Traceable measurement of nanoparticle size using a scanning electron microscope in transmission mode (TSEM)

Measurement Science and Technology

Volumn 22, Issue 9, 2011, Pages

  Klein, T ^a   Buhr, E ^a   Johnsen, K P ^a   Frase, C G ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

image analysis; Monte Carlo simulation; nanoparticle size; STEM in SEM; TSEM

Indexed keywords

BATCH DATA PROCESSING; ELECTRON SCATTERING; IMAGE ANALYSIS; INTELLIGENT SYSTEMS; MONTE CARLO METHODS; NANOPARTICLES; PARTICLE SIZE; PARTICLE SIZE ANALYSIS; SCANNING ELECTRON MICROSCOPY;

CONFIDENCE INTERVAL; FIRST PRINCIPLES; IMAGE ANALYSIS TOOLS; MEASUREMENT UNCERTAINTY; NANOPARTICLE SIZES; SIZE MEASUREMENTS; TRANSMISSION MODE; TSEM;

UNCERTAINTY ANALYSIS;

EID: 80051686929     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/22/9/094002     Document Type: Article

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