Application of transmission electron detection to SCALPEL mask metrology

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2167-2172

  Farrow, R C ^a   Postek, M T ^b   Keery, W J ^b   Jones, S N ^b   Lowney, J R ^b   Blakey, M ^a   Fetter, L A ^a   Griffith, J E ^a   Liddle, J A ^a   Hopkins, L C ^a   Huggins, H A ^a   Peabody, M ^a   Novembre, A ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001751272     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589346     Document Type: Article

References (8)

1. S. D. Berger and J. M. Gibson, Appl. Phys. Lett. 57, 153 (1990).
2. L. R. Harriott, S. D. Berger, C. Biddick, M. I. Blakey, S. W. Bowler, K. Brady, R. M. Camarda, W. F. Connally, A. Crorken, J. Custy, R. Dimarco, R. C. Farrow, J. A. Felker, L. Fetter, R. Freeman, L. Hopkins, H. A. Huggins, C. S. Knurek, J. S. Kraus, J. A. Liddle, M. Mkrtychan, A. E. Novembre, M. L. Peabody, R. G. Tarascon, H. H. Wade, W. K. Waskiewicz, G. P. Watson, K. S. Werder, and D. Windt, J. Vac. Sci. Technol. B 14, 3825 (1996).
3. In, The National Technology Roadmap for Semiconductors (NTRS) available from Semiconductor Industry Association, 181 Metro Drive, Suite 450, San Jose, California 95110.
4. J. A. Liddle, M. I. Blakey, T. Saunders, R. C. Farrow, L. A. Fetter, C. S. Knurek, R. Kasica, A. E. Novembre, M. L. Peabody, D. M. Tennent, and D. L. Windt, J. Vac. Sci. Technol. B, these proceedings.
5. K. Monahan, F. Askary, R. Elliot, R. Forcier, R. Quattrini, B. Sheumaker, J. Yee, H. Marchman, B. Bennett, S. Carlson, H. Sewell, D. McCafferty, J. Sumra, and J. Yan, Proc. SPIE 2275, 480 (1996).
6. M. T. Postek, J. Res. Natl. Inst. Stand. Technol. 99, 641 (1994).
7. M. T. Postek, J. R. Lowney, A. E. Vladar, W. J. Keery, E. Marx, and R. Larrabee, J. Res. Natl. Inst. Stand. Technol. 98, 415 (1993).
8. J. A. Liddle, M. Blakey, K. Bolen, R. Farrow, L. Fetter, L. C. Hopkins, H. A. Huggins, H. M. Marchman, M. Peabody, W. M. Simpson, R. Tarascon, and G. P. Watson, Proc. SPIE 2322, 442 (1994).