Low voltage contrast with an SEM transmission electron detector

Microchimica Acta

Volumn 155, Issue 1-2, 2006, Pages 157-161

  Grillon, François ^a  

^a CENTRE DES MATÉRIAUX   (France)

Author keywords

Low voltage SEM; SEM Transmission Electron Detector; STEM contrast

Indexed keywords

EID: 33748537079     PISSN: 00263672     EISSN: 14365073     Source Type: Journal    
DOI: 10.1007/s00604-006-0535-8     Document Type: Conference Paper

References (3)

1. Oho E, Sasaki T, Adachi K, Muranaka Y, Kanaya K (1986) Proc XIth Int Congr On Electr Micr Vol. I, Kyoto, p 421
2. Reimer L (1993) linage formation in low-voltage scanning electron microscopy, vol. TT 12. SPIE
3. Scala C, Pasquinelli G, Preda P, Laschi R (1986) Scanning electron microscopy III. SEM Inc. AMF O'Hare, p 987