-
1
-
-
27544512622
-
-
Seoul, South Korea, Institute of Electrical and Electronics Engineers Computer Society, Piscataway, NJ 08855-1331, United States
-
Aigner, R., in MEMS in RF-filter applications: Thin film bulk-Acoustic-wave technology, Seoul, South Korea, 2005 (Institute of Electrical and Electronics Engineers Computer Society, Piscataway, NJ 08855-1331, United States), 5.
-
(2005)
MEMS in RF-filter applications: Thin film bulk-Acoustic-wave technology
, vol.5
-
-
Aigner, R.1
-
2
-
-
3142765371
-
Microfabrication of piezoelectric mems
-
Baborowski, J. (2004) Microfabrication of piezoelectric MEMS. J. Electroceram. 12: 33
-
(2004)
J. Electroceram.
, vol.12
, pp. 33
-
-
Baborowski, J.1
-
4
-
-
84892124669
-
-
Munich, Germany, Springer-Verlag
-
Baborowski, J., Ledermann, N., Gentil, S., in Micromachining of piezoelectric MEMS, Munich, Germany, 2001 (Springer-Verlag), 596
-
(2001)
Micromachining of piezoelectric MEMS
, vol.596
-
-
Baborowski, J.1
Ledermann, N.2
Gentil, S.3
-
5
-
-
34848928216
-
Domain wall contributions to the properties of piezoelectric thin films
-
Bassiri-Gharb, N., Fuji, I., Hong, E. (2007) Domain Wall Contributions to the Properties of Piezoelectric Thin Films, J. Electroceram.
-
(2007)
J. Electroceram.
-
-
Bassiri-Gharb, N.1
Fuji, I.2
Hong, E.3
-
6
-
-
29644442547
-
Analysis of the non linear domain wall response in ferroelectric thin films
-
Bharadwaja, S.S.N., Damjanovic, D., Setter, N. (2004) Analysis of the non linear domain wall response in ferroelectric thin films. Ferroelectrics 303: 59
-
(2004)
Ferroelectrics
, vol.303
, pp. 59
-
-
Bharadwaja, S.S.N.1
Damjanovic, D.2
Setter, N.3
-
7
-
-
33846998599
-
Growth and properties of gradient free sol-gel lead zirconate titanate thin films
-
Calame, F., Muralt, P. (2007) Growth and properties of gradient free sol-gel lead zirconate titanate thin films. Appl. Phys. Lett. 90: 62907
-
(2007)
Appl. Phys. Lett.
, vol.90
, pp. 62907
-
-
Calame, F.1
Muralt, P.2
-
8
-
-
23044511502
-
Detection of pathogen escherichia coli o157:H7 using self-excited pzt-glass microcantilever
-
Campbell, G.A., Mutharasan, R. (2005) Detection of pathogen Escherichia coli O157:H7 using self-excited PZT-glass microcantilever. Biosens. Bioelectr. 21: 462
-
(2005)
Biosens. Bioelectr.
, Issue.21
, pp. 462
-
-
Campbell, G.A.1
Mutharasan, R.2
-
11
-
-
34247558666
-
Property characterization of aln thin films in composite resonator structure
-
Chen, Q., Qin, L., Wang, Q.-M. (2007) Property characterization of AlN thin films in composite resonator structure. J. Appl. Phys. 101: 084103
-
(2007)
J. Appl. Phys.
, vol.101
, pp. 084103
-
-
Chen, Q.1
Qin, L.2
Wang, Q.-M.3
-
12
-
-
2142699723
-
Fabrication and characterization of high q microresonators using thin plate mechanical mode
-
Coudevylle, J.-R., Basrour, S., De Labachelerie, M. (2001) Fabrication and characterization of high Q microresonators using thin plate mechanical mode. SPIE Proc. 5343: 273
-
(2001)
SPIE Proc.
, vol.5343
, pp. 273
-
-
Coudevylle, J.-R.1
Basrour, S.2
De Labachelerie, M.3
-
13
-
-
0035368926
-
Surface micromachined piezoelectric accelerometers (pixls)
-
DeVoe, D.L., Pisano, A.P. (2001) Surface micromachined piezoelectric accelerometers (PiXLs). J. MEMS 10: 180
-
(2001)
J. MEMS
, vol.10
, pp. 180
-
-
DeVoe, D.L.1
Pisano, A.P.2
-
15
-
-
50749132151
-
Triple-beam resonant silicon force sensor based on piezoelectric thin films
-
Fabula, T., Wagner, H.J., Schmidt, B. (1994) Triple-beam resonant silicon force sensor based on piezoelectric thin films, Sen. Actuat. A 42: 375
-
(1994)
Sen. Actuat.
, vol.A 42
, pp. 375
-
-
Fabula, T.1
Wagner, H.J.2
Schmidt, B.3
-
16
-
-
28144450618
-
Dielectric nonlinearity of (100) oriented pybn-pt thin films
-
Gharb, N.B., Trolier-McKinstry, S. (2005a) Dielectric nonlinearity of (100) oriented PYbN-PT thin films, IEEE ISAF, 95.
-
(2005)
IEEE ISAF
, pp. 95
-
-
Gharb, N.B.1
Trolier-McKinstry, S.2
-
17
-
-
20444497679
-
3thin films with {100} and {111} crystallographic orientation
-
3 thin films with {100} and {111} crystallographic orientation. J. Appl. Phys. 97: 064106
-
(2005)
J. Appl. Phys.
, Issue.97
, pp. 064106
-
-
Gharb, N.B.1
Trolier-Mckinstry, S.2
-
19
-
-
0042842361
-
Lead-zirconate-titanate-based piezoelectric micromachined switch
-
Gross, S.J., Tadigadapa, S., Jackson, T.N. (2003) Lead-zirconate- titanate-based piezoelectric micromachined switch. Appl. Phys. Lett. 83: 174
-
(2003)
Appl. Phys. Lett.
, Issue.83
, pp. 174
-
-
Gross, S.J.1
Tadigadapa, S.2
Jackson, T.N.3
-
20
-
-
0028288819
-
Piezoelectric materials for acoustic wave applications
-
Gualtieri, J.G., Kosinski, J.A., Ballato, A. (1994) Piezoelectric materials for acoustic wave applications. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 41: 53
-
(1994)
IEEE Trans. Ultrason. Ferroelectr. Freq. Contr.
, vol.41
, pp. 53
-
-
Gualtieri, J.G.1
Kosinski, J.A.2
Ballato, A.3
-
21
-
-
0035473135
-
Nonlinearity in piezoelectric ceramics
-
Hall, D.A. (2001) Nonlinearity in piezoelectric ceramics J. Mater. Sci. 36: 4575
-
(2001)
J. Mater. Sci.
, vol.36
, pp. 4575
-
-
Hall, D.A.1
-
22
-
-
34247133459
-
Development of shunt type ohmic rf mems switches actuated by piezoelectric cantilever
-
Hee-Chul, L., Jae-Hyoung, P., Yong-Hee, P. (2007) Development of shunt type ohmic RF MEMS switches actuated by piezoelectric cantilever. Sens. Actuat. A 136: 282
-
(2007)
Sens. Actuat.
, vol.A 136
, pp. 282
-
-
Hee-Chul, L.1
Jae-Hyoung, P.2
Yong-Hee, P.3
-
23
-
-
0031139939
-
Statistical modeling for the optimal deposition of sputtered piezoelectric films
-
Hickernell, F.J., Yue, R.X., Hickernell, F.S. (1997) Statistical modeling for the optimal deposition of sputtered piezoelectric films. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 44: 615
-
(1997)
IEEE Trans. Ultrason. Ferroelectr. Freq. Contr.
, vol.44
, pp. 615
-
-
Hickernell, F.J.1
Yue, R.X.2
Hickernell, F.S.3
-
25
-
-
17044417745
-
Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes
-
Hong, E., Krishnaswamy, S.V., Freidhoff, C.B. (2005) Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes. Sens. Actuat. A 119: 520
-
(2005)
Sens. Actuat. A
, vol.119
, pp. 520
-
-
Hong, E.1
Krishnaswamy, S.V.2
Freidhoff, C.B.3
-
27
-
-
0034449120
-
Oriented growth in pzt thin films
-
Hongxia, Q., Jinsong, Z., Zhiqiang, J. (2000) Oriented growth in PZT thin films. Integr. Ferroelectr. 30: 175
-
(2000)
Integr. Ferroelectr.
, vol.30
, pp. 175
-
-
Hongxia, Q.1
Jinsong, Z.2
Zhiqiang, J.3
-
28
-
-
77955187234
-
Draft 16 of a working document for a proposed standard to be entitled: Ieee standard definitions of terms associated with ferroelectric and related materials
-
IEEE
-
IEEE (2003) Draft 16 of a working document for a proposed standard to be entitled: IEEE standard definitions of terms associated with ferroelectric and related materials. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 50: 1613
-
(2003)
IEEE Trans. Ultrason. Ferroelectr. Freq. Contr.
, vol.50
, pp. 1613
-
-
-
30
-
-
0025482234
-
A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range
-
Judy, J.W., Polla, D.L., Robbins, W.P. (1990) A linear piezoelectric stepper motor with submicrometer step size and centimeter travel range. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 37: 428
-
(1990)
IEEE Trans. Ultrason. Ferroelectr. Freq. Contr.
, vol.37
, pp. 428
-
-
Judy, J.W.1
Polla, D.L.2
Robbins, W.P.3
-
31
-
-
34548254832
-
Piezoelectric unimorph microactuators with x-shaped structure composed of pzt thin films
-
Kanno, I., Tazawa, Y., Suzuki, T. (2007a) Piezoelectric unimorph microactuators with X-shaped structure composed of PZT thin films. Microsyst. Tech. 13: 825
-
(2007)
Microsyst. Tech.
, vol.13
, pp. 825
-
-
Kanno, I.1
Tazawa, Y.2
Suzuki, T.3
-
32
-
-
34247484095
-
Development of deformable mirror composed of piezoelectric thin films for adaptive optics
-
Kanno, I., Kunisawa, T., Suzuki, T. (2007b) Development of deformable mirror composed of piezoelectric thin films for adaptive optics. IEEE J. Select. Topics Quantum Electron. 13: 155
-
(2007)
IEEE J. Select. Topics Quantum Electron.
, vol.13
, pp. 155
-
-
Kanno, I.1
Kunisawa, T.2
Suzuki, T.3
-
33
-
-
2442532866
-
Optimization of film stresses utilized in composite piezoelectric membrane microgenerators
-
Kennedy, M.S., Zosel, M., Richards, C.D. (2004) Optimization of film stresses utilized in composite piezoelectric membrane microgenerators. MRS Proc. 795: 503.
-
(2004)
MRS Proc.
, vol.795
, pp. 503
-
-
Kennedy, M.S.1
Zosel, M.2
Richards, C.D.3
-
35
-
-
33749065978
-
-
in Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films, Oulu, Finland, Piscataway, NJ 08855-1331, United States
-
Kotera, H., Kanno, I., Inoue, T., in Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films, Oulu, Finland, 2005 (Institute of Electrical and Electronics Engineers Computer Society, Piscataway, NJ 08855-1331, United States), 31
-
(2005)
Institute of Electrical and Electronics Engineers Computer Society
, vol.31
-
-
Kotera, H.1
Kanno, I.2
Inoue, T.3
-
36
-
-
33645510295
-
A novel design for integrated rf-mem switches using ferroelectric thin films
-
Kugeler, C., Tappe, S., Bottger, U. (2005) A novel design for integrated RF-MEM switches using ferroelectric thin films. Integr. Ferroelectr. 76: 59
-
(2005)
Integr. Ferroelectr.
, vol.76
, pp. 59
-
-
Kugeler, C.1
Tappe, S.2
Bottger, U.3
-
37
-
-
58149514150
-
Piezoelectric actuated mems for integrated rf switches based on pzt thin film bridges
-
Kugeler, C., Tappe, S., Bottger, U. (2006) Piezoelectric actuated MEMS for integrated RF switches based on PZT thin film bridges. Ferroelectrics 338: 89
-
(2006)
Ferroelectrics
, vol.338
, pp. 89
-
-
Kugeler, C.1
Tappe, S.2
Bottger, U.3
-
40
-
-
3142674267
-
Rf bulk acoustic wave resonators and filters
-
Loebl, H.P., Metzmacher, C., Milsom, R.F. (2004) RF bulk acoustic wave resonators and filters. J. Electroceram. 12: 109
-
(2004)
J. Electroceram.
, vol.12
, pp. 109
-
-
Loebl, H.P.1
Metzmacher, C.2
Milsom, R.F.3
-
42
-
-
33846381991
-
Thermo-mechanical evolution of multilayer thin films. I. Mechanical behavior of au/cr/si microcantilevers
-
Miller, D.C., Herrmann, C.F., Maier, H.J. (2007) Thermo-mechanical evolution of multilayer thin films. I. Mechanical behavior of Au/Cr/Si microcantilevers. Thin Solid Films 515: 3208
-
(2007)
Thin Solid Films
, vol.515
, pp. 3208
-
-
Miller, D.C.1
Herrmann, C.F.2
Maier, H.J.3
-
43
-
-
0001407875
-
Lead zirconate titanate cantilever for noncontact atomic force microscopy
-
Miyahara, Y., II, Fujii, T., Watanabe, S. (1999) Lead zirconate titanate cantilever for noncontact atomic force microscopy. Appl. Surf. Sci. 140: 428.
-
(1999)
Appl. Surf. Sci.
, vol.140
, pp. 428
-
-
Miyahara II, Y.1
Fujii, T.2
Watanabe, S.3
-
44
-
-
20844438820
-
Intrinsic effective piezoelectric coefficient e31,f for ferroelectric thin films
-
Ouyang, J., Ramesh, R., Roytburd, A.L. (2005) Intrinsic effective piezoelectric coefficient e31,f for ferroelectric thin films. Appl. Phys. Lett. 86: 152901
-
(2005)
Appl. Phys. Lett.
, vol.86
, pp. 152901
-
-
Ouyang, J.1
Ramesh, R.2
Roytburd, A.L.3
-
45
-
-
0032003228
-
Reactive ion etching damage to the electrical properties of ferroelectric thin films
-
Pan, W., Thio, C.L., Desu, S.B. (1998) Reactive ion etching damage to the electrical properties of ferroelectric thin films. J. Mater. Res. 13: 362
-
(1998)
J. Mater. Res.
, vol.13
, pp. 362
-
-
Pan, W.1
Thio, C.L.2
Desu, S.B.3
-
46
-
-
0343403763
-
Relaxor based ferroelectric single crystals for electro-mechanical actuators
-
Park, S.E., Shrout, T.R. (1997) Relaxor based ferroelectric single crystals for electro-mechanical actuators. Mater. Res. Innovat. 1: 20
-
(1997)
Mater. Res. Innovat.
, vol.1
, pp. 20
-
-
Park, S.E.1
Shrout, T.R.2
-
47
-
-
0034570965
-
Microdevices in medicine
-
Polla, D.L., Erdman, A.G., Robbins, W.P. (2000) Microdevices in medicine. Ann. Rev. Biomed. Eng. 2: 551-576
-
(2000)
Ann. Rev. Biomed. Eng.
, vol.2
, pp. 551-576
-
-
Polla, D.L.1
Erdman, A.G.2
Robbins, W.P.3
-
48
-
-
3042658290
-
Improving tapping mode atomic force microscopy with piezoelectric cantilevers
-
Rogers, B., Manning, L., Sulchek, T. (2004) Improving tapping mode atomic force microscopy with piezoelectric cantilevers. Ultramicroscopy 100: 267-276
-
(2004)
Ultramicroscopy
, vol.100
, pp. 267-276
-
-
Rogers, B.1
Manning, L.2
Sulchek, T.3
-
49
-
-
0034484410
-
Thin-film micromirror array (tma) for large informationdisplay systems
-
Sang-Gook, K., Kyu-Ho, H. (2000) Thin-film micromirror array (TMA) for large informationdisplay systems. J. Soc. Inf. Display 8: 177
-
(2000)
J. Soc. Inf. Display
, vol.8
, pp. 177
-
-
Sang-Gook, K.1
Kyu-Ho, H.2
-
50
-
-
33846349570
-
Fabrication and sensing behavior of ultrasensitive piezoelectric microcantilever-based precision mass sensor k
-
Sanghun, S., Jaichan, L. (2006) Fabrication and sensing behavior of ultrasensitive piezoelectric microcantilever-based precision mass sensor K. J. Phys. Soc. 49: 608
-
(2006)
J. Phys. Soc.
, vol.49
, pp. 608
-
-
Sanghun, S.1
Jaichan, L.2
-
51
-
-
0000497177
-
Sol-gel processing of pzt thin films. A review of the state-of-the-Art and process optimization strategies
-
Schwartz, R.W., Boyle, T.J., Lockwood, S.J. (1995) Sol-gel processing of PZT thin films. A review of the state-of-the-Art and process optimization strategies. Integr. Ferroelectr. 7: 259
-
(1995)
Integr. Ferroelectr.
, vol.7
, pp. 259
-
-
Schwartz, R.W.1
Boyle, T.J.2
Lockwood, S.J.3
-
52
-
-
33646069652
-
High aspect ratio plasma etching of bulk lead zirconate titanate
-
Subasinghe, S.S., Goyal, A., Tadigadapa, S.A. (2006) High aspect ratio plasma etching of bulk lead zirconate titanate. SPIE Proc. 6409: 61090
-
(2006)
SPIE Proc.
, vol.6409
, pp. 61090
-
-
Subasinghe, S.S.1
Goyal, A.2
Tadigadapa, S.A.3
-
53
-
-
0000871261
-
3 thin films with (100), (111), and " random" crystallographic orientation
-
3 thin films with (100), (111), and "random" crystallographic orientation. Appl. Phys. Lett. 76: 1615
-
(2000)
Appl. Phys. Lett.
, Issue.76
, pp. 1615
-
-
Taylor, D.V.1
Damjanovic, D.2
-
54
-
-
33750837729
-
Piezoelectric properties of polycrystalline aln thin films for mems application
-
Tonisch, K., Cimalla, V., Foerster, C. (2006) Piezoelectric properties of polycrystalline AlN thin films for MEMS application. Sens. Actuat. A 132: 658
-
(2006)
Sens. Actuat.
, vol.A 132
, pp. 658
-
-
Tonisch, K.1
Cimalla, V.2
Foerster, C.3
-
57
-
-
0036124177
-
2d micro scanner actuated by sol-gel derived double layered pzt
-
Tsaur, J., Zhang, L.,Maeda, R. (2002) 2D micro scanner actuated by sol-gel derived double layered PZT. IEEE MEMS Proc. 548
-
(2002)
IEEE MEMS Proc.
, vol.548
-
-
Tsaur, J.1
Zhang, L.2
Maeda, R.3
-
59
-
-
0033691972
-
Micro pump and venous valve by micro stereo lithography
-
Varadan, V.K., Varadan, V.V. (2000) Micro pump and venous valve by micro stereo lithography. SPIE Proc. 3990: 246
-
(2000)
SPIE Proc.
, vol.3990
, pp. 246
-
-
Varadan, V.K.1
Varadan, V.V.2
-
61
-
-
0035556398
-
Wet-etch patterning of lead zirconate titanate (pzt) thick films for microelectromechanical systems (mems) applications
-
Wang, L.P., Wolf, R., Zhou, Q. (2001) Wet-etch patterning of lead zirconate titanate (PZT) thick films for microelectromechanical systems (MEMS) applications, MRS Proc. 657: 5
-
(2001)
MRS Proc.
, vol.657
, pp. 5
-
-
Wang, L.P.1
Wolf, R.2
Zhou, Q.3
-
62
-
-
0001567385
-
Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films
-
Xu, F., Trolier-McKinstry, S., Ren, W. (2001) Domain wall motion and its contribution to the dielectric and piezoelectric properties of lead zirconate titanate films. J. Appl. Phys. 89: 1336
-
(2001)
J. Appl. Phys.
, vol.89
, pp. 1336
-
-
Xu, F.1
Trolier-McKinstry, S.2
Ren, W.3
-
63
-
-
0033149639
-
Micromachined low-loss microwave switches
-
Yao, Z.J., Chen, S., Eshelman, S. (1999) Micromachined low-loss microwave switches. J. MEMS 8: 129-134
-
(1999)
J. MEMS
, vol.8
, pp. 129-134
-
-
Yao, Z.J.1
Chen, S.2
Eshelman, S.3
-
64
-
-
0032286722
-
High-resolution dry etch patterning of pzt for piezoelectric mems devices
-
Zeto, R.J., Rod, B.J., Dubey, M. (1998) High-resolution dry etch patterning of PZT for piezoelectric MEMS devices. ISAF 11: 89
-
(1998)
ISAF
, vol.11
, pp. 89
-
-
Zeto, R.J.1
Rod, B.J.2
Dubey, M.3
-
66
-
-
17044437778
-
Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by pzt thick films
-
Zhou, Q., Cannata, J.M.,Meyer, R.J., Jr. (2005) Fabrication and characterization of micromachined high-frequency tonpilz transducers derived by PZT thick films. IEEE Trans. Ultrason. Ferroelectr. Freq. Contr. 52: 350
-
(2005)
IEEE Trans. Ultrason. Ferroelectr. Freq. Contr.
, vol.52
, pp. 350
-
-
Zhou, Q.1
Cannata, J.M.2
Meyer Jr., R.J.3
|