Scanning electron microscopy of thinned specimens: From multilayers to biological samples

Applied Physics Letters

Volumn 90, Issue 16, 2007, Pages

  Morandi, V ^a   Merli, P G ^b   Quaglino, D ^b  

^a CNR   (Italy)

^b UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; ELECTRON BEAMS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS;

BACKSCATTERED ELECTRON IMAGES; SEMICONDUCTOR MULTILAYERS;

MULTILAYERS;

EID: 34247381174     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2724917     Document Type: Article

References (10)

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9. V. Morandi and P. G. Merli (unpublished).
10. L. Reimer, Transmission Electron Microscopy (Springer, Heidelberg, 1984), p. 397.