Applications of In-situ sample preparation and modeling of SEM-STEM imaging

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2008, Pages 320-327

  Young, R J ^a,b   Buxbaum, A ^a,b   Peterson, B ^a,b   Schampers, R ^a,b  

^a Thermo Fisher Scientific   (United States)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

DUAL BEAMS; IMAGING CONDITIONS; IN-SITU; SAMPLE PREPARATION TECHNIQUES; SAMPLE PREPARATIONS; SCANNING ELECTRON MICROSCOPES; SCANNING TRANSMISSION ELECTRON MICROSCOPIES; SEM;

FOCUSED ION BEAMS; QUALITY ASSURANCE; SAFETY FACTOR; SCANNING; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

FAILURE ANALYSIS;

EID: 63549123356     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1361/cp2008istfa320     Document Type: Conference Paper

References (12)

1. Ma, Z. et al, Microscopy and Microanalysis, proceedings, vol. 5, supplement 2 (1999), pp. 904-905
2. Xu, Y. et al, "Precision TEM Specimen Preparation for f Integrated Circuits using Dual-Beam FIB Lift-Out i Technique", Microscopy and Microanalysis proc, vol. 6, I supplement 2 (2000), pp. 516-517
3. Young, R.J., and Moore, M.V., "Dual-beam (FIB/SEM) Systems" in Introduction to Focused Ion Beams: Instrumentation. Theory. Techniques, and Practice, eds. L.A. Giannuzzi and F.A. Stevie, Springer (New York 2004), pp. 247-280
4. Moore, M.V., "Using in situ STEM to increase resolution in a FIB-SEM," SCANNING, Vol. 25, May/June 2003, pp. 159-160
5. th International Symposium for Testing and Failure Analysis, November 2004, pp. 331-337
6. th International AVS Symposium, Boston, MA, October 2000
7. th International Symposium for Testing and Failure Analysis, November 2002, pp. 77-85
8. th International Symposium for Testing and Failure Analysis, November 2002, pp. 93-99
9. MC-SET: www.me-set.com (version 3J22)
10. Klein et al., "New Expressions for Angular Distributions", Scanning 18 (1996), pp.417-427
11. Kanaya, K. and Okayama, S. "Penetration and energy-loss theory of electrons in solid targets" J. Phys. D: Appl. Phys. 5 (1972),pp43-5S
12. Private communication: thanks to Milos Toth, FEI Company, Hillsboro, Oregon for first pointing out this relationship to the KO model