메뉴 건너뛰기




Volumn , Issue , 2008, Pages 413-430

Piezoelectric MEMS: Materials and devices

Author keywords

[No Author keywords available]

Indexed keywords


EID: 79953741684     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-0-387-76540-2_20     Document Type: Chapter
Times cited : (13)

References (66)
  • 1
    • 27544512622 scopus 로고    scopus 로고
    • Seoul, South Korea, Institute of Electrical and Electronics Engineers Computer Society, Piscataway, NJ 08855-1331, United States
    • Aigner, R., in MEMS in RF-filter applications: Thin film bulk-Acoustic-wave technology, Seoul, South Korea, 2005 (Institute of Electrical and Electronics Engineers Computer Society, Piscataway, NJ 08855-1331, United States), 5.
    • (2005) MEMS in RF-filter applications: Thin film bulk-Acoustic-wave technology , vol.5
    • Aigner, R.1
  • 2
    • 3142765371 scopus 로고    scopus 로고
    • Microfabrication of piezoelectric mems
    • Baborowski, J. (2004) Microfabrication of piezoelectric MEMS. J. Electroceram. 12: 33
    • (2004) J. Electroceram. , vol.12 , pp. 33
    • Baborowski, J.1
  • 5
    • 34848928216 scopus 로고    scopus 로고
    • Domain wall contributions to the properties of piezoelectric thin films
    • Bassiri-Gharb, N., Fuji, I., Hong, E. (2007) Domain Wall Contributions to the Properties of Piezoelectric Thin Films, J. Electroceram.
    • (2007) J. Electroceram.
    • Bassiri-Gharb, N.1    Fuji, I.2    Hong, E.3
  • 6
    • 29644442547 scopus 로고    scopus 로고
    • Analysis of the non linear domain wall response in ferroelectric thin films
    • Bharadwaja, S.S.N., Damjanovic, D., Setter, N. (2004) Analysis of the non linear domain wall response in ferroelectric thin films. Ferroelectrics 303: 59
    • (2004) Ferroelectrics , vol.303 , pp. 59
    • Bharadwaja, S.S.N.1    Damjanovic, D.2    Setter, N.3
  • 7
    • 33846998599 scopus 로고    scopus 로고
    • Growth and properties of gradient free sol-gel lead zirconate titanate thin films
    • Calame, F., Muralt, P. (2007) Growth and properties of gradient free sol-gel lead zirconate titanate thin films. Appl. Phys. Lett. 90: 62907
    • (2007) Appl. Phys. Lett. , vol.90 , pp. 62907
    • Calame, F.1    Muralt, P.2
  • 8
    • 23044511502 scopus 로고    scopus 로고
    • Detection of pathogen escherichia coli o157:H7 using self-excited pzt-glass microcantilever
    • Campbell, G.A., Mutharasan, R. (2005) Detection of pathogen Escherichia coli O157:H7 using self-excited PZT-glass microcantilever. Biosens. Bioelectr. 21: 462
    • (2005) Biosens. Bioelectr. , Issue.21 , pp. 462
    • Campbell, G.A.1    Mutharasan, R.2
  • 11
    • 34247558666 scopus 로고    scopus 로고
    • Property characterization of aln thin films in composite resonator structure
    • Chen, Q., Qin, L., Wang, Q.-M. (2007) Property characterization of AlN thin films in composite resonator structure. J. Appl. Phys. 101: 084103
    • (2007) J. Appl. Phys. , vol.101 , pp. 084103
    • Chen, Q.1    Qin, L.2    Wang, Q.-M.3
  • 12
    • 2142699723 scopus 로고    scopus 로고
    • Fabrication and characterization of high q microresonators using thin plate mechanical mode
    • Coudevylle, J.-R., Basrour, S., De Labachelerie, M. (2001) Fabrication and characterization of high Q microresonators using thin plate mechanical mode. SPIE Proc. 5343: 273
    • (2001) SPIE Proc. , vol.5343 , pp. 273
    • Coudevylle, J.-R.1    Basrour, S.2    De Labachelerie, M.3
  • 13
    • 0035368926 scopus 로고    scopus 로고
    • Surface micromachined piezoelectric accelerometers (pixls)
    • DeVoe, D.L., Pisano, A.P. (2001) Surface micromachined piezoelectric accelerometers (PiXLs). J. MEMS 10: 180
    • (2001) J. MEMS , vol.10 , pp. 180
    • DeVoe, D.L.1    Pisano, A.P.2
  • 15
    • 50749132151 scopus 로고
    • Triple-beam resonant silicon force sensor based on piezoelectric thin films
    • Fabula, T., Wagner, H.J., Schmidt, B. (1994) Triple-beam resonant silicon force sensor based on piezoelectric thin films, Sen. Actuat. A 42: 375
    • (1994) Sen. Actuat. , vol.A 42 , pp. 375
    • Fabula, T.1    Wagner, H.J.2    Schmidt, B.3
  • 16
    • 28144450618 scopus 로고    scopus 로고
    • Dielectric nonlinearity of (100) oriented pybn-pt thin films
    • Gharb, N.B., Trolier-McKinstry, S. (2005a) Dielectric nonlinearity of (100) oriented PYbN-PT thin films, IEEE ISAF, 95.
    • (2005) IEEE ISAF , pp. 95
    • Gharb, N.B.1    Trolier-McKinstry, S.2
  • 17
    • 20444497679 scopus 로고    scopus 로고
    • 3thin films with {100} and {111} crystallographic orientation
    • 3 thin films with {100} and {111} crystallographic orientation. J. Appl. Phys. 97: 064106
    • (2005) J. Appl. Phys. , Issue.97 , pp. 064106
    • Gharb, N.B.1    Trolier-Mckinstry, S.2
  • 19
    • 0042842361 scopus 로고    scopus 로고
    • Lead-zirconate-titanate-based piezoelectric micromachined switch
    • Gross, S.J., Tadigadapa, S., Jackson, T.N. (2003) Lead-zirconate- titanate-based piezoelectric micromachined switch. Appl. Phys. Lett. 83: 174
    • (2003) Appl. Phys. Lett. , Issue.83 , pp. 174
    • Gross, S.J.1    Tadigadapa, S.2    Jackson, T.N.3
  • 21
    • 0035473135 scopus 로고    scopus 로고
    • Nonlinearity in piezoelectric ceramics
    • Hall, D.A. (2001) Nonlinearity in piezoelectric ceramics J. Mater. Sci. 36: 4575
    • (2001) J. Mater. Sci. , vol.36 , pp. 4575
    • Hall, D.A.1
  • 22
    • 34247133459 scopus 로고    scopus 로고
    • Development of shunt type ohmic rf mems switches actuated by piezoelectric cantilever
    • Hee-Chul, L., Jae-Hyoung, P., Yong-Hee, P. (2007) Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever. Sens. Actuat. A 136: 282
    • (2007) Sens. Actuat. , vol.A 136 , pp. 282
    • Hee-Chul, L.1    Jae-Hyoung, P.2    Yong-Hee, P.3
  • 25
    • 17044417745 scopus 로고    scopus 로고
    • Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes
    • Hong, E., Krishnaswamy, S.V., Freidhoff, C.B. (2005) Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes. Sens. Actuat. A 119: 520
    • (2005) Sens. Actuat. A , vol.119 , pp. 520
    • Hong, E.1    Krishnaswamy, S.V.2    Freidhoff, C.B.3
  • 28
    • 77955187234 scopus 로고    scopus 로고
    • Draft 16 of a working document for a proposed standard to be entitled: Ieee standard definitions of terms associated with ferroelectric and related materials
    • IEEE
    • IEEE (2003) Draft 16 of a working document for a proposed standard to be entitled: IEEE standard definitions of terms associated with ferroelectric and related materials. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 50: 1613
    • (2003) IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. , vol.50 , pp. 1613
  • 30
    • 0025482234 scopus 로고
    • A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range
    • Judy, J.W., Polla, D.L., Robbins, W.P. (1990) A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 37: 428
    • (1990) IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. , vol.37 , pp. 428
    • Judy, J.W.1    Polla, D.L.2    Robbins, W.P.3
  • 31
    • 34548254832 scopus 로고    scopus 로고
    • Piezoelectric unimorph microactuators with x-shaped structure composed of pzt thin films
    • Kanno, I., Tazawa, Y., Suzuki, T. (2007a) Piezoelectric unimorph microactuators with X-shaped structure composed of PZT thin films. Microsyst. Tech. 13: 825
    • (2007) Microsyst. Tech. , vol.13 , pp. 825
    • Kanno, I.1    Tazawa, Y.2    Suzuki, T.3
  • 32
    • 34247484095 scopus 로고    scopus 로고
    • Development of deformable mirror composed of piezoelectric thin films for adaptive optics
    • Kanno, I., Kunisawa, T., Suzuki, T. (2007b) Development of deformable mirror composed of piezoelectric thin films for adaptive optics. IEEE J. Select. Topics Quantum Electron. 13: 155
    • (2007) IEEE J. Select. Topics Quantum Electron. , vol.13 , pp. 155
    • Kanno, I.1    Kunisawa, T.2    Suzuki, T.3
  • 33
    • 2442532866 scopus 로고    scopus 로고
    • Optimization of film stresses utilized in composite piezoelectric membrane microgenerators
    • Kennedy, M.S., Zosel, M., Richards, C.D. (2004) Optimization of film stresses utilized in composite piezoelectric membrane microgenerators. MRS Proc. 795: 503.
    • (2004) MRS Proc. , vol.795 , pp. 503
    • Kennedy, M.S.1    Zosel, M.2    Richards, C.D.3
  • 35
    • 33749065978 scopus 로고    scopus 로고
    • in Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films, Oulu, Finland, Piscataway, NJ 08855-1331, United States
    • Kotera, H., Kanno, I., Inoue, T., in Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films, Oulu, Finland, 2005 (Institute of Electrical and Electronics Engineers Computer Society, Piscataway, NJ 08855-1331, United States), 31
    • (2005) Institute of Electrical and Electronics Engineers Computer Society , vol.31
    • Kotera, H.1    Kanno, I.2    Inoue, T.3
  • 36
    • 33645510295 scopus 로고    scopus 로고
    • A novel design for integrated rf-mem switches using ferroelectric thin films
    • Kugeler, C., Tappe, S., Bottger, U. (2005) A novel design for integrated RF-MEM switches using ferroelectric thin films. Integr. Ferroelectr. 76: 59
    • (2005) Integr. Ferroelectr. , vol.76 , pp. 59
    • Kugeler, C.1    Tappe, S.2    Bottger, U.3
  • 37
    • 58149514150 scopus 로고    scopus 로고
    • Piezoelectric actuated mems for integrated rf switches based on pzt thin film bridges
    • Kugeler, C., Tappe, S., Bottger, U. (2006) Piezoelectric actuated MEMS for integrated RF switches based on PZT thin film bridges. Ferroelectrics 338: 89
    • (2006) Ferroelectrics , vol.338 , pp. 89
    • Kugeler, C.1    Tappe, S.2    Bottger, U.3
  • 41
    • 36449006814 scopus 로고    scopus 로고
    • 3 thin films on zirconium membranes for micromechanical applications
    • 3 thin films on zirconium membranes for micromechanical applications. Appl. Phys. Lett. 68: 776
    • (1996) Appl. Phys. Lett. , vol.68 , pp. 776
    • Maeder T.Muralt, P.1    Sagalowicz, L.2
  • 42
    • 33846381991 scopus 로고    scopus 로고
    • Thermo-mechanical evolution of multilayer thin films. I. Mechanical behavior of au/cr/si microcantilevers
    • Miller, D.C., Herrmann, C.F., Maier, H.J. (2007) Thermo-mechanical evolution of multilayer thin films. I. Mechanical behavior of Au/Cr/Si microcantilevers. Thin Solid Films 515: 3208
    • (2007) Thin Solid Films , vol.515 , pp. 3208
    • Miller, D.C.1    Herrmann, C.F.2    Maier, H.J.3
  • 43
    • 0001407875 scopus 로고    scopus 로고
    • Lead zirconate titanate cantilever for noncontact atomic force microscopy
    • Miyahara, Y., II, Fujii, T., Watanabe, S. (1999) Lead zirconate titanate cantilever for noncontact atomic force microscopy. Appl. Surf. Sci. 140: 428.
    • (1999) Appl. Surf. Sci. , vol.140 , pp. 428
    • Miyahara II, Y.1    Fujii, T.2    Watanabe, S.3
  • 44
    • 20844438820 scopus 로고    scopus 로고
    • Intrinsic effective piezoelectric coefficient e31,f for ferroelectric thin films
    • Ouyang, J., Ramesh, R., Roytburd, A.L. (2005) Intrinsic effective piezoelectric coefficient e31,f for ferroelectric thin films. Appl. Phys. Lett. 86: 152901
    • (2005) Appl. Phys. Lett. , vol.86 , pp. 152901
    • Ouyang, J.1    Ramesh, R.2    Roytburd, A.L.3
  • 45
    • 0032003228 scopus 로고    scopus 로고
    • Reactive ion etching damage to the electrical properties of ferroelectric thin films
    • Pan, W., Thio, C.L., Desu, S.B. (1998) Reactive ion etching damage to the electrical properties of ferroelectric thin films. J. Mater. Res. 13: 362
    • (1998) J. Mater. Res. , vol.13 , pp. 362
    • Pan, W.1    Thio, C.L.2    Desu, S.B.3
  • 46
    • 0343403763 scopus 로고    scopus 로고
    • Relaxor based ferroelectric single crystals for electro-mechanical actuators
    • Park, S.E., Shrout, T.R. (1997) Relaxor based ferroelectric single crystals for electro-mechanical actuators. Mater. Res. Innovat. 1: 20
    • (1997) Mater. Res. Innovat. , vol.1 , pp. 20
    • Park, S.E.1    Shrout, T.R.2
  • 48
    • 3042658290 scopus 로고    scopus 로고
    • Improving tapping mode atomic force microscopy with piezoelectric cantilevers
    • Rogers, B., Manning, L., Sulchek, T. (2004) Improving tapping mode atomic force microscopy with piezoelectric cantilevers. Ultramicroscopy 100: 267-276
    • (2004) Ultramicroscopy , vol.100 , pp. 267-276
    • Rogers, B.1    Manning, L.2    Sulchek, T.3
  • 49
    • 0034484410 scopus 로고    scopus 로고
    • Thin-film micromirror array (tma) for large informationdisplay systems
    • Sang-Gook, K., Kyu-Ho, H. (2000) Thin-film micromirror array (TMA) for large informationdisplay systems. J. Soc. Inf. Display 8: 177
    • (2000) J. Soc. Inf. Display , vol.8 , pp. 177
    • Sang-Gook, K.1    Kyu-Ho, H.2
  • 50
    • 33846349570 scopus 로고    scopus 로고
    • Fabrication and sensing behavior of ultrasensitive piezoelectric microcantilever-based precision mass sensor k
    • Sanghun, S., Jaichan, L. (2006) Fabrication and sensing behavior of ultrasensitive piezoelectric microcantilever-based precision mass sensor K. J. Phys. Soc. 49: 608
    • (2006) J. Phys. Soc. , vol.49 , pp. 608
    • Sanghun, S.1    Jaichan, L.2
  • 51
    • 0000497177 scopus 로고
    • Sol-gel processing of pzt thin films. A review of the state-of-the-Art and process optimization strategies
    • Schwartz, R.W., Boyle, T.J., Lockwood, S.J. (1995) Sol-gel processing of PZT thin films. A review of the state-of-the-Art and process optimization strategies. Integr. Ferroelectr. 7: 259
    • (1995) Integr. Ferroelectr. , vol.7 , pp. 259
    • Schwartz, R.W.1    Boyle, T.J.2    Lockwood, S.J.3
  • 52
    • 33646069652 scopus 로고    scopus 로고
    • High aspect ratio plasma etching of bulk lead zirconate titanate
    • Subasinghe, S.S., Goyal, A., Tadigadapa, S.A. (2006) High aspect ratio plasma etching of bulk lead zirconate titanate. SPIE Proc. 6409: 61090
    • (2006) SPIE Proc. , vol.6409 , pp. 61090
    • Subasinghe, S.S.1    Goyal, A.2    Tadigadapa, S.A.3
  • 53
    • 0000871261 scopus 로고    scopus 로고
    • 3 thin films with (100), (111), and " random" crystallographic orientation
    • 3 thin films with (100), (111), and "random" crystallographic orientation. Appl. Phys. Lett. 76: 1615
    • (2000) Appl. Phys. Lett. , Issue.76 , pp. 1615
    • Taylor, D.V.1    Damjanovic, D.2
  • 54
    • 33750837729 scopus 로고    scopus 로고
    • Piezoelectric properties of polycrystalline aln thin films for mems application
    • Tonisch, K., Cimalla, V., Foerster, C. (2006) Piezoelectric properties of polycrystalline AlN thin films for MEMS application. Sens. Actuat. A 132: 658
    • (2006) Sens. Actuat. , vol.A 132 , pp. 658
    • Tonisch, K.1    Cimalla, V.2    Foerster, C.3
  • 57
    • 0036124177 scopus 로고    scopus 로고
    • 2d micro scanner actuated by sol-gel derived double layered pzt
    • Tsaur, J., Zhang, L.,Maeda, R. (2002) 2D micro scanner actuated by sol-gel derived double layered PZT. IEEE MEMS Proc. 548
    • (2002) IEEE MEMS Proc. , vol.548
    • Tsaur, J.1    Zhang, L.2    Maeda, R.3
  • 59
    • 0033691972 scopus 로고    scopus 로고
    • Micro pump and venous valve by micro stereo lithography
    • Varadan, V.K., Varadan, V.V. (2000) Micro pump and venous valve by micro stereo lithography. SPIE Proc. 3990: 246
    • (2000) SPIE Proc. , vol.3990 , pp. 246
    • Varadan, V.K.1    Varadan, V.V.2
  • 61
    • 0035556398 scopus 로고    scopus 로고
    • Wet-etch patterning of lead zirconate titanate (pzt) thick films for microelectromechanical systems (mems) applications
    • Wang, L.P., Wolf, R., Zhou, Q. (2001) Wet-etch patterning of lead zirconate titanate (PZT) thick films for microelectromechanical systems (MEMS) applications, MRS Proc. 657: 5
    • (2001) MRS Proc. , vol.657 , pp. 5
    • Wang, L.P.1    Wolf, R.2    Zhou, Q.3
  • 62
    • 0001567385 scopus 로고    scopus 로고
    • Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films
    • Xu, F., Trolier-McKinstry, S., Ren, W. (2001) Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films. J. Appl. Phys. 89: 1336
    • (2001) J. Appl. Phys. , vol.89 , pp. 1336
    • Xu, F.1    Trolier-McKinstry, S.2    Ren, W.3
  • 63
    • 0033149639 scopus 로고    scopus 로고
    • Micromachined low-loss microwave switches
    • Yao, Z.J., Chen, S., Eshelman, S. (1999) Micromachined low-loss microwave switches. J. MEMS 8: 129-134
    • (1999) J. MEMS , vol.8 , pp. 129-134
    • Yao, Z.J.1    Chen, S.2    Eshelman, S.3
  • 64
    • 0032286722 scopus 로고    scopus 로고
    • High-resolution dry etch patterning of pzt for piezoelectric mems devices
    • Zeto, R.J., Rod, B.J., Dubey, M. (1998) High-resolution dry etch patterning of PZT for piezoelectric MEMS devices. ISAF 11: 89
    • (1998) ISAF , vol.11 , pp. 89
    • Zeto, R.J.1    Rod, B.J.2    Dubey, M.3
  • 66
    • 17044437778 scopus 로고    scopus 로고
    • Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by pzt thick films
    • Zhou, Q., Cannata, J.M.,Meyer, R.J., Jr. (2005) Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 52: 350
    • (2005) IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. , vol.52 , pp. 350
    • Zhou, Q.1    Cannata, J.M.2    Meyer Jr., R.J.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.