Cassette-based in-situ TEM sample inspection in the dual-beam FIB

Journal of Physics: Conference Series

Volumn 126, Issue , 2008, Pages

  Kendrick, Anthony B ^a   Moore, Thomas M ^b   Zaykova Feldman, Lyudmila ^b   Amador, Gonzalo ^b   Hammer, Matt ^b  

^a SEM FIB Solutions   (United Kingdom)

^b Omniprobe Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 65649149074     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/126/1/012082     Document Type: Article

References (14)

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