SEM? Proceedings of the Workshop on scanning electron microscopy Chicago, IL 1976 361 368
66. Kaiser, D.L. & Watters, R.L. (2007). Report of Investigation. Reference Material 8011. Gold nanoparticles, nominal 10 nm diameter. National Institute of Standards and Technology, Gaithersburg, MD. Retrived from https://www-s.nist.gov/srmors/reports/8011.pdf
67. Kendrick A.B., Moore T.M., Zaykova-Feldman L., Amador G., and Hammer M. Cassette-based in-situ TEM sample inspection in the dual-beam FIB Journal of Physics: Conference Series 126 2008 012082
68. Khursheed A., Karuppiah N., Osterberg M., and Thong J.T.L. Add-on transmission attachments for the scanning electron microscope Review of Scientific Instruments 74 2003 134 140
69. Kimoto S., and Hashimoto H. On the contrast and resolution of the scanning electron microscope Proceedings of the workshop on scanning electron microscopy Chicago, IL 1968 63 78
70. Klein T., Buhr E., Johnsen K.P., and Frase C.G. Traceable measurement of nanoparticle size using a scanning electron microscope in transmission mode (TSEM) Measurement Science and Technology 22 2011 094002
71. Knoll M., and Ruska E. Das Elektronenmikroskop Zeitschrift fur Physik A: Hadrons and Nuclei 78 1932 318 339
72. Koning R., and Koster A. Cryo-electron tomography in biology and medicine Annals of Anatomy-Anatomischer Anzeiger 191 2009 427 445
73. Kotera M., Ijichi R., Fujiwara T., Suga H., and Wittry D. A simulation of electron scattering in metals Japanese Journal of Applied Physics 29 1990 2277 2282
74. Kotula P.G. STEM in SEM for medium-resolution X-ray microanalysis Microscopy and Microanalysis 15 2009 474 475
75. Krzyzanek V., Nusse H., and Reichelt R. Quantitative microscopy with a high-resolution FESEM in the transmission mode Proceedings of the 13th European microscopy congress, volume 1: Instrumentation and methodology 2004
76. Krzyzanek V., and Reichelt R. Quantitative scanning electron microscopy in the transmission mode: a development for nanoanalytics Microscopy conference 2009 2009 Graz Austria 157 158
77. Kubel C., Voigt A., Schoenmakers R., Otten M., Su D., and Lee T. Bradley J. Recent advances in electron tomography: TEM and HAADF-STEM tomography for materials science and semiconductor applications Microscopy and Microanalysis 11 2005 378 400 (Pubitemid 41755338)
78. Laskin A., and Cowin J.P. Automated single-particle SEM/EDX analysis of submicrometer particles down to 0.1 μm Analytical Chemistry 73 2001 1023 1029 (Pubitemid 32204919)
79. Laskin A., Cowin J.P., and Iedema M.J. Analysis of individual environmental particles using modern methods of electron microscopy and X-ray microanalysis Journal of Electron Spectroscopy and Related Phenomena 150 2006 260 274 (Pubitemid 41737453)
80. Lee M.R., and Smith C.L. Scanning transmission electron microscopy using a SEM: Applications to mineralogy and petrology Mineralogical Magazine 70 2006 579 590 (Pubitemid 46243140)
81. Lednicky F., Coufalova E., Hromadkova J., Delong A., and Kolarik V. Low-voltage TEM imaging of polymer blends Polymer 41 2000 4909 4914 (Pubitemid 30193118)
82. Liu, X., & Yorston, J. B. (2010). Automated extreme field of view low voltage multi-mode STEM imaging of biological ultramicrotome cross sections with Atlas. Carl Zeiss NTS. Application note.
83. Lowney J.R. MONSEL-II: Monte Carlo simulation of SEM signals for linewidth metrology Microbeam Analysis 4 1995 131 136
84. Lowney J.R. Use of Monte Carlo modeling for interpreting scanning electron microscope linewidth measurements Scanning 17 1995 281 286
85. Lowney J.R. Monte Carlo simulation of scanning electron microscope signals for lithographic metrology Scanning 18 1996 301 306
86. Lowney J.R., and Marx E. User's Manual for the Program MONSEL-1: Monte Carlo Simulation of SEM Signals for Linewidth Metrology 1994 National Institute of Standards and Technology Gaithersburg, MD
87. Luo T., and Khursheed A. Second-order aberration corrected electron energy loss spectroscopy attachment for scanning electron microscopes Review of Scientific Instruments 77 2006 043103
88. Luo T., and Khursheed A. Elemental identification using transmitted and backscattered electrons in an SEM Physics Procedia 1 2008 155 160
89. Maggiore C.J., and Rubin I.B. Optimization of an SEM X-ray spectrometer system for the identification and characterization of ultramicroscopic particles Proceedings of the workshop on scanning electron microscopy Chicago, IL 1973 129 136
90. Matlab Release 2009a 2009 The MathWorks Inc. Natick, MA
91. McKinney, W. R., & Hough, P. V. C. (1976). Simple SEM to dark field STEM conversion stub. Technical report, Brookhaven National Laboratory, Upton, NY.
92. Merli P.G., Corticelli F., and Morandi V. Images of dopant profiles in low-energy scanning transmission electron microscopy Applied Physics Letters 81 2002 4535 4537
93. Moh K., Werner U., Koch M., and Veith M. Silver nanoparticles with controlled dispersity and their assembly into superstructures Advanced Engineering Materials 12 2010 368 373
94. Moller C. Zur Theorie des Durchgangs schneller Elektronen durch Materie Annalen der Physik 406 1932 531 585
95. Moore M.V. Using in situ scanning transmission electron microscopy to increase resolution in a focused ion beam scanning electron microscope Scanning 25 2003 159 160
96. Morandi V., and Merli P.G. Contrast and resolution versus specimen thickness in low energy scanning transmission electron microscopy Journal of Applied Physics 101 2007 114917
97. Morandi V., Merli P.G., and Quaglino D. Scanning electron microscopy of thinned specimens: from multilayers to biological samples Applied Physics Letters 90 2007 163113
98. Morikawa A., Kamiya C., Watanabe S., Nakagawa M., and Ishitani T. Low-voltage dark-field STEM imaging with optimum detection angle Microscopy and Microanalysis 12 2006 1368 1369 (Pubitemid 44719385)
99. Mott N.F., and Massey H.S.W. The Theory of Atomic Collisions 1933 Claredon Press Oxford, UK
100. Myklebust R., Newbury D., and Yakowitz H. NBS Monte Carlo electron trajectory calculation program Use of monte carlo calculations in electron probe microanalysis and scanning electron microscopy 1976 Proceedings of a workshop held at the National Bureau of Standards Gaithersburg, MD 105 128
101. Nakagawa M., Dunne R., Koike H., Sato M., Perez-Camacho J.J., and Kennedy B.J. Low voltage FE-STEM for characterization of state-of-the-art silicon SRAM Journal of Electron Microscopy 51 2002 53 57 (Pubitemid 34293946)
102. Nemanic M.K., and Everhart T.E. The SEM to STEM conversion stub Proceedings of the scanning electron microscopy symposium Chicago, IL 1973 25 32
103. Neter J., Wasserman W., Kutner M., and Li W. Applied Linear Statistical Models 1996 McGraw-Hill New York
104. Oatley C.W., Nixon W.C., and Pease R.F.W. Scanning electron microscopy Advances in Electronics and Electron Physics 21 1966 181 247
105. Oho E., Baba M., Baba N., Muranaka Y., Sasaki T., Adachi K., and Kanaya K. The conversion of a field-emission scanning electron microscope to a high-resolution, high-performance scanning transmission electron microscope, while maintaining original functions Journal of Electron Microscopy Technique 6 1987 15 30 (Pubitemid 17062190)
106. Oho E., Sasaki T., Adachi K., Muranaka Y., and Kanaya K. An inexpensive and highly efficient device for observing a transmitted electron image in SEM Journal of Electron Microscopy Technique 5 1987 51 58 (Pubitemid 17224011)
107. Pawley J. LVSEM for high resolution topographic and density contrast imaging Advances in Electronics and Electron Physics 83 1992 203 274
108. Peckerar M.C., and Maldonado J.R. X-ray lithography - An overview Proceedings of the IEEE 81 1993 1249 1274
109. Pfaff M., Muller E., Klein M.F.G., Colsmann A., Lemmer U., Krzyzanek V., and Gerthsen D. Low-energy electron scattering in carbon-based materials analyzed by scanning transmission electron microscopy and its application to sample thickness determination Journal of Microscopy 234 2010 31 39
110. Pogany A.P., and Turner P.S. Reciprocity in electron diffraction and microscopy Acta Crystallographica Section A: Crystal Physics, Diffraction, Theoretical and General Crystallography 24 1968 103 109
111. Postek M.T., Larrabee R.D., and Keery W.J. A new approach to accurate X-ray mask measurements in a scanning electron microscope IEEE Transactions on Electron Devices 36 1989 2452 2457
112. Postek M.T., Larrabee R.D., Keery W.J., and Marx E. Application of transmission electron detection to x-ray mask calibrations and inspection Proceedings of SPIE 1464 1991 35 47 (Pubitemid 21695638)
113. Postek M.T., Lowney J.R., Vladar A.E., Keery W.J., Marx E., and Larrabee R.D. X-ray lithography mask metrology: Use of transmitted electrons in an SEM for linewidth measurement Journal of Research of the National Institute of Standards and Technology 98 1993 415 445
114. Postek M.T., and Vladar A. Modeling for accurate dimensional scanning electron microscope metrology: Then and now Scanning 33 2011 111 125
115. Prewitt J.M., and Mendelsohn M.L. The analysis of cell images Annals of the New York Academy of Sciences 128 1965 1035 1053
116. Probst C., Gauvin R., and Drew R.A.L. Imaging of carbon nanotubes with tin-palladium particles using STEM detector in a FE-SEM Micron 38 2007 402 408 (Pubitemid 46151747)
117. Rasteiro M.G., Lemos C.C., and Vasquez A. Nanoparticle characterization by PCS: The analysis of bimodal distributions Particulate Science and Technology 26 2008 413 437
118. Reimer L., Kassens M., and Wiese L. Monte Carlo simulation program with a free configuration of specimen and detector geometries Mikrochimica Acta Supplement 13 1996 485 492
119. Reimer L. Scanning Electron Microscopy: Physics of Image Formation and Microanalysis 1998 Springer Heidelberg
120. Reimer L. Transmission Electron Microscopy: Physics of Image Formation 2008 Springer Heidelberg
121. Ritchie N. A new Monte Carlo application for complex sample geometries Surface and Interface Analysis 37 2005 1006 1011 (Pubitemid 41755719)
122. Russias J., Frizon F., Cau-Dit-Coumes C., Malchere A., Douillard T., and Joussot-Dubien C. Incorporation of aluminum into C-S-H structures: From synthesis to nanostructural characterization Journal of the American Ceramic Society 91 2008 2337 2342
123. Sadowski T.E., Broadbridge C.C., and Daponte J. Comparison of common segmentation techniques applied to transmission electron microscopy images Materials Research Society Symposium Proceedings 982 2007 25 30
124. Salvat F., and Mayol R. Elastic scattering of electrons and positrons by atoms. Schrodinger and Dirac partial wave analysis Computer Physics Communications 74 1993 358 374 (Pubitemid 23622294)
125. Scherzer O. The theoretical resolution limit of the electron microscope Journal of Applied Physics 20 1949 20 29
126. Seiler H. Secondary electron emission in the scanning electron microscope Journal of Applied Physics 54 1983 R1 R18
127. Sezgin M., and Sankur B. Survey over image thresholding techniques and quantitative performance evaluation Journal of Electronic Imaging 13 2004 146 168
128. Shimizu K., Fujitani H., Habazaki H., Skeldon P., and Thompson G.E. Examination of surface films on aluminium and its alloys by low-voltage scanning and scanning transmission electron microscopy Corrosion Science 46 2004 2549 2561 (Pubitemid 39483760)
129. Smith C.L., Lee M.R., and MacKenzie M. New opportunities for nanomineralogy using FIB, STEM/EDX and TEM Microscopy and Analysis 20 2006 17 20
130. Stemmer A., Reichelt R., Wyss R., and Engel A. Biological structures imaged in a hybrid scanning transmission electron microscope and scanning tunneling microscope Ultramicroscopy 35 1991 255 264
131. Stokes D.J., and Baken E. Electron microscopy of soft nanomaterials Imaging and Microscopy 9 2007 18 20
132. Stroustrup B. The C++ Programming Language 2003 John Wiley Sons Hoboken, NJ
133. Swift J.A. A further technique for the routine examination of keratin-fibre sections by transmission scanning electron microscopy Journal of the Textile Institute 63 1972 129 133
134. Swift J.A. The routine examination of keratin-fibre internal structure by transmission scanning electron microscopy Journal of the Textile Institute 63 1972 64 72
135. Swift J.A., Brown A.C., and Saxton C.A. Scanning transmission electron microscopy with the Cambridge Stereoscan Mk II Journal of Physics E: Scientific Instruments 2 1969 744 746
136. Takaoka A., and Hasegawa T. Observations of unstained biological specimens using a low-energy, high-resolution STEM Journal of Electron Microscopy 55 2006 157 163 (Pubitemid 44408315)
137. Takaoka A., Hasegawa T., Kuwae A., and Mori H. Low energy and high resolution STEM for unstained or weak stained biological specimens Proceedings of the 13th European microscopy congress Antwerp, Belgium 2004 349 350
138. Tracy B. Materials analysis and process monitoring in MegaFabs ISTFA 2002: 28th international symposium for testing and failure analysis Phoenix, Arizona 2002 69 75
139. Treacy M.M.J., and Gibson J.M. Coherence and multiple scattering in Z-contrast images Ultramicroscopy 52 1993 31 53
140. Treacy M.M.J., and Gibson J.M. Erratum to "Coherence and multiple scattering in Z-contrast images." Ultramicroscopy 54 1994 93 (Pubitemid 24195111)
141. Tuysuz H., Lehmann C.W., Bongard H., Tesche B., Schmidt R., and Schuth F. Direct imaging of surface topology and pore system of ordered mesoporous silica (MCM-41, SBA-15, and KIT-6) and nanocast metal oxides by high resolution scanning electron microscopy Journal of the American Chemical Society 130 2008 11510 11517
142. Van Essen C.G., Schulson E.M., and Donaghay R.H. Electron channelling patterns from small (10 μ m) selected areas in the scanning electron microscope Nature 225 1970 847 848
143. Van Ngo V., Hernandez M., Roth B., and Joy D.C. STEM imaging of lattice fringes and beyond in a UHR in-lens field-emission SEM Microscopy Today 15 2007 12 16
144. Vanderlinde W.E. STEM (scanning transmission electron microscopy) in a SEM (scanning electron microscope) for failure analysis and metrology ISTFA 2002: international symposium for testing and failure analysis Phoenix, Arizona 2002 77 86
145. Vanderlinde W.E., and Chernoff D. X-ray nanoanalysis in the SEM ISTFA 2005: international symposium for testing and failure analysis San Jose, California 2005 370 379
146. Villarrubia J., Ritchie N., and Lowney J. Monte Carlo modeling of secondary electron imaging in three dimensions Proceedings of SPIE 6518 2007 65180K
147. Volkenandt T., Muller E., Hu D.Z., Schaadt D.M., and Gerthsen D. Quantification of sample thickness and In-concentration of InGaAs quantum wells by transmission measurements in a scanning electron microscope Microscopy and Microanalysis 16 2010 604 613
148. Von Ardenne M. Das Elektronen-Rastermikroskop. Praktische Ausfuhrung Zeitschrift fur technische Physik 19 1938 404 416
149. Von Ardenne M. Das Elektronen-Rastermikroskop. Theoretische Grundlagen Zeitschrift fur Physik A: Hadrons and Nuclei 109 1938 553 572
150. Von Laue M. Die Fluoreszenzrontgenstrahlung von Einkristallen Annalen der Physik 415 1935 705 746
151. Wang Z. Elastic and Inelastic Scattering in Electron Diffraction and Imaging 1995 Plenum Press New York
152. Waskiewicz W.K. SCALPEL proof-of-concept system: Preliminary lithography results Proceedings of SPIE 3048 1997 255
153. Wells O.C., and Bremer C.G. Collector turret for scanning electron microscope Review of Scientific Instruments 41 1970 1034 1037
154. Wentzel G. Zwei Bemerkungen uber die Zerstreuung korpuskularer Strahlen als Beugungserscheinung Zeitschrift fur Physik A: Hadrons and Nuclei 40 1926 590 593
155. Williams S.J., Morrison D.E., Thiel B.L., and Donald A.M. Imaging of semiconducting polymer blend systems using environmental scanning electron microscopy and environmental scanning transmission electron microscopy Scanning 27 2005 190 198 (Pubitemid 41045526)
156. Wolpers C. Electron microscopy in Berlin 1928-1945 Advances in Electronics and Electron Physics 81 1991 211 229
157. Woolf R.J., Joy D.C., and Tansley D.W. A transmission stage for the scanning electron microscope Journal of Physics E: Scientific Instruments 5 1972 230 233
158. Young R.J., Buxbaum A., Peterson B., and Schampers R. Applications of in-situ sample preparation and modeling of SEM-STEM imaging ISTFA 2008: 34th international symposium for testing and failure analysis Portland, Oregon 2008 320 327
159. Young R.J., Bernas M.P., Moore M.V., Wang Y.C., Jordan J.P., Schampers R., and Van Hees I. In-situ sample preparation and high-resolution SEM-STEM analysis ISTFA 2004: 30th international symposium for testing and failure analysis Oregon,Massachusetts 2004 331 337