Surface micromachined piezoelectric accelerometers (PiXLs)

Journal of Microelectromechanical Systems

Volumn 10, Issue 2, 2001, Pages 180-186

  DeVoe, Don L ^a,b   Pisano, Albert P ^c  

^a IEEE   (United States)

^b UNIVERSITY OF MARYLAND   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Acceleration measurement; Microsensors; Piezoelectric films

Indexed keywords

CANTILEVER SENSOR; MICROFABRICATION; PIEZOELECTRIC FILMS; SACRIFICIAL ETCHING; SURFACE MICROMACHINING;

ACCELERATION MEASUREMENT; ETCHING; MICROMACHINING; MICROSENSORS; OPTIMIZATION; PIEZOELECTRIC MATERIALS; POLYSILICON; SENSITIVITY ANALYSIS; SILICA; SILICON; THIN FILMS; ZINC OXIDE;

ACCELEROMETERS;

EID: 0035368926     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.925733     Document Type: Article

References (13)

1. Accelerometer sensor using piezoelectric ZnO thin films
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4. A piezoelectric triaxial accelerometer
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7. A fully surface micromachined piezoelectric accelerometer
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10. Electrical properties maxima in thin films of the lead zirconate-lead titanate solid solution system
11. Selective mode excitation and detection of micromachined resonators
12. Modeling and optimal design of piezoelectric cantilever microactuators
13. Fundamental noise limits for miniature acoustic and vibration sensors