Multilevel visualization of local electric field at probe apex using scanning electron microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 6, 2008, Pages 2069-2072

  Fujita, Jun Ichi ^a   Ikeda, Yuta ^a   Suzuki, Ikumi ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ATOMS; ELECTRIC FIELD EFFECTS; ELECTRIC FIELDS; ELECTRONS; PROBES; SCANNING; SCANNING ELECTRON MICROSCOPY;

ACCELERATING VOLTAGES; BEAM AXIS; LOCAL ELECTRIC FIELDS; PRIMARY ELECTRONS; PROBE APICES; RUTHERFORD SCATTERINGS; SECONDARY ELECTRONS; SEM IMAGES; TIP APICES;

ELECTRIC NETWORK ANALYSIS;

EID: 57249105007     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2991517     Document Type: Article

References (8)

1. J. Y. Huang, K. Kempa, S. H. Jo, S. Chen, and Z. F. Ren, Appl. Phys. Lett. 87, 053110 (2005).
2. A. S. Berdinsky, A. V. Shaporin, J. B. Yoo, J. H. Park, P. S. Alegaonkar, J. H. Han, and G. H. Son, Appl. Phys. A: Mater. Sci. Process. 83, 377 (2006).
3. C. J. Edgcombe and U. Valdre, J. Microsc. 203, 188 (2001).
4. R. G. Forbes, C. J. Edgcombe, and U. Valdre, Ultramicroscopy 95, 57 (2003).
5. Z. Xu, X. D. Bai, and E. G. Wang, Appl. Phys. Lett. 88, 133107 (2006).
6. Z. L. Wang, R. P. Gao, W. A. de Heer, and P. Poncharal, Appl. Phys. Lett. 80, 856 (2002).
7. J. Fujita, Y. Ikeda, S. Okada, K. Higashi, and S. Nakasawa, J. Vac. Sci. Technol. B 25, 2624 (2007).
8. J. Fujita, Y. Ikeda, S. Okada, K. Higashi, S. Nakazawa, M. Ishida, and S. Matsui, Jpn. J. Appl. Phys., Part 1 46, 498 (2007).