Electron tomography combining ESEM and STEM: A new 3D imaging technique

Ultramicroscopy

Volumn 111, Issue 8, 2011, Pages 1247-1254

  Jornsanoh, P ^a   Thollet, G ^a   Ferreira, J ^a   Masenelli Varlot, K ^a   Gauthier, C ^a   Bogner, A ^a  

^a UNIVERSITÉ DE LYON   (France)

Author keywords

Electron tomography; ESEM; Large tomogram; Low atomic number materials; Non conductive samples; STEM; Three dimensional characterization

Indexed keywords

ELECTRON TOMOGRAPHY; ESEM; LARGE TOMOGRAM; LOW-ATOMIC NUMBER MATERIALS; NON-CONDUCTIVE SAMPLES; STEM; THREE-DIMENSIONAL CHARACTERIZATION;

ATOMS; CHARACTERIZATION; CONDUCTIVE MATERIALS; ELECTRIC IMPEDANCE TOMOGRAPHY; ELECTRONS; IMAGING TECHNIQUES; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY;

THREE DIMENSIONAL;

ARTICLE; ATOMIC PARTICLE; CONTROLLED STUDY; ELECTRON TOMOGRAPHY; ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY; EQUIPMENT DESIGN; IMAGE ENHANCEMENT; IMAGE QUALITY; IMAGE RECONSTRUCTION; INSTRUMENT VALIDATION; INTERMETHOD COMPARISON; PROCESS DEVELOPMENT; PROCESS OPTIMIZATION; SCANNING TRANSMISSION ELECTRON MICROSCOPY; STRUCTURE ANALYSIS; THICKNESS; THREE DIMENSIONAL IMAGING; X RAY ANALYSIS;

EID: 84860395760     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2011.01.041     Document Type: Article

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