Images of dopant profiles in low-energy scanning transmission electron microscopy

Applied Physics Letters

Volumn 81, Issue 24, 2002, Pages 4535-4537

  Merli, P G ^a   Corticelli, F ^a   Morandi, V ^b  

^a CNR   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ARSENIC; IMAGING TECHNIQUES; MAGNESIA; SCANNING ELECTRON MICROSCOPY; SILICON;

SECONDARY ELECTRONS;

SEMICONDUCTOR DOPING;

EID: 0037049655     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1528734     Document Type: Article

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