STEM (scanning transmission electron microscopy) in a SEM (scanning electron microscope) for Failure Analysis and Metrology

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn , Issue , 2002, Pages 77-85

  Vanderlinde, William E ^a  

^a LABORATORY FOR PHYSICAL SCIENCES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROMAGNETIC WAVE EMISSION; ELECTRON BEAMS; ENERGY DISPERSIVE SPECTROSCOPY; FAILURE ANALYSIS; ION BEAMS; OPTICAL COLLIMATORS; REACTIVE ION ETCHING; TRANSMISSION ELECTRON MICROSCOPY;

FOCUSED ION BEAMS (FIB); SCANNING TRANSMISSION ELECTRON MICROSCOPY (STEM);

SCANNING ELECTRON MICROSCOPY;

EID: 1542360122     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. S. Morris, S. Tatti, E. Black, N. Dickson, H. Mendez, B. Pyle, B. Schwisesow, and R. Pyle., Proceedings of ISTFA 1991, p. 417-427 (1991).
2. L. Tsung, A. Anciso, R. Turner, T. Dixon, and N. Holloway, Proceedings of ISTFA 2001, p. 299-302 (2001).
3. D. Susnitzky, ISTFA 2000 tutorial notes.
4. nd Edition, Plenum, New York, 1992, p. 267.
5. Goldstein, p. 89.
6. Goldstein, p. 74.
7. Available from Small World LLC, 2226 Chestertown Drive, Vienna, VA 22182.
8. Goldstein, p. 269.