Failure analysis and defect review using extended accuracy of the CrossBeam ®Technology

Vakuum in Forschung und Praxis

Volumn 17, Issue SUPPL. 1, 2005, Pages 5-8

  Gnauck, Peter ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33845707688     PISSN: 0947076X     EISSN: None     Source Type: Journal    
DOI: 10.1002/vipr.200590031     Document Type: Review

References (4)

1. J. Orloff, Rev. Sci. Instr. 64, 1993, p. 1150 ff
2. L. R. Herlinger, S. Chevacharoenkul, D. C. Erwin, ISTFA 1996, p415
3. R. Rai, S. Subramanian, S. Rose, J. Conner, P. Schani, J. Moss, ISTFA 2000, p415
4. T. L. Shofner, J. L. Drown, S. R. Brown, B. B. Rossie, M. A. Decker, Y. S. Obeng, F. A. Stevie, ISTFA 2000, p45