Multi-wavelength VIS/UV optical diffractometer for high-accuracy calibration of nano-scale pitch standards

Measurement Science and Technology

Volumn 18, Issue 3, 2007, Pages 667-674

  Buhr, Egbert ^a   Michaelis, Winfried ^a   Diener, Alexander ^a   Mirandé, Werner ^a  

^a PHYSIKALISCH TECHNISCHE BUNDESANSTALT   (Germany)

Author keywords

Gratings; Nanometrology; Optical diffractometer; Pitch calibration; Pitch standards

Indexed keywords

ANGLE MEASUREMENT; CORRELATION METHODS; DIFFRACTOMETERS; ULTRAVIOLET RADIATION;

NANOMETROLOGY; OPTICAL DIFFRACTOMETER; PITCH CALIBRATION; PITCH STANDARDS;

DIFFRACTION GRATINGS;

ANGLE MEASUREMENT; CORRELATION METHODS; DIFFRACTION GRATINGS; DIFFRACTOMETERS; ULTRAVIOLET RADIATION;

EID: 34247242119     PISSN: 09570233     EISSN: 13616501     Source Type: Journal    
DOI: 10.1088/0957-0233/18/3/017     Document Type: Article

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