Modeling for accurate dimensional scanning electron microscope metrology: Then and now

Scanning

Volumn 33, Issue 3, 2011, Pages 111-125

  Postek, Michael T ^a   Vladár, András E ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

accuracy; critical dimensions; electron solid interactions; metrology; Monte Carlo modeling; SEM

Indexed keywords

ACCURACY; CRITICAL DIMENSION; DIMENSIONAL METROLOGY; ELECTRON-SOLID INTERACTION; MONTE CARLO MODELING; MONTE CARLO TECHNIQUES; SCANNING ELECTRON MICROSCOPE; TECHNOLOGY TIMELINE;

MEASUREMENTS; MONTE CARLO METHODS; SCANNING ELECTRON MICROSCOPY; UNITS OF MEASUREMENT;

ELECTRONS;

ACCURACY; MATHEMATICAL MODEL; MONTE CARLO METHOD; PRIORITY JOURNAL; REVIEW; SCANNING ELECTRON MICROSCOPY; TECHNOLOGY;

EID: 79960736295     PISSN: 01610457     EISSN: 19328745     Source Type: Journal    
DOI: 10.1002/sca.20238     Document Type: Review

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